Claims
- 1. A method of coating a body with an α-alumina layer comprising:
(i) bringing the body into contact with a hydrogen carrier gas containing one or more halides of aluminium and a hydrolysing and/or oxidizing agent while the body is at a temperature of 950-1000° C.; (ii) maintaining the oxidation potential of the CVD-reactor atmosphere prior to the nucleation of Al2O3 at a low level, using a total predetermined concentration of oxidizing species; (iii) starting Al2O3 growth by introducing the following gases into the reaction chamber: AlCl3, HCl and CO2; (iv) adding a sulphur dopant after 20-60 min; (v) repeatedly stopping the CO2, AlCl3, HCl and the sulphur dopant for intervals of 10-50 min during which TiCl4 is allowed to enter the reactor for 1-10 min in a concentration of 1-10%; and (vi) then reintroducing AlCl3, HCl, CO2 and the sulphur dopant, in that order.
- 2. The method of claim 1, wherein in step (ii), the concentration of the oxidizing species is below 5 ppm.
- 3. The method of claim 2, wherein the oxidizing species comprises H2O.
- 4. The method of claim 1, wherein the sulphur dopant comprises H2S.
Priority Claims (1)
Number |
Date |
Country |
Kind |
0004272-1 |
Nov 2000 |
SE |
|
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a divisional of U.S. patent application Ser. No. 09/985,407 filed on Nov. 2, 2001, the entire contents of which are herein incorporated by reference, and claims priority under 35 U.S.C. §§119 and/or 365 to application number 0004272-1 filed in Sweden on Nov. 22, 2003, the entire contents of which are herein incorporated by reference.
Divisions (1)
|
Number |
Date |
Country |
Parent |
09985407 |
Nov 2001 |
US |
Child |
10757401 |
Jan 2004 |
US |