Claims
- 1. A thin film oxygen sensor comprising a substrate; a reference electrode coating on the substrate; an oxide-electrode interface region; a thin film layer of solid electrolyte having a thickness of less than about 1.5 .mu.m; and a porous measuring electrode coating on the electrolyte; said oxide-electrode interface region being positioned between and in intimate contact with said reference electrode coating and said solid electrolyte so as to provide a stable reference oxygen partial pressure at the reference electrode.
- 2. The oxygen sensor of claim 1 wherein said electrolyte comprises zirconia doped with 6-10% yttria.
- 3. The oxygen sensor of claim 1 wherein said electrolyte has a thickness of less than about 0.5 .mu.m.
- 4. The oxygen sensor of claim 1 wherein said electrolyte has a thickness of less than about 0.1 .mu.m.
- 5. The oxygen sensor of claim 1 wherein said substrate is non-metallic.
- 6. The oxygen sensor of claim 1 wherein said oxide-electrode interface region comprises a metal oxide.
- 7. The oxygen sensor of claim 1 wherein said oxide-electrode interface region comprises the metal of the reference electrode.
- 8. The oxygen sensor of claim 1 wherein said oxide-electrode interface region comprises oxides of a plurality of metals.
- 9. The oxygen sensor of claim 1 wherein said oxide-electrode interface region comprises a plurality of oxides of a single metal.
- 10. A thin film oxygen sensor comprising a metal substrate which performs as a reference electrode; an oxide-electrode interface region; a thin film layer of solid electrolyte having a thickness of less than about 1.5 .mu.m; and a porous measuring electrode coating on the electrolyte; said oxide-electrode interface region being positioned between and in intimate contact with said reference electrode and said solid electrolyte so as to provide a stable reference oxygen partial pressure at the reference electrode.
- 11. The oxygen sensor of claim 10 where said metal substrate is stainless steel.
- 12. The oxygen sensor of claim 10 wherein said electrolyte has a thickness of less than about 0.5 .mu.m.
- 13. The oxygen sensor of claim 10 wherein said electrolyte has a thickness of less than about 0.1 .mu.m.
Government Interests
The Government has rights in this invention pursuant to Contract No. F 33615-75C-2046 awarded by the Department of the Air Force.
US Referenced Citations (6)