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| 4453953 | Tanaka et al. | Jun 1984 | |
| 4462965 | Azuma et al. | Jul 1984 | |
| 4552659 | Tabata et al. | Nov 1985 | |
| 5368815 | Kasting, Jr. et al. | Nov 1994 | |
| 5409616 | Garbutt et al. | Apr 1995 | |
| 5520887 | Shimizu | May 1996 | |
| 5520888 | Berndt | May 1996 | |
| 5656246 | Patapoff et al. | Aug 1997 |
| Number | Date | Country |
|---|---|---|
| 0 103 144 | Mar 1984 | EPX |
| 0 262 449 | Apr 1988 | EPX |
| 52-3595 | Jan 1977 | JPX |
| 55-61984 | May 1980 | JPX |
| Entry |
|---|
| E. Coleman, et al., Journal of Vacuum Science & Technology, vol. 9, No. 4, pp. 2408-2409, "A Versatile Low-Pressure Ozone Source", Jul. 1, 1991. |