The United States Government has rights in this invention pursuant to Contract Number DE-AC04-76DP00789 between the Department of Energy and the American Telephone and Telegraph Company.
Number | Name | Date | Kind |
---|---|---|---|
3603284 | Garnache | Sep 1971 | |
4962727 | Harada | Oct 1990 |
Number | Date | Country |
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9010092 | Sep 1990 | WOX |
Entry |
---|
Compton, Chief Editor, "PECVD: A Versatile Technology," Semiconductor International, pp. 60-65, Jul. 1992. |
Klavs, Jensen F., Einset, Erik O. and Fotiadis, Dimitrios I., "Flow Phenomena In Chemical Vapor Deposition of Thin Films," Annu. Rev. Fluid Mech., vol. 23, pp. 197-232, 1991. |