Number | Name | Date | Kind |
---|---|---|---|
4522218 | Konak | Jun 1985 | |
4527435 | Hall et al. | Jul 1985 | |
4566342 | Kurz | Jan 1986 | |
4998954 | Burr | Mar 1991 | |
5052425 | Hohenberg et al. | Oct 1991 | |
5115687 | Clingman, Jr. et al. | May 1992 | |
5231865 | McDermott et al. | Aug 1993 | |
5279146 | Asano et al. | Jan 1994 | |
5417105 | Martinez et al. | May 1995 | |
5460054 | Tran | Oct 1995 |
Entry |
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Microcontamination, Mar. 1992, "Providing Next-Generation Particle Measurement and Control for Ultra-High-Purity Distribution Systems" J. D. Borkman, W. R. Couch and M. L. Malczewski, 7 pages. |
Particle Measuring Systems Inc., Data Sheet, High Pressure Gas Probes 2 pages published by Jul. 1995. |