Number | Name | Date | Kind |
---|---|---|---|
RE28015 | Vermilyea et al. | May 1974 | |
3634262 | Grunwald et al. | Jan 1972 | |
3647698 | Bellinger et al. | Mar 1972 | |
4087367 | Rioult et al. | May 1978 | |
4089709 | Harris | May 1978 | |
4098637 | Bell | Jul 1978 | |
4183781 | Eldridge et al. | Jan 1980 | |
4235648 | Richardson | Nov 1980 | |
4267013 | Iida et al. | May 1981 | |
4308089 | Iida et al. | Dec 1981 | |
4314855 | Chang et al. | Feb 1982 |
Entry |
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J. Appl. Physics 52(4) Apr. 1981, pp. 2994-2999, Lee et al., "Reactive Ion Etching Induced Corrosion of Al and Al-Cu Films". |