Information
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Patent Application
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20230301123
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Publication Number
20230301123
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Date Filed
May 12, 2023a year ago
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Date Published
September 21, 2023a year ago
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Inventors
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Original Assignees
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CPC
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International Classifications
- H10K30/86
- H01G9/00
- H01G9/20
- H10K30/40
- H10K30/50
Abstract
A method for preparing a perovskite cell with multiple hole transport layers is described. The method includes a process of forming the multiple hole transport layers, where the process of forming the multiple hole transport layers includes the following steps: (1) sputtering a nickel oxide target material in a first atmosphere to form a first hole transport layer, where the first atmosphere contains argon and oxygen, and a volume ratio of the argon to the oxygen is approximately 0:1 to 1.5: 1; (2) performing annealing treatment on the first hole transport layer; and (3) sputtering the nickel oxide target material onto the first hole transport layer subjected to the annealing treatment in a second atmosphere to form a second hole transport layer, where the second atmosphere contains argon-containing gas and oxygen. A perovskite cell (100) with multiple hole transport layers prepared by using the above method is described.
Claims
- 1. A method for preparing a perovskite cell with multiple hole transport layers, comprising a process of forming the multiple hole transport layers, wherein the process of forming the multiple hole transport layers comprises the following steps:
(1) sputtering a nickel oxide target material in a first atmosphere to form a first hole transport layer, wherein the first atmosphere contains argon and oxygen, and a volume ratio of the argon to the oxygen is approximately 0:1 to 1.5: 1;(2) performing annealing treatment on the first hole transport layer; and(3) sputtering the nickel oxide target material onto the first hole transport layer subjected to the annealing treatment in a second atmosphere to form a second hole transport layer, wherein the second atmosphere contains argon-containing gas and oxygen, a volume ratio of the argon-containing gas to the oxygen is approximately 1:0 to 4:1, and the argon-containing gas contains argon, and optionally hydrogen.
- 2. The method according to claim 1, wherein purity of nickel oxide is approximately 95 wt% or more.
- 3. The method according to claim 1, wherein magnetron sputtering is used in step (1) and/or step (3).
- 4. The method according to claim 1, wherein a thickness of the first hole transport layer and/or the second hole transport layer is approximately 5-50 nm.
- 5. The method according to claim 1, wherein the volume ratio of the argon to the oxygen in the first atmosphere is approximately 0:1 to 1:1.
- 6. The method according to claim 1, wherein in step (2), the annealing treatment is performed for approximately 1-45 min under a temperature of 200-500° C.
- 7. The method according to claim 1, wherein in step (2), the annealing treatment is performed under vacuum.
- 8. The method according to claim 1, wherein in step (2), the annealing treatment is performed in a magnetron sputtering device under a temperature of approximately 250-450° C. for approximately 5-40 min.
- 9. The method according to claim 1, wherein the volume ratio of the argon-containing gas to the oxygen in the second atmosphere is approximately 1:0 to 5:1.
- 10. The method according to claim 1, wherein the argon-containing gas contains argon and hydrogen, and a volume ratio of the argon to the hydrogen is approximately 90:10 to 99:1.
- 11. The method according to claim 1, wherein the argon-containing gas contains the argon and the hydrogen, and the volume ratio of the argon to the hydrogen is approximately 95:5.
- 12. The method according to claim 1, wherein in step (1) and/or in step (3), a sputtering power is approximately 300 W-10 kW, and an atmospheric pressure is approximately 1 × 10-4-100 Pa.
- 13. The method according to claim 1, further comprising at least one of the following steps:
providing a transparent substrate;forming a transparent conductive layer on the transparent substrate;forming the multiple hole transport layers on the transparent conductive layer (104);forming a perovskite layer on the outermost layer of the multiple hole transport layers;forming an electron transport layer on the perovskite layer; andforming a back electrode on the electron transport layer.
- 14. The method according to claim 1, further comprising at least one of the following steps:
providing a transparent substrate;forming a transparent conductive layer on the transparent substrate;forming an electron transport layer on the transparent conductive layer (104);forming a perovskite layer on the electron transport layer;forming the multiple hole transport layers on the perovskite layer; andforming a back electrode on the outermost layer of the multiple hole transport layers.
- 15. A perovskite cell (100) prepared by using the method according to claim 1, wherein the cell comprises multiple hole transport layers, and the multiple hole transport layers comprise at least a first hole transport layer (106) and a second hole transport layer (108).
- 16. The perovskite cell (100) according to claim 15, wherein the cell sequentially comprises a transparent substrate (102), a transparent conductive layer (104), the multiple hole transport layers, a perovskite layer (110), an electron transport layer (120), and a back electrode (140), or sequentially comprises a transparent substrate (102), a transparent conductive layer (104), an electron transport layer (120), a perovskite layer (110), the multiple hole transport layers, and a back electrode (140).
- 17. The perovskite cell (100) according to claim 15, wherein the multiple hole transport layers are a double-layer nickel oxide film composed of the first hole transport layer (106) and the second hole transport layer, and the film is about 10-100 nm thick.
- 18. The perovskite cell (100) according to claim 16, wherein the transparent conductive layer (104) is selected from one or more of indium tin oxide (ITO) and fluorine-doped tin dioxide (FTO).
- 19. The perovskite cell (100) according to claim 16, wherein the electron transport layer (120) is selected from one or more of [6, 6]-phenyl-C61-butyric acid methyl ester (PCBM), C60, BCP (2,9-dimethyl-4,7-diphenyl-1,10-phenanthroline), and SnO2.
- 20. The perovskite cell (100) according to claim 16, wherein the back electrode (140) is selected from one or more of ITO, tungsten-doped indium oxide (IWO), AZO, Au, Ag, Cu, Al, Ni, Cr, Bi, Pt, and Mg.
- 21. The perovskite cell (100) according to claim 16, wherein the transparent substrate (102) is made of glass.
- 22. The perovskite cell (100) according to claim 16, wherein the perovskite layer (110) contains one or more of CH3NH3PbI3, CH3NH3PbI3-xClx, and CH3NH3PbI3-xBrx, and 0<x<3.
Continuations (1)
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Number |
Date |
Country |
Parent |
PCT/CN2021/126525 |
Oct 2021 |
WO |
Child |
18316615 |
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US |