Perpendicular magnetic recording head and method of manufacturing the same

Abstract

A perpendicular magnetic recording head and a method of manufacturing the same are provided. The perpendicular magnetic recording head includes a main pole, a return yoke, and a coil which generates a magnetic field such that the main pole may record information on a recording medium. The coil has a structure that surrounds the main pole in a solenoid shape.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other features and aspects of the present invention will become more apparent by describing in detail exemplary embodiments thereof with reference to the attached drawings in which:

FIGS. 1A and 1B are views illustrating a perpendicular magnetic recording apparatus including a related art perpendicular magnetic recording head;

FIG. 2 is a conceptual view illustrating a perpendicular magnetic recording apparatus including a perpendicular magnetic recording head according to an exemplary embodiment of the present invention;

FIG. 3 is a cross-sectional view of the perpendicular magnetic recording head of FIG. 2 according to an exemplary embodiment of the present invention;

FIGS. 4A and 4B are views, viewed from a top coil, illustrating a coil structure of the perpendicular magnetic recording head of FIG. 2, according to an exemplary embodiment of the present invention;

FIGS. 5A through 5M are cross-sectional views, taken along a line A-A′ of FIG. 4A, for explaining a method of manufacturing a perpendicular magnetic recording head according to an exemplary embodiment of the present invention;

FIGS. 6A through 6J are cross-sectional views, taken along a line B-B′ of FIG. 4A, for explaining a process of manufacturing a connection portion illustrated in FIG. 4A; and

FIGS. 7A and 7B are cross-sectional views illustrating images obtained after coating a BCB layer on an upper portion of a Cu coil and planarizing the BCB layer using CMP.

Claims

1. A perpendicular magnetic recording head comprising: a main pole,a return yoke,and a coil which generates a magnetic field such that the main pole records information on a recording medium,wherein the coil has a structure that surrounds the main pole in a solenoid shape.

2. The perpendicular magnetic recording head of claim 1, wherein the coil comprises: a top coil which is formed in an upper portion of the main pole;a bottom coil which is formed in a lower portion of the main pole; anda connection portion which connects the top coil with the bottom coil to surround the main pole.

3. The perpendicular magnetic recording head of claim 2, wherein a portion of each of the top coil and/or bottom coil is bent.

4. The perpendicular magnetic recording head of claim 2, wherein each of the top coil and the bottom coil is formed of Cu.

5. The perpendicular magnetic recording head of claim 3, wherein each of the top coil and the bottom coil is formed of Cu.

6. The perpendicular magnetic recording head of claim 1, further comprising: a sub-yoke which is formed on a lateral side of the main pole to allow a magnetic field generated from the main pole to gather on a selected region of the recording medium during an information-recording process; anda magnetic shield layer which is spaced a distance from the sub-yoke to reduce an influence of a neighboring magnetic field during an information reproduction process,wherein the coil is located between the magnetic shield layer and the return yoke, and is formed in a solenoid shape which surrounds the main pole and the sub-yoke.

7. The perpendicular magnetic recording head of claim 2, further comprising: a sub-yoke which is formed on a lateral side of the main pole to allow a magnetic field generated from the main pole to gather on a selected region of the recording medium during an information-recording process; anda magnetic shield layer which is spaced a distance from the sub-yoke to reduce an influence of a neighboring magnetic field during an information reproduction process,wherein the coil is located between the magnetic shield layer and the return yoke, and is formed in a solenoid shape which surrounds the main pole and the sub-yoke.

8. The perpendicular magnetic recording head of claim 6, wherein the coil is spaced a distance such that the coil does not contact the magnetic shield layer, the sub-yoke, the main pole, and the return yoke, and a gap layer is formed on the main pole to physically separate an end of the main pole that faces an air bearing surface (ABS) from an end of the return yoke.

9. The perpendicular magnetic recording head of claim 8, further comprising: a first insulating layer which is formed on the magnetic shield layer;a second insulating layer which is formed on the first insulating layer; anda third insulating layer which is formed on the gap layer,wherein the coil comprises a top coil which is formed in an upper portion of the main pole and a bottom coil which is formed in a lower portion of the main pole, the sub-yoke is formed on the second insulating layer, the main pole is formed on the sub-yoke, the bottom coil of the coil is located between the first and second insulating layers, the top coil is formed on the third insulating layer, and the return yoke is formed on the gap layer, the third insulating layer, and the top coil.

10. The perpendicular magnetic recording head of claim 9, wherein one of the first insulating layer, the second insulating layer, and the third insulating layer is formed of one material selected from Bisbenzene Cyclobutene (BCB), Al2O3, and SiO2.

11. The perpendicular magnetic recording head of claim 9, wherein the second insulating layer is formed of Bisbenzene Cyclobutene (BCB).

12. A method of manufacturing a perpendicular magnetic recording head, the method comprising: forming an insulating layer including a bottom coil on a magnetic shield layer and forming a first connection layer on both ends of the bottom coil;forming a sub-yoke and a second connection layer on the insulating layer; andforming a main pole on the sub-yoke, forming a third connection layer on the second connection layer, andforming a top coil connected to the third connection layer.

13. The method of claim 12, wherein the forming of the insulating layer comprises: forming a first insulating layer on the magnetic shield layer;forming the bottom coil on the first insulating layer;forming a second insulating layer on the first insulating layer and the bottom coil; andexposing both ends of the bottom coil and forming the first connection layer on both ends of the bottom coil.

14. The method of claim 12, wherein the forming of the sub-yoke and the second connection layer comprises: forming the sub-yoke and the insulating layer and forming the second connection layer on the first connection layer; andcoating an insulating material on the sub-yoke and planarizing the insulating material to expose the sub-yoke.

15. The method of claim 12, wherein the forming of the main pole comprises: forming the main pole on the sub-yoke;forming a gap layer on the main pole and forming a return yoke tip on an end portion of the gap layer;forming the third connection layer on the second connection layer;coating an insulating material on the gap layer and the return yoke tip; andforming the top coil connected to the third connection layer on the insulating material.

16. The method of claim 13, wherein the second insulating layer is formed of Bisbenzene Cyclobutene (BCB).

17. The method of claim 13, wherein the first insulating layer is formed of one material selected from Bisbenzene Cyclobutene (BCB), Al2O3, and SiO2.