The field of the present disclosure is that of photonics, and more particularly the present disclosure relates to a photonic component comprising an integrated photonic chip that is joined to at least one optical part.
The integrated photonic chips are components based on semiconductor materials, produced by means of technologies usually used in the field of microelectronics and microsystems. The chips can mix optical functionalities produced by active optical devices (lasers, modulators, photo detectors, etc.) and passive optical devices (waveguides, couplers, filters, etc.), and functionalities produced by conventional electronic devices. By way of illustration, a photonic component can implement an integrated photonic chip that comprises a transmitter-receiver and is coupled to an optical fiber of a telecommunications network.
In a particular implementation, shown in
In order to form the optical component, it is possible to equip the chip 1 with additional optical parts 7, 8, 9, 10, which make it possible, in particular, to couple the input-output areas Z of the chip 1 to a network of optical fibers 7. The fibers of the network are retained by a block 7a, for example, by means of V-shaped grooves formed in the block, in an arrangement that makes it possible to couple each input-output area Z of the chip to a fiber 7b of the network. This arrangement may be in lines or in a matrix, and the block 7a is joined to the photonic chip so as to position the fibers 7b and the input-output areas Z, where the beams emerge/arrive, so as to be facing one another optically. It is also possible to provide for assembly of other optical parts on the chip, such as a lens block 8 aiming to adjust the size of beams of the inputs/outputs Z to the size of the modes of the fibers 7b, a prism 9 for reorienting the beams and facilitating the assembly of the block 7a, or indeed an optical isolator 10. An example of such combinations is described in the document US20190146164.
The photonic chips are usually manufactured collectively on a semiconductor wafer, typically made of silicon. In addition, some optical parts are joined, respectively, to the chips before being cut from the wafer (“chip to wafer” type assembly) or after being cut (“chip to chip” type assembly), typically by means of automatic insertion equipment of components (“pick and place”). The document cited above notes that the networks of fibers may be arranged on the photonic chip by implementing passive or active alignment of the two elements relative to one another.
In the passive approach, alignment markers are made, respectively, on the chips and on the network of fibers. These markers are located by the insertion equipment of components, which joins the network of fibers onto the chip by seeking to align them visually, as best as possible. The equipment then fixes the two elements together using an adhesive material, for example, an epoxy glue. The insertion equipment of the prior art achieves an assembly precision of the order of +/−5 microns, sometimes slightly less, but without being able to achieve a precision of less than +/−1 micron. When it is intended for joining a network of fibers bearing fibers of which the mode size is less than or equal to 10 microns, in order for these to couple to inputs/outputs of couplers, the size of which is of the same order of magnitude, this precision of the order of +/−5 microns is insufficient. A precision of below 10% of the mode size is generally sought in order to ensure sufficient optical coupling, and thus less than +/−1 micron.
The active alignment approach makes it possible to overcome this problem of alignment precision of the fiber network. According to this approach, at least one input area and at least one output area of the chip are interconnected by a waveguide, the ends of which are equipped with couplers, associated, respectively, with the input area and with the output area. It is thus possible to propagate radiation from the optical input area toward the optical output area. The “alignment” input-output areas of the photonic chip are dedicated, so as to allow high-precision assembly of a fiberized optical part, such as a network of fibers. They generally do not have other uses in normal operation of the chip. Thus, in order to assemble a network of fibers, one fiber of the network, intended to couple optically with an alignment input area of the chip, is connected to an optical source outside of the chip. Similarly, one optical fiber of the network of fibers to be assembled, which fiber is intended to couple optically with an alignment output area of the photonic chip, is connected to an optical power meter. The source and the power meter may form part of the insertion equipment. The equipment manipulates the network of fibers so as to find the relative position thereof with respect to the chip, which makes it possible to maximize the optical power measured by the power meter, while the source provides a certain fixed power, the optimal position being that which places the alignment input-output areas so as to face fibers connected, respectively, to the source and to the power meter of the insertion equipment. Using this equipment, it is possible to ensure positioning of the two elements to +/−0.1 microns.
This approach requires the optical part, to be aligned with the photonic chip, to be “fiberized,” i.e., previously aligned and joined to a network of fibers. In the contrary case, it is necessary to fall back on the passive approach, the precision of which is limited.
The documents US 2016/334590 and U.S. Pat. No. 6,654,523 relate to the alignment of optical fibers with optical components.
The main aim of the present disclosure is that of proposing an assembly method that overcomes this limitation. More particularly, the method aims to allow for precise assembly of an optical part on a photonic chip, the optical part not necessarily being fiberized. Another aim of the present disclosure is that of proposing a photonic chip that is designed so as to allow for the assembly method to be implemented in order to prepare a photonic component, the different elements of which are mutually aligned at a very high degree of accuracy.
In an effort to achieve the main aim, the subject matter of the present disclosure proposes a method for joining an optical part and a photonic chip, the optical part comprising a plurality of optical pathways to be aligned with a plurality of input-output areas arranged on a “main” face of the photonic chip, the assembly method comprising the following steps:
According to other advantageous and non-limiting features of the present disclosure, taken individually or in any technically possible combination:
According to another aspect, the subject matter of the present disclosure proposes a photonic chip comprising a plurality of input-output areas arranged on a “main” face, the photonic chip comprising a light source, a photo detector and, from the plurality of input-outputs, at least one alignment input-output optically associated with the light source and with the photo detector of the chip.
According to other advantageous and non-limiting features of the present disclosure, taken individually or in any technically possible combination:
According to yet another aspect, the present disclosure proposes a photonic component comprising a photonic chip as proposed above and at least one optical part comprising an optical alignment pathway from a plurality of optical pathways, the optical part being joined to the main surface of the photonic chip such that the optical alignment pathway is arranged so as to be in optical correspondence with the alignment input-output area of the chip.
According to other advantageous and non-limiting features of this aspect of the present disclosure, taken individually or in any technically possible combination:
Other features and advantages of the present disclosure will become clear from the following detailed description of the present disclosure, with reference to the accompanying drawings, in which:
Photonic Chip
With reference to
The input-output areas correspond to portions of the main surface 1a of the chip 1, in the region of which light beams emerge or are injected. The main surface 1a may be the upper surface of the chip 1 on which electrical interconnection pads C are arranged, as is shown in
In this case, all the input-output areas Z (referred to more simply as “I/O areas” in the remainder of this description) are arranged in a line and comprise an alignment I/O area Zc. The photonic chip 1 comprises, embedded under an encapsulation layer, a light source L and a photo detector PD that are optically associated with the alignment I/O area Zc. For this purpose, a waveguide WG, in the example shown, a 1 to 2 power splitter, is also arranged in the embedded plane, so as to connect the source L and the photo detector PD to a surface optical coupler GC, in this case arranged perpendicularly to the alignment I/O area Zc.
The coupler GC allows for propagation, through the encapsulation layer and toward the alignment I/O area Zc, in the form of a light beam, of the radiation originating from the light source L. Vice versa, the coupler GC allows for coupling of an incident light beam, projecting on the alignment I/O area Zc, to the photo detector PD. In the example of
Continuing the description of
In the example shown, the photonic chip 1 is provided with a single alignment I/O area Zc optically associated with a light source L and with a photo detector PD. However, advantageously it would be possible to provide the chip 1, for reasons which will become apparent in the remainder of this description, with at least two alignment I/O areas Zc, each area Zc being associated with a light source L and a photo detector PD.
In a general manner, when a plurality of alignment I/O areas Zc is provided, it is attempted to separate these from one another. They are thus not arranged in a manner juxtaposed from one another on the main surface.
It is noted that, in order to allow for the implementation of the assembly method, which is described below, it is possible to provide for joining the chip 1 in advance to a base, and for connecting, by wiring, the electrical connection pads C to corresponding pads of the base.
Assembly Method
A method for assembling an optical part and the chip 1 that has just been described is now set out. The assembly method forms part of a method for manufacturing a photonic component that benefits from alignment I/O areas and from alignment circuits integrated in the chip 1, which have just been described.
By way of example, the optical part is a lens block LB, i.e., a block bearing at least one lens, shown schematically in plan view and in cross section in
Thus, bringing “into optical correspondence” means that an optical pathway of the optical part is aligned with an I/O area of the photonic chip 1 such that a light beam propagating through the assembly undergoes optical losses that are as reduced as possible. Preferably, an alignment of better than 10% of the size mode size of the beam, intended to propagate in a pathway, is sought.
In order to allow this, the alignment lens, and each alignment lens in the case where a plurality of alignment lenses is provided, may, according to the present disclosure, be designed to reflect light radiation that can be emitted by the light source L. In this respect, the reflection coefficient of the alignment lens in question may be greater than 0.1%, advantageously greater than 1%, even more advantageously greater than 5%.
According to another alternative, it is possible to provide for the alignment pathway, and each alignment pathway in the case where a plurality of pathways is provided, to be equipped with a reflector R made of a material that is reflective at the wavelength of the radiation emitted by the light source L. On the lens block LB of
The assembly of the optical part LB is achieved by active alignment of the photonic chip 1 using the alignment circuit, for example, using an item of insertion equipment from the prior art, by activating the light source L of the photonic chip 1 so as to generate an alignment beam that propagates and reflects on one of the faces of the alignment lens, and by measuring the signal provided by the photo detector PD of the chip 1.
In a preliminary step of the assembly method, the insertion equipment, or complementary equipment connected to the insertion equipment, positions conductive tips of a measuring probe on the connection pads C of the chip 1, and, in particular, on the supply CA and measuring CM pads. The equipment is designed to provide, via contacts formed on the pads CA, CM, supply energy to the light source L, and to collect, on the measuring pad CM, the electrical signal delivered by the photo detector PD. The power supply is provided, and the measurement is collected, in a continuous manner during the active alignment step that follows.
During the following alignment step, the insertion equipment “roughly” positions the optical part LB relative to the chip, in an assembly position aiming to bring the plurality of pathways of the optical part into correspondence with the plurality of I/O areas Z of the chip 1. The rough assembly can be assisted by alignment markers formed on the chip 1 and/or on the optical part, as has been described in the introduction of this disclosure.
The radiation emitted by the light source L propagates in the waveguide WG toward the optical coupler GC and emerges from the chip 1 in the region of the alignment I/O area Zc. A portion of the emerging beam propagates in the alignment pathway of the optical part. Since the alignment is rough and imperfect, the coupling between the chip 1 and the optical part also is, and thus only a portion of the emerging beam actually propagates in the alignment pathway. The portion is reflected by the alignment lens (or by the reflector arranged on the lens, if this is considered) and reinjected, also in part, into the photonic chip 1 in the region of the alignment I/O area Zc in order to couple to the waveguide WG. A portion of the coupled radiation is directed toward the photo detector PD, and the optical power received by the device forms a measuring signal that is transferred to the measuring pad CM. It is understood that, the more precise the alignment between the alignment I/O area Zc and the alignment pathway, the greater the power reflected toward the photo detector PD will be. The electrical signal provided by the device is thus representative of the quality of the alignment of the two elements. It is also understood that, in order to ensure precise positioning of the optical part relative to the chip 1, it is advantageous to have a plurality of alignment pathways and a plurality of alignment circuits in the chip 1, in order to be able to take into account the alignment gaps in translation and in rotation.
In all cases, the insertion equipment can make use of the signal provided by the photo detector PD for precise active alignment of the two elements relative to one another. In order to achieve this, the equipment finally shifts the optical part (and/or the chip 1) in translation according to various directions in the plane defined by the main surface of the chip 1, and in rotation about an axis perpendicular to the main surface 1a, while observing the development of the signal provided by the photo detector PD and collected on the measuring pad CM. The fixing position of the optical part on the photonic chip 1 is that which maximizes the value of the signal. Once the position is determined, the optical part can be firmly fixed to the chip 1, for example, using an epoxy glue, as is well known per se.
At the end of this step, which can optionally be repeated if a plurality of optical parts has to be joined to the photonic chip 1, a photonic component is achieved comprising the photonic chip 1 and the optical part, the lens block LB in the example described, the optical part being joined to the main surface 1a of the photonic chip 1 such that the optical alignment pathway is arranged so as to be in optical correspondence with the alignment I/O area Zc of the chip 1. This, of course, leads to all the optical pathways of the optical part being brought into correspondence with the I/O areas Z of the chip. The quality of this correspondence can be improved by providing a plurality of alignment circuits in the chip 1, and an optical part comprising as many alignment pathways equipped with their reflectors, as has been mentioned above. It is thus possible to achieve an alignment precision of much less than 10% of the mode size of the light beam produce by the source L in the region of the alignment I/O area Zc.
The approach that has just been set out is in no way limited to the assembly of the lens block LB that has been used by way of example. It can apply to any optical part to be joined to the photonic chip 1 in order to complete and form a functional photonic component. It may be, in particular, besides the lens block, a network of fibers, a Faraday polarization rotator, a prism, an isolator, a polarizer. It may be a plurality of the optical parts that are previously joined to one another. It will be noted that some of these parts (plug, rotator, etc.) do not require precise alignment relative to the chip 1 or other optical parts, and in this case the assembly of the parts can be achieved without using the alignment circuit of the chip 1, for example, by means of passive assembly. In a general manner, an assembly method according to the present disclosure can mix a plurality of assembly approaches, it being possible for some optical parts to be joined to the chip 1 without taking advantage of the alignment circuit.
In all cases where it is desirable to take advantage of the alignment circuit of the chip 1, it will be provided to consider an alignment lens capable of reflecting, in part, the light radiation emitted by the light source L. Alternatively, and as described above in the disclosure, it is possible to provide for a reflector R to be arranged on the alignment pathway of the optical part, in order to be able to implement the assembly method that has just been set out. In the case of a network of fibers, the reflector R could, for example, be arranged in a V-shaped groove of the block that holds the fibers, in place of such a fiber or by placing therein a fiber comprising a reflector at the end thereof.
It is noted that this assembly method is in no way limited to a fiberized optical part, as is the case in the active assembly method of the prior art, which is very advantageous.
When a plurality of optical parts are to be joined onto the same chip 1, it is possible to provide a plurality of alignment circuits in order to make it possible to implement the assembly method successively for each of the parts, each alignment circuit being dedicated to the assembly of one part. This is, in particular, the case when the alignment lens is designed to reflect, or when a reflector is formed directly on the part to be joined, and is not removed following fixing of the optical part onto the chip.
When a reflector is considered, it is possible to envisage that this is not formed in a definitive manner on the optical part. It may thus be a reflective paste arranged on the part so as to shape to the part, for example, to the shape of the lens LBc of the alignment pathway, when the part is a lens block LB. The paste may be eliminated from the optical part at the end of the assembly method. In this case, it is possible to re-use the same alignment circuit in order to successively align a plurality of optical parts.
With reference to
Of course, the present disclosure is not limited to the embodiments described, and it is possible to add variants thereto, without extending beyond the scope of the invention as defined by the claims.
Number | Date | Country | Kind |
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2006481 | Jun 2020 | FR | national |
This application is a national phase entry under 35 U.S.C. § 371 of International Patent Application PCT/FR2021/050386, filed Mar. 8, 2021, designating the United States of America and published as International Patent Publication WO 2021/260280 A1 on Dec. 30, 2021, which claims the benefit under Article 8 of the Patent Cooperation Treaty to French Patent Application Serial No. 2006481, filed Jun. 22, 2020.
Filing Document | Filing Date | Country | Kind |
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PCT/FR2021/050386 | 3/8/2021 | WO |