Number | Date | Country | Kind |
---|---|---|---|
51/145341 | Dec 1976 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3847610 | Laridon et al. | Nov 1974 | |
3962056 | Pacifici et al. | Jun 1976 | |
3966573 | Bean | Jun 1976 | |
4043887 | Pacifici et al. | Aug 1977 | |
4058398 | Osada et al. | Nov 1977 | |
4080275 | Photis et al. | Mar 1978 | |
4080382 | Pacifici et al. | Mar 1978 | |
4082686 | Van Allen et al. | Dec 1977 |
Entry |
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Kosar, "Light-Sensitive Systems", 8/1965, pp. 160-188, esp. pp. 167-170. |
DeForest, "Photoresist", 6/1975, pp. 35 et seq. |