Number | Date | Country | Kind |
---|---|---|---|
3-309390 | Nov 1991 | JPX | |
4-037764 | Feb 1992 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4434318 | Gibbons | Feb 1984 | |
4922218 | Watanabe et al. | May 1990 | |
5100478 | Kawabata | Mar 1992 | |
5136351 | Inoue et al. | Aug 1992 |
Number | Date | Country |
---|---|---|
1-77973 | Mar 1989 | JPX |
1-106472 | Apr 1989 | JPX |
Entry |
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IEEE Electron Device Lett., vol. EDL-4, No. 5, pp. 157-159; May 1983 (Iida et al). |
Materials Research Society 1991 Annual Meeting: "Preparation of High-Quality a-SiGe:H Films with Low Impurity Concentration By the Hydrogen Dilution Method" (Sayama et al). |
Technical Digest of the International PVSEC-5, Kyoto, Japan, 1990 pp. 43-46. (Zeman et al). |