Patent Application
20120314269
The present invention relates to a piezoelectric actuator mechanism, and more particularly, to a piezoelectric actuator mechanism in which a screw feed mechanism is driven by a piezoelectric vibrator to perform displacement, angle adjustment, or positioning of a mount portion located at a leading end of a feed screw.
For example, in the field of optical equipment, it is necessary to adjust positions or angles for alignment, or perform accurate positioning of various optical members such as a lens and a mirror. As a drive source therefor, there is known an electric actuator in which a speed reduction mechanism is coupled to a plunger of an electromagnetic motor and an output shaft thereof is pressed against one side of a mirror holder, or a piezoelectric actuator including an ultrasonic motor which uses a piezoelectric vibrator. The ultrasonic motor has the following function. Through application of a voltage to an electrode provided to the piezoelectric vibrator, the vibrator leading end performs an expansion and contraction movement or an elliptical movement. Amember to be driven is brought into frictional contact to the vibrator leading end, to thereby execute intermittent linear motion or rotational motion. The ultrasonic motor is described in detail in, for example, Patent Document 1.
As a piezoelectric actuator for optical alignment, in which an ultrasonic motor is incorporated, there is known a piezoelectric actuator disclosed in Patent Document 2. This piezoelectric actuator has a structure in which a stage plate for holding a mirror is supported at three points, and outer peripheries of three adjustment screw members arranged at those three support portions are grasped by pairs of jaw members of three piezoelectric actuators, respectively. By biasing the piezoelectric actuator, the jaw members are set in motion in a screw rotational direction of the adjustment screw member to feed the adjustment screw member by a frictional force generated between the adjustment screw member and the jaw members, to thereby perform alignment adjustment of the stage plate. In this structure, the piezoelectric vibrator performs expansion and contraction motion, and with low speed motion of the pair of jaw members, the adjustment screw member is fed by the frictional force. With high-speed return, the jaw members slip over the adjustment screw member, and thus the adjustment screw member is intermittently fed.
In the field of various types of precision equipment, in particular, optical equipment, along with enhancement and increase in accuracy of various testing technologies, there is an increasing demand for accurate automatic operation in, for example, mirror angle adjustment and a focusing mechanism for an objective lens. However, in a case where the above-mentioned electromagnetic motor is used as a drive source, when a small electromagnetic motor is selected for downsizing, a speed reduction mechanism and a feeding mechanism of a ball screw and the like are necessary so as to obtain a thrust necessary for angle adjustment, and thus the entire length of the electric actuator becomes long. Therefore, when multiple automatic-operation type mirror holders are arranged in an interferometer system and the like, the entire device structure is upsized.
In the piezoelectric actuator for an optical alignment screw disclosed in Patent Document 2, the actuator is arranged on the lateral portion of the alignment screw, and hence the entire length can be shortened, and as a linear drive actuator (positioning device), the piezoelectric actuator can be downsized while maintaining high accuracy. However, the piezoelectric actuator employs an impact drive method, and hence the motion speed is as slow as 0.02 mm/sec. or less. Thus, the piezoelectric actuator is not appropriate for automatic testing.
The present invention has been made to solve the above-mentioned problems, and has an object and challenge to provide a small and highly accurate piezoelectric actuator mechanism having a short entire length, which is capable of performing position/angle adjustment or positioning and is appropriate for adjustment of a mirror holder in an optical system or for automatic operation of positioning of a movable table in a linear stage.
According to the present invention, there is provided (1) a piezoelectric actuator mechanism, comprising: a screw feed mechanism comprising a feed screw and a feed screw nut; a disc-shaped rotor mounted on a rear end surface of the feed screw nut; an ultrasonic motor having a piezoelectric vibrator which comes into contact with a peripheral surface of the disc-shaped rotor; and a mount portion to be driven, which is pressed against a leading end of the feed screw by a spring force, and is displaced and positioned by feed motion of the feed screw.
According to one mode of the present invention, there is provided (2) the piezoelectric actuator mechanism as described in (1) above, wherein the mount portion to be driven is a mirror holder supported at one surface thereof by a fixed support in a pivotable manner.
According to another mode of the present invention, there is also provided (3) the piezoelectric actuator mechanism as described in (1) above, wherein the mount portion to be driven is a movable table of a linear stage.
According to another mode of the present invention, there is also provided (4) the piezoelectric actuator mechanism as described in (1) or (2) above, wherein the disc-shaped rotor is mounted on the rear end surface of the feed screw in a replaceable manner, and the ultrasonic motor is mounted in such a manner that a position thereof is adjustable in an axial direction of the piezoelectric vibrator in accordance with an outer diameter of the disc-shaped rotor.
According to another mode of the present invention, there is also provided (5) the piezoelectric actuator mechanism as described in (1) or (2) above, wherein the disc-shaped rotor is mounted on the rear end surface of the feed screw in a replaceable manner, and the ultrasonic motor is mounted so as to be replaceable in accordance with an outer diameter of the disc-shaped rotor.
Further, according to another mode of the present invention, there is provided (6) a piezoelectric actuator mechanism, comprising: a screw feed mechanism comprising a feed screw and a feed screw nut; a disc-shaped rotor mounted on a rear end surface of the feed screw nut; an ultrasonic motor having a piezoelectric vibrator which comes into contact with one end surface of the disc-shaped rotor; and a mount portion to be driven, which is pressed against a leading end of the feed screw by a spring force, and is displaced and positioned by feed motion of the feed screw.
According to another mode of the present invention, there is also provided (7) the piezoelectric actuator mechanism as described in (6) above, wherein the disc-shaped rotor is formed to have an outer diameter larger than an outer diameter of the feed screw nut, and the ultrasonic motor comes into contact with the one end surface of the disc-shaped rotor, which surface faces the feed screw nut.
According to the present invention, it is possible to obtain the piezoelectric actuator mechanism, which does not require a conventional electromagnetic motor or speed reduction mechanism and thus has a short entire length and is downsized, and further has high accuracy and fine feed resolution, which makes it possible to perform automatic operation of linear feed motion, tilt motion, and positioning of the mount portion to be driven with high accuracy.
Next, a piezoelectric actuator mechanism according to an example of the present invention is described with reference to the drawing of a conventional example. In the example of the present invention, amount portion to be driven is a mirror holder, and the piezoelectric actuator mechanisms are arranged at two corner portions located on a diagonal line of one end surface of the mirror holder. Each of the piezoelectric actuator mechanisms causes an ultrasonic motor to rotate and drive a feed screw nut of a screw feed mechanism, and thus a feed screw which is threadably mounted to the nut is brought into contact with the mirror holder. Then, in a case where the positions of the two feed screws are assumed as two apex positions of a triangle, a fixed support is provided to a position corresponding to the remaining one apex, and the mirror holder is supported by three points including the two feed screws and the one fixed support. An ultrasonic motor is arranged in a direction orthogonal to an axis line direction of the feed screw of the piezoelectric actuator mechanism, and causes the rotational motion of the feed screw nut. Only the screw feed mechanism is arranged in the axis line direction of the piezoelectric actuator, and hence the length of the entire device is reduced.
When this relationship is described in comparison to an electric mirror holder using a conventional electric actuator, as illustrated in
Next, various examples of the present invention are specifically described.
In Example 1, the piezoelectric actuator mechanism according to the present invention is applied to an angle adjustment mechanism of a mirror holder of an optical system. For example, in order to appropriately orient a mirror held by the mirror holder with respect to an optical axis of an optical device in the optical system, the mirror holder is rotated about a longitudinal axis line of the mirror center, or is rotated about a lateral axis line to perform so-called tilting motion. In this example, one corner portion of the mirror holder is supported by one support, and the rotational motion and the tilting motion are performed around this support to adjust the orientation angle of the mirror.
With reference to
The two screw feed mechanisms incorporated in the casing 7 have the same structure in this example, and hence one of the two screw feed mechanisms is described herein. The feed screw 11 is threadably mounted to a feed screw nut 14 which is axially supported to the casing 7 so as to be freely rotatable via a bearing 13, and further, a key 15 fixed to a midway portion of the outer periphery of the feed screw 11 engages with a key groove 16 formed in an inner wall of the casing 7 so as to be slidable in the axial direction. With this, the rotation of the feed screw 11 is inhibited. Note that, as a mechanism for inhibiting the rotation of the feed screw 11, the portions in which the key and the key groove are formed may be inverted. The key extending in the axial direction may be formed in the inner wall of the casing, and the key groove that engages with the key may be formed at a flange portion fixed to the outer periphery of the feed screw 11.
The feed screw nut 14 has a rear end portion formed into a larger-diameter disc shape, and a large-width circular ring (member denoted by reference symbol 17) is mounted to the disc portion of the rear end portion in a fixed or mountable/removable manner. The circular ring is referred to as a rotor 17 herein. Ultrasonic motor 18 is mounted at a lateral position of the rotor 17 and inside the casing 7. A leading end of a piezoelectric vibrator 19 of the ultrasonic motor 18 is brought into frictional contact with an outer peripheral surface of the rotor 17. When a predetermined voltage is applied to an electrode (not shown) provided to the piezoelectric vibrator 19, the leading end of the vibrator 19 performs minute repetitive circular motion. Thus, the rotor 17 rotates around its center by a frictional force, and the rotational force is transmitted to the feed screw nut 14. As a result, with the screw feed action, the feed screw 11 performs entering/retracting motion in the axial direction. Note that, the rotational direction and the rotational speed of the rotor 17 are controlled by the voltage applied to the piezoelectric vibrator 19.
A pair of piezoelectric actuators 6 arranged at the corner portions of the front plate 8 of the mirror holder 1 is individually controlled, and thus the moving amount of each feed screw 11 is individually controlled as well. With the movement of the feed screw 11, that is, forward and backward movement thereof, the mirror holder 1 pressed against the leading ends of the feed screws 11 by the tension spring 12 is rotated or performs various types of tilt motion around the position of the support pin 9 as one support.
For example, when the feed screws 11 of both of the piezoelectric actuators 6a and 6b perform the expansion and contraction motion, the mirror holder 1 performs tilt motion corresponding to the expansion and contraction amount of the feed screws 11 with the support pin 9 as the only support. Further, when the feed screw of the upper piezoelectric actuator 6a of
As described above, in the piezoelectric actuator 6 of this example, the ultrasonic motor 18 is not arranged on the axis line of the rotor 17, but is arranged on the lateral side of the rotor 17, that is, on the lateral side of the screw feed mechanism. In addition, the rotation of the rotor 17 is converted into linear motion operation of the feed screw. Therefore, the entire length of the device (length of the mirror 10 in the axis line direction) becomes extremely short. Further, a speed reduction gear mechanism and the like are not provided, and hence the entire structure is compact.
In a case where the angle of the mirror holder 1 is required to be adjusted more finely in the present invention, this angle adjustment may be achieved by replacing the rotor 17 with another rotor 17 having a larger outer diameter, which can provide an effect similar to that obtained when a speed reducer is provided. Therefore, the rotor 17 is mounted to the feed screw nut 14 in a replaceable manner, and further, the ultrasonic motor 18 which is held in contact with the rotor 17 is mounted in a manner allowing the position of rotor 17 to be with respect to the casing 7 in an axial direction of the vibrator 19.
In a modified example of Example 1, the ultrasonic motor 18 is mounted to the casing 7 in a replaceable manner. When the rotor 17 having a large outer diameter is mounted, the ultrasonic motor 18 is replaced with another ultrasonic motor 18 which corresponds to the outer diameter of this rotor 17. With this, the leading end of the piezoelectric vibrator 19 comes in contact with the outer periphery of the rotor 17 at an appropriate pressing pressure.
In Example 2, two piezoelectric actuators are provided for support at three points including one fixed support and the leading ends of two feed screws, and the mirror holder performs two types of motion including rotational motion about the longitudinal axis line (vertical axis line) and “tilting” motion about the lateral axis line (horizontal axis line). In Example 2, one piezoelectric actuator is provided, and the mirror holder is supported by two fixed supports in a manner so that it can pivot. Positions of those fixed supports and an arrangement position of the piezoelectric actuator may be appropriately selected so that only one of the above-mentioned tilting motion and the rotational motion about the longitudinal axis line is performed by the expansion and contraction motion of one feed screw.
On one side of the base, the piezoelectric actuator 6 according to the present invention is arranged, and further, an overhang bracket 25 is fixed to the side portion of the movable table 21. The piezoelectric actuator mechanism in Example 3 has substantially the same structure as that described in Example 1, and comprises the feed screw 11 protruded from an actuator main body portion, the feed screw nut to which the feed screw 11 is threadably mounted, a member inhibiting the feed screw 11 from rotating, a disc-like rotor mounted to the rear end portion of the feed screw nut, and the ultrasonic motor 18 arranged on a lateral side of the actuator main body portion and including the piezoelectric vibrator having a leading end which comes in contact with the peripheral surface of the rotor. The leading end of the feed screw 11 comes in contact with the bracket 25 of the movable table 21, and the movable table 21 is biased by the tension spring (not shown) so that the bracket 25 and the feed screw 11 are always brought into pressure contact with each other.
Through voltage application to the ultrasonic motor 18, the piezoelectric vibrator 19 performs circular motion in a direction in which the rotor 17 is rotated. Along with the rotation of the rotor 17, the screw feed mechanism causes the feed screw 11 to advance or retract, and thus the movable table 21 causes the base 22 to perform linear motion via the bracket 25. Restitution motion, that is, the retracting motion of the movable table 21 is caused by the retracting motion of the feed screw 11, and the movable table 21 is returned to the retracted position by the tension spring. Through control of the stop position of the feed screw 11, the position of the movable table 21 is controlled and determined.
Also in Example 3, the piezoelectric actuator mechanism is arranged on a lateral side with respect to the moving direction of the movable table, and hence the linear stage does not become long in the moving direction as a whole, and has a compact structure. Further, by forming the rotor to be brought into contact with the piezoelectric vibrator comprising a disc having a larger outer diameter, it is possible to provide a highly-accurate piezoelectric actuator mechanism having a short entire length, which can perform linear motion with finer feeding resolution. A speed reduction mechanism which is required in the case of the electromagnetic motor is unnecessary, and thus many advantages can be achieved such that a linear stage with a simple structure is obtained.
In
| Number | Date | Country | Kind |
|---|---|---|---|
| 2010-031954 | Feb 2010 | JP | national |
| Filing Document | Filing Date | Country | Kind | 371c Date |
|---|---|---|---|---|
| PCT/JP2011/051419 | 1/26/2011 | WO | 00 | 8/16/2012 |
