Claims
- 1. A method for producing a piezoelectric element comprising the steps of:
superposing a piezoelectric material made of a piezoelectric ceramic composition containing a PbMg1/3Nb2/3O3—PbZrO3—PbTiO3 ternary system solid solution composition represented by the following general formula (1) as a main component and 0.05 to 10.0 mass % of NiO on a ceramic substrate or on an electrode formed on the ceramic substrate, and subjecting the superposed piezoelectric material to a thermal treatment in an atmosphere where 0.03-0.5 mg/cm3 (NiO conversion amount per unit volume of a space in a container) of an atmosphere-controlling material having the same composition as the piezoelectric material is coexisted Pbx(Mgy/3Nb2/3)aTibZrcO3 (1) wherein 0.95≦x≦1.05; 0.8≦y≦1.0; a, b and c are decimals falling in a range surrounded by (a, b, c)=(0.550, 0.425, 0.025), (0.550, 0.325, 0.125), (0.375, 0.325, 0.300), (0.100, 0.425, 0.475), (0.100, 0.475, 0.425) and (0.375, 0.425, 0.200), in the coordinates with coordinate axes of said a, b and c, and a+b+c=1.00.
- 2. A method for producing a piezoelectric element comprising the steps of:
superposing a piezoelectric material made of a piezoelectric ceramic composition containing a PbMg1/3Nb2/3O3—PbZrO3—PbTiO3 ternary system solid solution composition represented by the following general formula (1) as a main component and 0.05 to 10.0 mass % of NiO on a ceramic substrate or on an electrode formed on the ceramic substrate, and subjecting the superposed piezoelectric material to a thermal treatment in an atmosphere; wherein 0.03-0.5 mg/cm3 (NiO conversion amount per unit volume of a space in a container) of an atmosphere-controlling material having the same composition as the piezoelectric material is coexisted as a container for housing said electrode on which the piezoelectric material is superposed and a setter for mounting the piezoelectric material thereon Pbx(Mgy/3Nb2/3)aTibZrcO3 (1) wherein 0.95≦x≦1.05; 0.8≦y≦1.0; a, b and c are decimals falling in a range surrounded by (a, b, c)=(0.550, 0.425, 0.025), (0.550, 0.325, 0.125), (0.375, 0.325, 0.300), (0.100, 0.425, 0.475), (0.100, 0.475, 0.425) and (0.375, 0.425, 0.200), in the coordinates with coordinate axes of said a, b and c, and a+b+c=1.00.
Priority Claims (2)
Number |
Date |
Country |
Kind |
2000-286,115 |
Sep 2000 |
JP |
|
2001-388,313 |
Dec 2001 |
JP |
|
CROSS-REFERENCE OF RELATED APPLICATIONS
[0001] This application is a division of U.S. patent application Ser. No. 10/072,297, filed Feb. 7, 2002, which is a continuation-in-part application of U.S. patent application Ser. No. 09/953,674, filed on Sep. 17, 2001, now U.S. Pat. No. 6,565,997, the entireties of which are incorporated herein by reference.
Divisions (1)
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Number |
Date |
Country |
Parent |
10072297 |
Feb 2002 |
US |
Child |
10666879 |
Sep 2003 |
US |
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
09953674 |
Sep 2001 |
US |
Child |
10072297 |
Feb 2002 |
US |