Claims
- 1. A method for producing a piezoelectric element comprising the steps of:
superposing a piezoelectric material containing a Pb(Mg, Ni)1/3Nb2/3O3—PbZrO3—PbTiO3 ternary system solid solution composition represented by the following general formula (1) as a main component on a ceramic substrate or on an electrode formed on the ceramic substrate, and subjecting the superposed piezoelectric material to a thermal treatment in an atmosphere where 0.03-0.5 mg/cm3 (NiO conversion amount per unit volume of a space in a container) of a atmosphere-controlling material having the same composition as the piezoelectric material coexists Pbx{(Mg1−yNiy)1/3Nb2/3}bTicZrdO3 (1) wherein 0.95≦x≦1.05; 0.05≦y≦0.20; 0.90≦a≦1.10; b, c and d are decimals falling in a range surrounded by (b,c,d)=(0.550, 0.425, 0.025), (0.550, 0.325, 0.125), (0.375, 0.325, 0.300), (0.100, 0.425, 0.475), (0.100, 0.475, 0.425) and (0.375, 0.425, 0.200), in the coordinates with coordinate axes of said b, c and d, and b+c+d=1.000.
- 2. A method for producing a piezoelectric element comprising the steps of:
superposing a piezoelectric material containing a Pb(Mg, Ni)1/3Nb2/3O3—PbZrO3—PbTiO3 ternary system solid solution composition represented by the following general formula (1) as a main component on a ceramic substrate or on an electrode formed on the ceramic substrate, and subjecting the superposed piezoelectric material to a thermal treatment in an atmosphere; wherein a previously heat-treated container and a previously heat-treated setter are used as a container for housing said electrode on which the piezoelectric material is superposed and a setter for mounting the piezoelectric material thereon in the presence of 0.03-0.5 mg/cm3 (NiO conversion amount per unit volume of a space in a container) of an atmosphere-controlling material having the same composition as the piezoelectric material Pbx{(Mg1−yNiy)1/3×aNb2/3}bTicZrdO3 (1) wherein 0.95≦x≦1.05; 0.05≦y≦0.20; 0.90≦a≦1.10; b, c and d are decimals falling in a range surrounded by (b,c,d)=(0.550, 0.425, 0.025), (0.550, 0.325, 0.125), (0.375, 0.325, 0.300), (0.100, 0.425, 0.475), (0.100, 0.475, 0.425) and (0.375, 0.425, 0.200), in the coordinates with coordinate axes of said b, c and d, and b+c+d=1.000.
Priority Claims (2)
Number |
Date |
Country |
Kind |
2000-286,115 |
Sep 2000 |
JP |
|
2001-388,315 |
Dec 2001 |
JP |
|
CROSS-REFERENCE OF RELATED APPLICATIONS
[0001] This application is a division of U.S. patent application Ser. No. 10/072,294, filed Feb. 7, 2002, which is a continuation-in-part of U.S. patent application Ser. No. 09/953,674, filed Sep. 17, 2001, the entireties of which are incorporated herein by reference.
Divisions (1)
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Number |
Date |
Country |
Parent |
10072294 |
Feb 2002 |
US |
Child |
10428216 |
May 2003 |
US |
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
09953674 |
Sep 2001 |
US |
Child |
10072294 |
Feb 2002 |
US |