Number | Date | Country | Kind |
---|---|---|---|
3878/93 | Dec 1993 | CHX |
Filing Document | Filing Date | Country | Kind | 102e Date | 371c Date |
---|---|---|---|---|---|
PCT/IB94/00435 | 12/21/1994 | 6/5/1996 | 6/5/1996 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO95/18307 | 7/6/1995 |
Number | Name | Date | Kind |
---|---|---|---|
417035 | Hyatt | Dec 1889 | |
1183486 | Pardue | May 1916 | |
5085562 | Van Lintel | Feb 1992 | |
5171132 | Miyazaki et al. | Dec 1992 | |
5271724 | Van Lintel | Dec 1993 |
Number | Date | Country |
---|---|---|
0 392 978 | Oct 1990 | EPX |
0 435 653 | Jul 1991 | EPX |
1177065 | Apr 1959 | FRX |
60-159387 | Aug 1985 | JPX |
WO 9204569 | Mar 1992 | WOX |
Entry |
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H.T.G. Van Lintel, "A Piezoelectric Micropump Based on Micromachining of Silicon", Sensors and Actuators, 1988, vol. 15, pp. 153-167, Elsevier Sequoia/Printed in the Netherlands. |