2. Piezoelectric pump
3. Piezoelectric pump
4. Piezoelectric pump
5. Piezoelectric pump
6. Piezoelectric pump
7. Piezoelectric pump
8. Piezoelectric pump
9. Piezoelectric pump
2.1
2.2
2.3
2.4
2.5
2.6
2.7
2.8
3.1
3.2
3.3
3.4
3.5
3.6
3.7
3.8
4.1
4.2
4.3
4.4
4.5
4.6
4.7
4.8
5.1
5.2
5.3
5.4
5.5
5.6
5.7
5.8
6.1
6.2
6.3
6.4
6.5
6.6
6.7
6.8
7.1
7.2
7.3
7.4
7.5
7.6
7.7
7:8
8.1
8.2
8.3
8.4
8.5
8.6
8:7
8.8
9.1
9.2
9.3
9.4
9.5
9.6
9.7
9.8
The broken lines depict portions of the piezoelectric pump which form no part of the claimed design.
The dot-dash broken lines illustrate boundaries which form no part of the claimed design.