Plasma generating electrode inspection device

Abstract

The present invention provides a plasma generating electrode inspection device capable of efficiently inspecting the parallelism, flatness, surface roughness, and dielectric strength of a plasma generating electrode. A plasma generating electrode inspection device 100 includes a reference quartz plate 2 provided with a film-shaped transparent conductor 1 disposed on one surface (outer surface 2a), a reference spacer 3 disposed on the outer edge of the other surface (inner surface 2b) of the reference quartz plate 2, a reference clamper 4 which can secure a plasma generating electrode 11 as an inspection target between the reference spacer 3 and the reference clamper 4, and a pulse power supply 5 capable of applying a pulse voltage between the transparent conductor 1 and the plasma generating electrode 11 as an inspection target while changing the voltage.

Description

BRIEF DESCRIPTION OF THE DRAWING

FIG. 1 is a cross-sectional view schematically showing a plasma generating electrode inspection device according to one embodiment of the present invention.

Claims

1. A plasma generating electrode inspection device comprising: a reference quartz plate provided with a film-shaped transparent conductor disposed on one surface (outer surface);a reference spacer disposed on an outer edge of the other surface (inner surface) of the reference quartz plate;a reference clamper which secures a plasma generating electrode as an inspection target between the reference spacer and the reference clamper; anda pulse power supply capable of applying a pulse voltage between the transparent conductor and the plasma generating electrode as an inspection target while changing the voltage.

2. The plasma generating electrode inspection device according to claim 1, further comprising a CCD camera capable of observing a plasma generation state from outside through the transparent conductor.

3. The plasma generating electrode inspection device according to claim 1, wherein parallelism between the inner surface and the outer surface of the reference quartz plate is 100 λ or less, and the inner surface and the outer surface respectively have a flatness of 10 λ or less.

4. The plasma generating electrode inspection device according to claim 1, wherein the reference spacer has a parallelism between a surface contacting the reference quartz plate and a surface contacting the plasma generating electrode as an inspection target of 100 λ or less, and the surface contacting the reference quartz plate and the surface contacting the plasma generating electrode as an inspection target respectively have a flatness of 10 λ or less.

5. The plasma generating electrode inspection device according to claim 1, wherein a surface of the reference clamper contacting the plasma generating electrode as an inspection target has a flatness of 10 λ or less.