PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS

Abstract

A plasma processing is performed by providing a first and a second electrodes to be relatively parallelly movable, disposing an object to be processed on the second electrode so as to face the first electrode and providing a blocking member to both end portions of the second electrode, so that a plasma processing space is blocked by the blocking member when the first and second electrodes are moved relatively with each other. A voltage is applied to both the first and the second electrodes and a process gas is introduced into the plasma processing space formed between the first and second electrodes, and the plasma is irradiated to the object. The blocking member is provided so as to extend from the second electrode to the first electrode, and an upper surface of the blocking member is raised higher than a surface level of the object to be processed.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

In the accompanying drawings:

FIG. 1 is a vertical sectional view showing an outline of a plasma processing apparatus according to a first embodiment for embodying a plasma processing method of the present invention;

FIG. 2 is a cross sectional view showing a structure of a scanning head having a first electrode shown in FIG. 1;

FIG. 3 is a cross sectional view taken along the line III-III in FIG. 1;

FIG. 4 is a cross sectional view showing an elemental structure of a second embodiment according to the present invention as viewed in the same manner as in FIG. 3;

FIG. 5 is cross sectional view showing an elemental structure of a third embodiment according to the present invention as viewed in the same manner as in FIG. 3;

FIG. 6 is a schematically enlarged cross sectional view of a color filter, in which FIG. 6A is a cross sectional view showing a normal color filter, FIG. 6B is a cross sectional view showing a color filter causing a color void, and FIG. 6C is a cross sectional view showing a color filter causing a color mixing; and

FIG. 7 is a cross sectional view showing an outline of a conventional plasma processing apparatus for embodying a conventional plasma processing method as viewed in the same manner as in FIG. 3.

Claims

1. A plasma processing method comprising the steps of: providing a first and a second electrodes so as to be relatively movable in parallel;disposing an object to be processed on the second electrode so as to face the first electrode;providing a blocking member to both end portions of the second electrode in parallel in the relative moving direction of the first and second electrodes, so that a plasma processing space formed between the first electrode and the object to be processed is blocked by the blocking member when the first and second electrodes are moved relatively in parallel with each other;applying voltage to both the first and the second electrodes and introducing a process gas into the plasma processing space formed between the first and second electrodes while both the first and second electrodes are relatively moved in parallel with each other; andradiating the plasma generated at a portion between the first and second electrodes to the object to be processed,wherein the blocking member is provided so as to extend from the second electrode to the first electrode so that an upper surface of the blocking member is raised higher than or equal to a surface level of the object disposed on the second electrode.

2. The plasma processing method according to claim 1, wherein the blocking member is preliminarily extended along the relatively parallel moving direction.

3. The plasma processing method according to claim 1, wherein the blocking member is configured as a guide rail having a top portion fitted to a concave groove formed at a portion close to the first electrode.

4. The plasma processing method according to claim 1, wherein the blocking member is configured as a labyrinth rail having a top portion fitted to a plurality rows of concave grooves formed at a portion close to the first electrode.

5. A plasma processing apparatus comprising: a pair of first and second electrodes disposed to be relatively movable in parallel directions;an object to be processed disposed on the second electrode so that the object to be processed faces the first electrode;a blocking member provided to both end portions of the second electrode, which is in parallel with the relatively parallel moving direction of the first and second electrodes, so that a plasma processing space formed between the first electrode and the processing object to be processed is blocked by the blocking member when the first and second electrodes are moved relatively in parallel with each other;a process gas supplying means for introducing the process gas into the plasma processing space when both the first and second electrodes are moved relatively in parallel direction; anda power source for applying voltage to both the first and the second electrodes so as to generate plasma and radiating the plasma generated at a portion between the first and second electrodes to the object to be processed,wherein the blocking member is provided so as to extend from the second electrode to the first electrode so that an upper surface of the blocking member is raised higher than or equal to a surface level of the object disposed on the second electrode.

6. A method of manufacturing a color filter comprising the steps of: providing a first and a second electrodes so as to be relatively movable in parallel;disposing an object, on which a black matrix is formed, on the second electrode so as to face the first electrode;providing a blocking member to both end portions of the second electrode in parallel in the relative moving direction of the first and second electrodes, so that a plasma processing space formed between the first electrode and the object is blocked by the blocking member when the first and second electrodes are moved relatively in parallel with each other;applying voltage to both the first and the second electrodes and introducing a process gas into the plasma processing space formed between the first and second electrodes while both the first and second electrodes are relatively moved in parallel with each other;radiating the plasma generated at a portion between the first and second electrodes to the object; andfilling a recessed portion of the black matrix formed on the glass plate with a color ink.

7. A color filter manufactured by the color filter manufacturing method according to claim 6.