Plasma reactor showerhead face plate having concentric ridge pattern

Information

  • Patent Grant
  • D641829
  • Patent Number
    D641,829
  • Date Filed
    Friday, October 29, 2010
    14 years ago
  • Date Issued
    Tuesday, July 19, 2011
    13 years ago
  • US Classifications
    Field of Search
    • US
    • D23 213
    • D23 229
    • D23 230
    • 239 282000
    • 239 283000
    • 438 712000
  • International Classifications
    • 2301
    • Term of Grant
      14Years
      Disclaimer
      This patent is subject to a terminal disclaimer.
Abstract
Description


FIG. 1 is a lower front perspective view of a plasma reactor showerhead face plate having concentric ridge pattern showing our new design, wherein dashed lines represent holes and are unclaimed as part of this invention;



FIG. 2 is a top plan view thereof;



FIG. 3 is a bottom plan view thereof;



FIG. 4 is a side elevational view thereof, all sides being identical thereto; and,



FIG. 5 is a cross-sectional view thereof, taken generally along line 55 in FIG. 3, showing succinctly the surface contours seen in FIGS. 1 and 3.


Claims
  • We claim the ornamental design for a plasma reactor showerhead face plate having concentric ridge pattern, as shown and described.
US Referenced Citations (10)
Number Name Date Kind
D459434 Fauquet Jun 2002 S
D459435 Fauquet Jun 2002 S
D466183 Tse Nov 2002 S
D495776 Blomstrom Sep 2004 S
6983898 Clark Jan 2006 B2
D593640 Schoenherr et al. Jun 2009 S
D599881 Wang et al. Sep 2009 S
D619202 Zhang Jul 2010 S
D623721 Reynoso Sep 2010 S
D624155 Yokoyama et al. Sep 2010 S