Plasma spraying device and a method for introducing a liquid precursor into a plasma gas stream

Information

  • Patent Application
  • 20080057212
  • Publication Number
    20080057212
  • Date Filed
    June 19, 2007
    17 years ago
  • Date Published
    March 06, 2008
    16 years ago
Abstract
The invention relates to a plasma spraying device (1) for spraying a coating (2) onto a substrate (3) by a thermal spray process. Said plasma spraying device (1) includes a plasma torch (4) for heating up a plasma gas (5) in a heating zone (6), wherein the plasma torch (4) includes a nozzle body (7) for forming a plasma gas stream (8), and said plasma torch (4) having an aperture (9) running along a central longitudinal axis (10) through said nozzle body (7). The aperture (9) has an convergent section (11) with an inlet (12) for the plasma gas (5), a throat section (13) including a minimum cross-sectional area of the aperture, and a divergent section (14) with an outlet (15) for the plasma gas stream (8), wherein an introducing duct (16) is provided for introducing a liquid precursor (17) into the plasma gas stream (8). According to the invention a penetration means (18, 161, 181, 182) is provided to penetrate the liquid precursor (17) inside the plasma gas stream (8). The invention relates also to method for introducing a liquid precursor (17) into a plasma gas stream (8) as well as to the use of a plasma spraying device (1) and a method in accordance with the present invention for coating a surface of a substrate (3).
Description

In the following, the invention is described in more detail with reference to the schematic drawing. There are shown:



FIG. 1 a plasma spraying device in accordance with the invention;



FIG. 2 a plasma torch with a penetration groove;



FIG. 3 a plasma torch with a nebulizer.





In FIG. 1, a plasma spraying device in accordance with the invention is schematically displayed, which plasma spraying device is designated overall in the following by the reference numeral 1. Note that the same reference numerals in different figures designate the same technical features.


The plasma spraying device according to FIG. 1 includes a plasma torch 4 for heating up a plasma gas 5 in a heating zone 6. The plasma torch 4 has a nozzle body 7 for forming a plasma gas stream 8. An aperture 9 is running along a central longitudinal axis 10 through the nozzle body 7, which aperture 9 has an convergent section 11 with an inlet 12 for the plasma gas 5, a throat section 13 including a minimum cross-sectional area of the aperture, and a divergent section 14 with an outlet 15 for the plasma gas stream 8. An introducing duct 16 is provided for introducing a liquid precursor 17, provided by a supply unit 19, into the plasma gas stream 8. In accordance with the present invention, a penetration means 18, is also provided to penetrate the liquid precursor 17 inside the plasma gas stream 8, which is directed to a surface of a substrate 3 for spraying a coating 2 onto the substrate 3.


In the special example of FIG. 1, the introducing duct 16 is provided between the convergent section 11 and the divergent section 14 of the aperture 9 at the minimum cross-sectional area of the aperture 9. It is understood that in another special embodiment the introducing duct 16 can be provided between the inlet 12 of the convergent section 11 and the minimum cross-sectional area of the aperture 9 and/or the introducing duct 16 is provided between the minimum cross-sectional area of the aperture 9 and the outlet 15 of the divergent section 14.



FIG. 2 shows a second embodiment of the present invention wherein the plasma torch 4 includes a penetration groove 181. The penetration groove 18, 181, being provided at an inner wall 19 of the nozzle body 7 and is in particular a circumferential penetration groove 181. The introducing duct 16 is provided between the convergent section 11 and the divergent section 14 of the aperture 9 at the minimum cross-sectional area of the aperture 9 close to the penetration groove 181.


The penetration grove 181 has a triangular shape and has a width 1811 of for example 0.5 mm to 3 mm, in particular between 1 mm and 2 mm, especially is 1.5 mm and has a depth 1812 of 0.05 mm to 2 mm, in particular between 0.75 mm and 1.5 mm, preferably 1 mm.


The introducing duct 16 in the example of FIG. 2 includes at the same time a penetration means 18, which is a penetration groove 181 and a capillary 182.


That is, in addition to the penetration groove 181, the penetration means 18 is provided by the introducing duct 16 being designed as the capillary 182 having an injection hole 183 with reduced diameter, wherein the capillary 182 is provided between the convergent section 11 and the divergent section 14 of the aperture 9, in particular at the minimum cross-sectional area of the aperture 9 close to the penetration groove 181, which is placed downstream with respect to the capillary 182. In the present example, the introducing angle α of the introducing duct 16 is about 90°.


Regarding FIG. 3, a plasma torch 4 with a nebulizer 161 is displayed as a further very important embodiment of the present invention.


In this example the penetration means 18 is provided by the introducing duct 16 being designed as a nebulizer 161, wherein no penetration groove is provided. It is understood, that in an other embodiment a nebulizer 161 can be advantageously combined with a penetration groove 181 and/or with a capillary 182.


According to FIG. 3 the nebulizer 161 is provided between the convergent section 11 and the divergent section 14 of the aperture 9, in particular at the minimum cross-sectional area of the aperture 9 and is arranged under an introducing angle α of about 90° with respect to the central longitudinal axis 10.


The present invention demonstrates for the first time the possibility of injecting liquids inside the nozzle of a plasma torch, either directly or using a nebulizer. Both methods require a special design of the torch nozzle to obtain a pressure sufficiently high at the injection point to avoid solidification of the liquid. For direct injection, a high velocity of the fluid is necessary to penetrate through the plasma flow boundary layer. This is achieved using a very small diameter injection hole (capillary), but is in most cases not advantageously applicable for highly viscous liquids or slurries. If a larger diameter of the injection hole is used which leads to a low injection velocity, mixing of the liquid with the plasma jet can strongly be improved by the penetration grooves, which induce turbulence in the boundary layer and distribute the liquid azimuthally.

Claims
  • 1. Plasma spraying device for spraying a coating (2) onto a substrate (3) by a thermal spray process, said plasma spraying device including a plasma torch (4) for heating up a plasma gas (5) in a heating zone (6), wherein the plasma torch (4) includes a nozzle body (7) for forming a plasma gas stream (8), said plasma torch (4) having an aperture (9) running along a central longitudinal axis (10) through said nozzle body (7), which aperture (9) has an convergent section (11) with an inlet (12) for the plasma gas (5), a throat section (13) including a minimum cross-sectional area of the aperture, and a divergent section (14) with an outlet (15) for the plasma gas stream (8), wherein an introducing duct (16) is provided for introducing a liquid precursor (17) into the plasma gas stream (8), characterized in that a penetration means (18, 161, 181, 182) is provided to penetrate the liquid precursor (17) inside the plasma gas stream (8).
  • 2. Plasma spraying device in accordance with claim 1, wherein the introducing duct (16) is provided between the convergent section (11) and the divergent section (14) of the aperture (9), in particular at the minimum cross-sectional area of the aperture (9) and/or wherein the introducing duct (16) is provided between the inlet (12) of the convergent section (11) and the minimum cross-sectional area of the aperture (9) and/or wherein the introducing duct (16) is provided between the minimum cross-sectional area of the aperture (9) and the outlet (15) of the divergent section (14).
  • 3. Plasma spraying device in accordance with claim 1, wherein the penetration means (18) is a penetration groove (181), being provided at an inner wall (19) of the nozzle body (7), in particular a circumferential penetration groove (181).
  • 4. Plasma spraying device in accordance with claim 1, wherein the penetration groove (181) is provided between the convergent section (11) and the divergent section (14) of the aperture (9), in particular at the minimum cross-sectional area of the aperture (9) and/or wherein the penetration groove (181) is provided between the inlet (12) of the convergent section (11) and the minimum cross-sectional area of the aperture (9) and/or wherein the penetration groove (181) is provided between the minimum cross-sectional area of the aperture (9) and the outlet (15) of the divergent section (14).
  • 5. Plasma spraying device in accordance with claim 1, wherein the penetration grove (181) has a triangular shape and/or has a width (1811) of 0.5 mm to 3 mm, in particular between 1 mm and 2 mm, especially 1.5 mm and/or has a depth (1812) of 0.05 mm to 2 mm, in particular between 0.75 mm and 1.5 mm, preferably 1 mm.
  • 6. Plasma spraying device in accordance with claim 1, wherein the penetration means (18) is provided by the introducing duct (16) being designed as a nebulizer (161).
  • 7. Plasma spraying device in accordance with claim 1, wherein the nebulizer (161) is provided between the convergent section (11) and the divergent section (14) of the aperture (9), in particular at the minimum cross-sectional area of the aperture (9) and/or wherein the nebulizer (161) is provided between the inlet (12) of the convergent section (11) and the minimum cross-sectional area of the aperture (9) and/or wherein the nebulizer (161) is provided between the minimum cross-sectional area of the aperture (9) and the outlet (15) of the divergent section (14).
  • 8. Plasma spraying device in accordance with claim 1, wherein the penetration means (18) is provided by the introducing duct (16) being designed as a capillary (182) having an injection hole (183) with reduced diameter.
  • 9. Plasma spraying device in accordance with claim 1, wherein the capillary (182) is provided between the convergent section (11) and the divergent section (14) of the aperture (9), in particular at the minimum cross-sectional area of the aperture (9) and/or wherein the capillary (182) is provided between the inlet (12) of the convergent section (11) and the minimum cross-sectional area of the aperture (9) and/or wherein the capillary (182) is provided between the minimum cross-sectional area of the aperture (9) and the outlet (15) of the divergent section (14).
  • 10. Plasma spraying device in accordance with claim 1, wherein an introducing angle (α) of the introducing duct (16) is between 20° and 150°, in particular between 45° and 135°, preferably between 70° and 110°, especially about 90°.
  • 11. Plasma spraying device in accordance with claim 1, wherein the introducing duct (16) and/or the penetration means (18), in particular the nebulizer (161), is made of PFA and or of other materials.
  • 12. Plasma spraying device in accordance with claim 1, including a supply unit (19) to supply the liquid precursor (17).
  • 13. Plasma spraying device in accordance with claim 12, wherein the supply unit (19) includes a reservoir for the liquid precursor (17) and/or a reservoir for a carrier gas and/or a reservoir pressurization for pressurizing the liquid precursor (17) by the carrier gas and/or a metering device, in particular a liquid and/or gas flow meter, especially a mass flow meter, for metering the flow of the liquid precursor and/or the carrier gas.
  • 14. Plasma spraying device in accordance with claim 12, wherein the liquid precursor (17) is a slurry, and/or a suspension, and/or the fluid is water, and/or an acid, and/or an alkali fluid, and/or an organic fluid, in particular methanol, and/or an salt solution, and/or an organosilicon and/or another coating fluid (17), and/or the liquid precursor (17) is a suspension or a slurry, in particular a liquid precursor (17) comprising nanoparticles and/or an solution or mixing of the aforementioned liquid precursor (17).
  • 15. Method for introducing a liquid precursor (17) into a plasma gas stream (8) using a plasma spraying device (1) comprising the following steps: providing a plasma spraying device (1), including a plasma torch (4), with a nozzle body (7), said plasma torch (4) having an aperture (9) running along a central longitudinal axis (10) through said nozzle body (7), and the aperture (9) having an convergent section (11) with an inlet (12) for the plasma gas (5), a throat section (13) including a minimum cross-sectional area of the aperture (9), and a divergent section (14) with an outlet (15) for the plasma gas (5), wherein an introducing duct (16) is provided for introducing a liquid precursor (17) into a plasma gas stream (8);introducing a plasma gas (5) into the inlet (12) of the convergent section (11) of the aperture (9), and feeding the plasma gas (5) through the convergent section (11), the throat section (13), and the divergent section (14) to the outlet (15) of the divergent section (14);ignitioning and establishing a plasma flame inside the plasma torch (4) in a heating zone (6), heating up the plasma gas (5) and forming the plasma gas stream (8);coating a surface of a substrate (3) by feeding the plasma gas stream (9) via the outlet (15) of the diverging section (14) of the aperture (9) onto the surface of the substrate (3); characterized in that a penetration means (18, 161, 181, 182) is provided and the liquid precursor (17) is penetrated through the introducing duct (16) inside the plasma gas stream (8) with the aid of the penetration means (8, 181).
  • 16. Method in accordance with claim 15, wherein the introducing duct (16) is provided between the convergent section (11) and the divergent section (14) of the aperture (9), in particular at the minimum cross-sectional area of the aperture (9) and/or wherein the introducing duct (16) is provided between the inlet (12) of the convergent section (11) and the minimum cross-sectional area of the aperture (9) and/or wherein the introducing duct (16) is provided between the minimum cross-sectional area of the aperture (9) and the outlet (15) of the divergent section (14).
  • 17. Method in accordance with claim 15, wherein the penetration means (18) is a penetration groove (181), being provided at an inner wall (19) of the nozzle body (7), in particular a circumferential penetration groove (181).
  • 18. Method in accordance with claim 15, wherein the penetration groove (181) is provided between the convergent section (11) and the divergent section (14) of the aperture (9), in particular at the minimum cross-sectional area of the aperture (9) and/or wherein the penetration groove (181) is provided between the inlet (12) of the convergent section (11) and the minimum cross-sectional area of the aperture (9) and/or or wherein the penetration groove (181) is provided between the minimum cross-sectional area of the aperture (9) and the outlet (15) of the divergent section (14).
  • 19. Method in accordance with claim 15, wherein the penetration grove (181) has a triangular shape and/or has a width (1811) of 0.5 mm to 3 mm, in particular between 1 mm and 2 mm, especially 1.5 mm and/or has a depth (1812) of 0.05 mm to 2 mm, in particular between 1 mm and 1.5 mm.
  • 20. Method in accordance with claim 15, wherein the penetration means (18) is provided by the introducing duct (16) being designed as a nebulizer (161).
  • 21. Method in accordance with claim 15, wherein the nebulizer (161) is provided between the convergent section (11) and the divergent section (14) of the aperture (9), in particular at the minimum cross-sectional area of the aperture (9) and/or wherein the nebulizer (161) is provided between the inlet (12) of the convergent section (11) and the minimum cross-sectional area of the aperture (9) and/or wherein the nebulizer (161) is provided between the minimum cross-sectional area of the aperture (9) and the outlet (15) of the divergent section (14).
  • 22. Method in accordance with claim 15, wherein the penetration means (18) is provided by the introducing duct (16) being designed as a capillary (182) having an injection hole (183) with reduced diameter.
  • 23. Method in accordance with claim 15, wherein the capillary (182) is provided between the convergent section (11) and the divergent section (14) of the aperture (9), in particular at the minimum cross-sectional area of the aperture (9) and/or wherein the capillary (182) is provided between the inlet (12) of the convergent section (11) and the minimum cross-sectional area of the aperture (9) and/or wherein the capillary (182) is provided between the minimum cross-sectional area of the aperture (9) and the outlet (15) of the divergent section (14).
  • 24. Method in accordance with claim 15, wherein the liquid precursor (17) is introduced at an introducing angle (α) between 20° and 150°, in particular between 45° and 135°, preferably between 70° and 110°, especially about 90°.
  • 25. Method in accordance with claim 15, wherein the liquid precursor (17) is a slurry, and/or a suspension, and/or the fluid is water, and/or an acid, and/or an alkali fluid, and/or an organic fluid, in particular methanol, and/or an salt solution and/or an , and/or another coating fluid, and/or the liquid precursor (17) is a suspension or a slurry, in particular a liquid precursor comprising nanoparticles and/or an solution or mixing of the aforementioned liquid precursor (17).
  • 26. Use of a plasma spraying device (1) made in accordance with claim 1 for coating a surface of a substrate (3) or a device (3), a carbon coating, especially a Diamond Like Carbon Coating, and/or a carbide coating and/or a nitride coating and/or a composite coating and/or a nanostructured coating, in particular a surface of a photovoltaic device (3), especially a solar cell, and/or for providing a coating, in particular a functional coating on a substrate (3), in particular on a glass substrate or on a semiconductor, especially on a silicon substrate (3), in more particular on a wafer comprising electronic elements and/or for providing a functional coating on textiles.
Priority Claims (1)
Number Date Country Kind
06119769.5 Aug 2006 EP regional