This is related to U.S. patent application Ser. Nos. 11/469,210; 11/469,226; 11/469,241; 11/469,253 and 11/469,266, filed Aug. 31, 2006; which are herein incorporated by reference.
This is related to U.S. patent application Ser. Nos. 11/475,857 and 11/478,459, filed Jun. 26, 2006; which are herein incorporated by reference.
1. Field of the Invention
The present invention relates generally to a combined polarizer and diffraction grating to polarize and further control light, such as by reducing zero order back reflection.
2. Related Art
Diffraction gratings are a periodic structure of dielectric material with a period (p) greater than about half the wavelength (λ) of incident light, or p≧˜λ/2. The diffraction grating scatters the normally incident light at discrete angles or directions in accordance with mλ=p sin θ, where m is the order and θ is the angle with respect to normal from the diffraction grating. Thus, different wavelengths are reflected or scattered at different angles.
Wire grid polarizers are a periodic structure of conductive elements with a length greater than the wavelength and a period less than about half the wavelength of the incident light, or p≦˜λ/2. Examples of wire grid polarizers are shown in U.S. Pat. Nos. 6,288,840; 6,243,199 and 6,122,103. Wire grid polarizers have been proven to be effective for visible light (˜400-700 nm, or ˜0.4-0.7 microns or μm) and their use demonstrated as polarizers and beam splitters in optical imaging systems. For example, see U.S. Pat. Nos. 6,234,634 and 6,447,120. Composite wire-grid polarizers have been proposed in which the wires include alternating layers of dielectric and conductive layers. For example, see U.S. Pat. Nos. 6,532,111; 6,665,119; 6,788,461 and 7,113,335. Such polarizers, however, can also back reflect a portion of the incident light resulting in a ghost image, indicated at 500 in
It has been recognized that it would be advantageous to develop a wire grid polarizer or polarizer device capable of reducing back reflection, and thus capable of reducing ghost images when used in an imaging system or display system. In addition, it has been recognized that it would be advantageous to develop a wire grid polarizer or polarizer device capable of polarizing and further controlling the light, such as the direction or modes of reflection. In addition, it has been recognized that it would be advantageous to develop a non-zero order type polarizer device capable of polarizing light while reflecting only light of non-zero order, and without reflecting light of the zero order. Furthermore, it has been recognized that it would be advantageous to develop an imaging system with such a wire grid polarizer or polarizer device capable of conserving space in the optical design, and capable of reducing ghost images and unwanted astigmatism.
The invention provides a polarization device configured to polarize and further control light incident on the device. The device includes an optical stack with a diffraction grating and a wire grid polarizer with one disposed over the other and configured to be disposed in the light. The wire grid polarizer includes an array of elongated, parallel conductive wires in accordance with PWGP<λ/2 where PWGP is the period of the wires and λ is the wavelength of the light, to polarize the light by substantially reflecting light having an s-polarization orientation and substantially transmitting light having a p-polarization orientation. The diffraction grating includes an array of elongated parallel dielectric ribs in accordance with PDG>λ/2 where PDG is the period of the ribs, to substantially diffract light with the s-polarization orientation of non-zero order at a non-orthogonal angle, so that the diffraction grating and the wire grid polarizer together pass light having p-polarization orientation while diffracting light having s-polarization orientation.
Additional features and advantages of the invention will be apparent from the detailed description which follows, taken in conjunction with the accompanying drawings, which together illustrate, by way of example, features of the invention; and, wherein:
a is a cross-sectional side view of a polarizer device in accordance with an embodiment of the present invention;
b is a detailed cross-sectional side view of another polarizer device in accordance with another embodiment of the present invention;
c and 1d are schematic side views of the polarizer device of
e is a cross-sectional side view of an exemplary polarizer device in accordance with an embodiment of the present invention;
f is a cross-sectional side view of another polarizer device in accordance with another embodiment of the present invention;
a is a graph of s polarization reflectance with respect to wavelength for the polarizer device of
b is a graph of p polarization transmittance with respect to wavelength for the polarization device of
c is a graph of p polarization reflectance with respect to wavelength for the polarization device of
d is a graph of s and p polarization reflectance and transmittance for various orders with respect to wavelength for the polarization device of
e is a graph of zero order s polarization reflectance with respect to wavelength for the polarization device of
a is a schematic view of a combiner with a polarizer device in accordance with an embodiment of the present invention;
b is a schematic view of a separator with a polarizer device in accordance with an embodiment of the present invention;
Reference will now be made to the exemplary embodiments illustrated, and specific language will be used herein to describe the same. It will nevertheless be understood that no limitation of the scope of the invention is thereby intended.
The term dielectric is used herein to mean non-metallic.
The terms polarizer and polarizing beam splitter are used interchangeably herein. Specifically, the terms wire-grid polarizer (WGP) and wire-grid polarizing beam splitter (WGP PBS) are used interchangeably herein.
The term continuous is used here to denote continuous in at least two dimensions, such as continuous in a plane or continuous across a planar surface in both directions.
Description
Polarizer devices in exemplary implementations of the invention are shown which can be used to polarize and further control light, and which can be used with image or display systems. Such polarizer devices can polarize and further control light, such as by reducing zero order reflections, or back reflection. Such polarizer devices can be a combination of a wire grid polarizer and a diffraction grating, configured to reduce zero order back reflections of s-polarized light. It will be appreciated that other configurations are possible depending on the intended application. Image or display systems in exemplary implementations of the invention are shown using the polarizer devices. Such display systems can utilize such polarizer devices to reduce ghost images, conserve space in the optical design by being oriented orthogonal to the incident light, and thus reduce unwanted astigmatism. It will be appreciated that other applications are possible, including for example fiber optics.
Referring to
The diffraction grating 18 can include an array of elongated parallel dielectric ribs 26 with a period in accordance with PDG>λ/2, where PDG is the period of the ribs (and λ is the wavelength of the visible light beam). In one aspect, the period PDG can be greater than 0.21 microns and less than 1 micron or micrometer. (As described below, the period of the diffraction grating can be approximately five times greater than the period of the wire grid polarizer.) Thus, the diffraction grating diffracts reflected or transmitted light, and specifically substantially diffracts light with the s-polarization orientation of non-zero order at a non-orthogonal angle (θ≠0) or angle greater than zero (θ>0). Furthermore, each rib 26 can be split into at least a pair of ribs, as shown in
The wire grid polarizer 22 includes an array of elongated, parallel conductive wires 30 with a period in accordance with PWGP<λ/2 where PWGP is the period of the wires (and λ is the wavelength of the visible light beam). In one aspect, the period can be less than about 0.21 microns to polarize the incident light. The wire grid polarizer 22 substantially reflects the incident light with s-polarization orientation, and substantially transmits the incident light with p-polarization orientation. Thus, the wire grid polarizer 22 acts like a plane mirror to s-polarized light. Various aspects of wire grid polarizers are described in U.S. Pat. Nos. 6,208,463; 6,288,840; 6,243,199; 6,122,10; 6,785,050; 6,532,111; 6,714,350; 6,844,971; 6,665,119; and 6,788,461; which are herein incorporated by reference.
The array of conductive wires 30 of the wire grid 22 and the array of dielectric ribs 26 of the diffraction grating 18 can be substantially parallel with one another, as shown. In other words, the wires 30 can be parallel with the ribs 26. As stated above, the period PDG of the diffraction grating 18 can be greater than the period PWGP of the wire grid polarizer 22. It is believed that a diffraction grating period PDG approximately five times greater (PDG≈5 PWGP) than the wire grid polarizer period PWGP will provide adequate diffraction of the light with s-polarization orientation or adequate reduction of light with the s-polarization orientation of zero-order. The arrays of both the wires and the ribs can be aligned so that the period of one begins at the period of another, as shown. Alternatively, the arrays can be staggered so that the starting period of one does not correspond to the other.
The optical stack 14 can also include one or more continuous layers disposed between the wire grid polarizer and the diffraction grating. The layers can include at least two layers having different refractive indices. A lower layer 34 can be disposed over the wire grid polarizer 22, and an upper layer 38 can be disposed over the lower layer. The upper layer 34 can have a refractive index nupper greater than a refractive index nlower of the lower layer 38 (nupper>nlower). The lower layer or a single layer can have a refractive index less than a refractive index ns of a substrate.
The wire grid polarizer 22 can include, or the wires 30 and optical stack 14 can be supported by, a substrate 42. The wires 30 can be formed or deposited on the substrate, such as by using a lithography process. The other layers can be formed or deposited over the wires. Similarly, the ribs 26 can be formed using a lithography process.
Referring to
Referring to
Referring to
Table 1 shows the calculated performance of the polarization device 10e with respect to just a wire grid polarizer (without a diffraction grating).
Referring to Table 1, it can be seen that reflectance of the zero order s polarization is suppressed by the polarization device 10e, namely suppressed from 86% to 0.13%. In addition, zero order p polarization transmission is significantly unaffected.
Referring to
Referring to
Referring to
Referring to
Referring to
Referring to
Referring to
As stated above, such a polarizer device described above can be utilized in an image or projection display system.
Referring to
A polarizer device (represented by 10b in
In addition, a polarizer device (represented by 10b in
Referring to
As described above, the reflective spatial light modulator 112 can be configured to selectively encode image information on a polarized incident light beam to encode image information on a reflected beam. The beam splitter 102 can be disposed adjacent the reflective spatial light modulator to provide the polarized incident light beam to the reflective spatial light modulator, and to separate the image information from the reflected beam. The polarizer device 10b can be disposed before and/or after the beam splitter 102.
Although a three channel, or three color, projection system has been described above, it will be appreciated that a display system 150, 150b, 160, 164 or 164b can have a single channel, as shown in
Although a projection system and modulation optical system were shown in
Referring to
Various display systems are shown in U.S. Pat. Nos. 6,234,634; 6,447,120; 6,666,556; 6,585,378; 6,909,473; 6,900,866; 6,982,733; 6,954,245; 6,897,926; 6,805,445; 6,769,779 and U.S. patent application Ser. Nos. 10/812,790; 11/048,675; 11/198,916; 10/902,319, which are herein incorporated by reference.
Although the polarizer device has been described above with respect to visible light applications, and more specifically with respect to projection display devices, the polarizer device can be configured for operation with other wavelengths, such as infrared light (>˜700 nm), and other applications, such as telecommunications, including combiners and/or separators. Thus, a polarizer device 204 or 254 for use with infrared light can have a similar structure, but different periods or pitches, than those described above. For example, the wires of the wire grid polarizer can have a pitch or period less than the wavelength being treated. For infrared applications (λ≈1300-1500 nm), such as telecommunication systems, the wires can have a pitch or period less than 1 micron (1 μm or 1000 nm) in one aspect, or less than 0.4 microns (0.40 μm or 400 nm) in another aspect. The ribs of the dielectric grid can have a period or pitch approximately five times greater, or approximately 5 microns (5 μm or 5000 nm) in one aspect, or 2 microns (2.0 μm or 2000 nm) in another aspect.
Referring to
Referring to
Referring to
It will be appreciated that a polarizer device as described above and shown in the Figures can be used in other applications, including for example, flat panel displays, optical data storage devices, light recyclers, etc.
While the forgoing examples are illustrative of the principles of the present invention in one or more particular applications, it will be apparent to those of ordinary skill in the art that numerous modifications in form, usage and details of implementation can be made without the exercise of inventive faculty, and without departing from the principles and concepts of the invention. Accordingly, it is not intended that the invention be limited, except as by the claims set forth below.
This is a continuation-in-part of U.S. patent application Ser. No. 11/005,927 filed Dec. 6, 2004, now U.S. Pat. No. 7,570,424, which is herein incorporated by reference.
Number | Name | Date | Kind |
---|---|---|---|
2224214 | Brown | Dec 1940 | A |
2237567 | Land | Apr 1941 | A |
2287598 | Brown | Jun 1942 | A |
2391451 | Fischer | Dec 1945 | A |
2403731 | MacNeille | Jul 1946 | A |
2605352 | Fishcer | Jul 1952 | A |
2748659 | Geffcken et al. | Jun 1956 | A |
2813146 | Glenn | Nov 1957 | A |
2815452 | Mertz | Dec 1957 | A |
2887566 | Marks | May 1959 | A |
3046839 | Bird et al. | Jul 1962 | A |
3084590 | Glenn, Jr. | Apr 1963 | A |
3202039 | Lang et al. | Aug 1965 | A |
3235630 | Doherty et al. | Feb 1966 | A |
3291550 | Bird et al. | Dec 1966 | A |
3291871 | Francis | Dec 1966 | A |
3293331 | Doherty | Dec 1966 | A |
3436143 | Garrett | Apr 1969 | A |
3479168 | Bird et al. | Nov 1969 | A |
3536373 | Bird et al. | Oct 1970 | A |
3566099 | Makas | Feb 1971 | A |
3627431 | Komarniski | Dec 1971 | A |
3631288 | Rogers | Dec 1971 | A |
3731986 | Fergason | May 1973 | A |
3857627 | Harsch | Dec 1974 | A |
3857628 | Strong | Dec 1974 | A |
3876285 | Schwarzmüller | Apr 1975 | A |
3877789 | Marie | Apr 1975 | A |
3912369 | Kashnow | Oct 1975 | A |
3969545 | Slocum | Jul 1976 | A |
4009933 | Firester | Mar 1977 | A |
4025164 | Doriguzzi et al. | May 1977 | A |
4025688 | Nagy et al. | May 1977 | A |
4049944 | Garvin et al. | Sep 1977 | A |
4068260 | Ohneda et al. | Jan 1978 | A |
4073571 | Grinberg et al. | Feb 1978 | A |
4104598 | Abrams | Aug 1978 | A |
4181756 | Fergason | Jan 1980 | A |
4220705 | Sugibuchi et al. | Sep 1980 | A |
4221464 | Pedinoff et al. | Sep 1980 | A |
4268127 | Oshima et al. | May 1981 | A |
4289381 | Garvin et al. | Sep 1981 | A |
4294119 | Soldner | Oct 1981 | A |
4308079 | Venables et al. | Dec 1981 | A |
4441791 | Hornbeck | Apr 1984 | A |
4456515 | Krueger et al. | Jun 1984 | A |
4466704 | Schuler et al. | Aug 1984 | A |
4492432 | Kaufmann et al. | Jan 1985 | A |
4512638 | Sriram et al. | Apr 1985 | A |
4514479 | Ferrante | Apr 1985 | A |
4515441 | Wentz | May 1985 | A |
4515443 | Bly | May 1985 | A |
4532619 | Sugiyama et al. | Jul 1985 | A |
4560599 | Regan | Dec 1985 | A |
4679910 | Efron et al. | Jul 1987 | A |
4688897 | Grinberg et al. | Aug 1987 | A |
4701028 | Clerc et al. | Oct 1987 | A |
4711530 | Nakanowatari et al. | Dec 1987 | A |
4712881 | Shurtz et al. | Dec 1987 | A |
4724436 | Johansen et al. | Feb 1988 | A |
4743092 | Pistor | May 1988 | A |
4743093 | Oinen | May 1988 | A |
4759611 | Downey, Jr. | Jul 1988 | A |
4759612 | Nakatsuka et al. | Jul 1988 | A |
4795233 | Chang | Jan 1989 | A |
4799776 | Yamazaki et al. | Jan 1989 | A |
4818076 | Heppke et al. | Apr 1989 | A |
4840757 | Blenkhorn | Jun 1989 | A |
4865670 | Marks | Sep 1989 | A |
4895769 | Land et al. | Jan 1990 | A |
4904060 | Grupp | Feb 1990 | A |
4913529 | Goldenberg et al. | Apr 1990 | A |
4915463 | Barbee, Jr. | Apr 1990 | A |
4939526 | Tsuda | Jul 1990 | A |
4946231 | Pistor | Aug 1990 | A |
4966438 | Mouchart et al. | Oct 1990 | A |
4991937 | Urino | Feb 1991 | A |
5029988 | Urino | Jul 1991 | A |
5039185 | Uchida et al. | Aug 1991 | A |
5061050 | Ogura | Oct 1991 | A |
5087985 | Kitaura et al. | Feb 1992 | A |
5092774 | Milan | Mar 1992 | A |
5113285 | Franklin et al. | May 1992 | A |
5122887 | Mathewson | Jun 1992 | A |
5122907 | Slocum | Jun 1992 | A |
5139340 | Okumura | Aug 1992 | A |
5157526 | Kondo et al. | Oct 1992 | A |
5177635 | Keilmann | Jan 1993 | A |
5196926 | Lee | Mar 1993 | A |
5196953 | Yeh et al. | Mar 1993 | A |
5204765 | Mitsui et al. | Apr 1993 | A |
5206674 | Puech et al. | Apr 1993 | A |
5216539 | Boher et al. | Jun 1993 | A |
5222907 | Katabuchi et al. | Jun 1993 | A |
5225920 | Kasazumi et al. | Jul 1993 | A |
5235443 | Barnik et al. | Aug 1993 | A |
5235449 | Imazeki et al. | Aug 1993 | A |
5239322 | Takanashi et al. | Aug 1993 | A |
5245471 | Iwatsuka et al. | Sep 1993 | A |
5279689 | Shvartsman | Jan 1994 | A |
5295009 | Barnik et al. | Mar 1994 | A |
5298199 | Hirose et al. | Mar 1994 | A |
5305143 | Taga et al. | Apr 1994 | A |
5325218 | Willett et al. | Jun 1994 | A |
5333072 | Willett | Jul 1994 | A |
5349192 | Mackay | Sep 1994 | A |
5357370 | Miyatake et al. | Oct 1994 | A |
5383053 | Hegg et al. | Jan 1995 | A |
5387953 | Minoura et al. | Feb 1995 | A |
5391091 | Nations | Feb 1995 | A |
5422756 | Weber | Jun 1995 | A |
5436761 | Kamon | Jul 1995 | A |
5455589 | Huguenin et al. | Oct 1995 | A |
5466319 | Zager et al. | Nov 1995 | A |
5477359 | Okazaki | Dec 1995 | A |
5485499 | Pew et al. | Jan 1996 | A |
5486935 | Kalmanash | Jan 1996 | A |
5486949 | Schrenk et al. | Jan 1996 | A |
5490003 | Van Sprang | Feb 1996 | A |
5499126 | Abileah et al. | Mar 1996 | A |
5504603 | Winker et al. | Apr 1996 | A |
5506704 | Broer et al. | Apr 1996 | A |
5508830 | Imoto et al. | Apr 1996 | A |
5510215 | Prince et al. | Apr 1996 | A |
5513023 | Fritz et al. | Apr 1996 | A |
5513035 | Miyatake et al. | Apr 1996 | A |
5517356 | Araujo et al. | May 1996 | A |
5535047 | Hornbeck | Jul 1996 | A |
5548427 | May | Aug 1996 | A |
5555186 | Sjopua | Sep 1996 | A |
5557343 | Yamagishi | Sep 1996 | A |
5559634 | Weber | Sep 1996 | A |
5570213 | Ruiz et al. | Oct 1996 | A |
5570215 | Omae et al. | Oct 1996 | A |
5574580 | Ansley | Nov 1996 | A |
5576854 | Schmidt et al. | Nov 1996 | A |
5579138 | Sannohe et al. | Nov 1996 | A |
5594561 | Blanchard | Jan 1997 | A |
5600383 | Hornbeck | Feb 1997 | A |
5609939 | Petersen et al. | Mar 1997 | A |
5612820 | Schrenk et al. | Mar 1997 | A |
5619352 | Koch et al. | Apr 1997 | A |
5619356 | Kozo et al. | Apr 1997 | A |
5620755 | Smith, Jr. et al. | Apr 1997 | A |
5626408 | Heynderickx et al. | May 1997 | A |
5638197 | Gunning, III et al. | Jun 1997 | A |
5652667 | Kurogane | Jul 1997 | A |
5658060 | Dove | Aug 1997 | A |
5686979 | Weber et al. | Nov 1997 | A |
5706063 | Hong | Jan 1998 | A |
5719695 | Heimbuch | Feb 1998 | A |
5731246 | Bakeman et al. | Mar 1998 | A |
5748368 | Tamada et al. | May 1998 | A |
5748369 | Yokota | May 1998 | A |
5751388 | Larson | May 1998 | A |
5751466 | Dowling et al. | May 1998 | A |
5767827 | Kobayashi et al. | Jun 1998 | A |
5798819 | Hattori et al. | Aug 1998 | A |
5808795 | Shimomura et al. | Sep 1998 | A |
5826959 | Atsuchi | Oct 1998 | A |
5826960 | Gotoh et al. | Oct 1998 | A |
5828489 | Johnson et al. | Oct 1998 | A |
5833360 | Knox et al. | Nov 1998 | A |
5838403 | Jannson et al. | Nov 1998 | A |
5841494 | Hall | Nov 1998 | A |
5844722 | Stephens et al. | Dec 1998 | A |
5886754 | Kuo | Mar 1999 | A |
5890095 | Barbour et al. | Mar 1999 | A |
5898521 | Okada | Apr 1999 | A |
5899551 | Neijzen et al. | May 1999 | A |
5900976 | Handschy et al. | May 1999 | A |
5907427 | Scalora et al. | May 1999 | A |
5912762 | Li et al. | Jun 1999 | A |
5914818 | Tejada et al. | Jun 1999 | A |
5917562 | Woodgate et al. | Jun 1999 | A |
5918961 | Ueda | Jul 1999 | A |
5930050 | Dewald | Jul 1999 | A |
5943171 | Budd et al. | Aug 1999 | A |
5958345 | Turner et al. | Sep 1999 | A |
5965247 | Jonza et al. | Oct 1999 | A |
5969861 | Ueda et al. | Oct 1999 | A |
5973833 | Booth et al. | Oct 1999 | A |
5978056 | Shintani et al. | Nov 1999 | A |
5982541 | Li et al. | Nov 1999 | A |
5986730 | Hansen et al. | Nov 1999 | A |
5991075 | Katsuragawa et al. | Nov 1999 | A |
5991077 | Carlson et al. | Nov 1999 | A |
6005918 | Harris et al. | Dec 1999 | A |
6008951 | Anderson | Dec 1999 | A |
6010121 | Lee | Jan 2000 | A |
6016173 | Crandall | Jan 2000 | A |
6018841 | Kelsay et al. | Feb 2000 | A |
6053616 | Fujimorie et al. | Apr 2000 | A |
6055103 | Woodgate et al. | Apr 2000 | A |
6056407 | Iinuma et al. | May 2000 | A |
6062694 | Oikawa et al. | May 2000 | A |
6075235 | Chun | Jun 2000 | A |
6081312 | Aminaka et al. | Jun 2000 | A |
6081376 | Hansen et al. | Jun 2000 | A |
6082861 | Dove et al. | Jul 2000 | A |
6089717 | Iwai | Jul 2000 | A |
6096155 | Harden et al. | Aug 2000 | A |
6096375 | Ouderkirk et al. | Aug 2000 | A |
6108131 | Hansen et al. | Aug 2000 | A |
6122103 | Perkins et al. | Sep 2000 | A |
6141075 | Ohmuro et al. | Oct 2000 | A |
6147728 | Okumura et al. | Nov 2000 | A |
6172813 | Tadic-Galeb et al. | Jan 2001 | B1 |
6172816 | Tadic-Galeb et al. | Jan 2001 | B1 |
6181386 | Knox | Jan 2001 | B1 |
6208463 | Hansen et al. | Mar 2001 | B1 |
6215547 | Ramanugan et al. | Apr 2001 | B1 |
6234634 | Hansen et al. | May 2001 | B1 |
6243199 | Hansen et al. | Jun 2001 | B1 |
6247816 | Cipolla et al. | Jun 2001 | B1 |
6249378 | Shimamura et al. | Jun 2001 | B1 |
6250762 | Kuijper | Jun 2001 | B1 |
6251297 | Komuro et al. | Jun 2001 | B1 |
6282025 | Huang et al. | Aug 2001 | B1 |
6288840 | Perkins et al. | Sep 2001 | B1 |
6310345 | Pittman et al. | Oct 2001 | B1 |
6339454 | Knox | Jan 2002 | B1 |
6340230 | Bryars et al. | Jan 2002 | B1 |
6345895 | Maki et al. | Feb 2002 | B1 |
6348995 | Hansen et al. | Feb 2002 | B1 |
6375330 | Mihalakis | Apr 2002 | B1 |
6398364 | Bryars | Jun 2002 | B1 |
6406151 | Fujimori | Jun 2002 | B1 |
6409525 | Hoelscher et al. | Jun 2002 | B1 |
6424436 | Yamanaka | Jul 2002 | B1 |
6426837 | Clark et al. | Jul 2002 | B1 |
6447120 | Hansen et al. | Sep 2002 | B1 |
6452724 | Hansen et al. | Sep 2002 | B1 |
6460998 | Watanabe | Oct 2002 | B1 |
6486997 | Bruzzone et al. | Nov 2002 | B1 |
6496239 | Seiberle | Dec 2002 | B2 |
6496287 | Seiberle et al. | Dec 2002 | B1 |
6511183 | Shimizu et al. | Jan 2003 | B2 |
6520645 | Yamamoto et al. | Feb 2003 | B2 |
6532111 | Kurtz et al. | Mar 2003 | B2 |
6547396 | Svardal et al. | Apr 2003 | B1 |
6580471 | Knox | Jun 2003 | B2 |
6583930 | Schrenk et al. | Jun 2003 | B1 |
6585378 | Kurtz et al. | Jul 2003 | B2 |
0156325 | Hoshl | Aug 2003 | A1 |
6624936 | Kotchick et al. | Sep 2003 | B2 |
6643077 | Magarill et al. | Nov 2003 | B2 |
6661475 | Stahl et al. | Dec 2003 | B1 |
6661484 | Iwai et al. | Dec 2003 | B1 |
6665119 | Kurtz et al. | Dec 2003 | B1 |
6666556 | Hansen et al. | Dec 2003 | B2 |
6669343 | Shahzad et al. | Dec 2003 | B2 |
6698891 | Kato | Mar 2004 | B2 |
6704469 | Xie et al. | Mar 2004 | B1 |
6710921 | Hansen et al. | Mar 2004 | B2 |
6714350 | Silverstein et al. | Mar 2004 | B2 |
6721096 | Bruzzone et al. | Apr 2004 | B2 |
6764181 | Magarill et al. | Jul 2004 | B2 |
6769779 | Ehrne et al. | Aug 2004 | B1 |
6781640 | Hunag | Aug 2004 | B1 |
6785050 | Lines et al. | Aug 2004 | B2 |
6788461 | Kurtz et al. | Sep 2004 | B2 |
6805445 | Silverstein et al. | Oct 2004 | B2 |
6809864 | Martynov et al. | Oct 2004 | B2 |
6811274 | Olczak | Nov 2004 | B2 |
6813077 | Borrelli et al. | Nov 2004 | B2 |
6816290 | Mukawa | Nov 2004 | B2 |
6821135 | Martin | Nov 2004 | B1 |
6823093 | Chang et al. | Nov 2004 | B2 |
6829090 | Katsumata et al. | Dec 2004 | B2 |
6844971 | Silverstein et al. | Jan 2005 | B2 |
6846089 | Stevenson et al. | Jan 2005 | B2 |
6859303 | Wang et al. | Feb 2005 | B2 |
6876784 | Nikolov et al. | Apr 2005 | B2 |
6896371 | Shimizu et al. | May 2005 | B2 |
6897926 | Mi et al. | May 2005 | B2 |
6899440 | Bierhuizen | May 2005 | B2 |
6900866 | Kurtz et al. | May 2005 | B2 |
6909473 | Mi et al. | Jun 2005 | B2 |
6920272 | Wang | Jul 2005 | B2 |
6922287 | Wiki et al. | Jul 2005 | B2 |
6926410 | Weber et al. | Aug 2005 | B2 |
6927915 | Nakai | Aug 2005 | B2 |
6934082 | Allen et al. | Aug 2005 | B2 |
0195485 | Hirai et al. | Sep 2005 | A1 |
6954245 | Mi et al. | Oct 2005 | B2 |
6972906 | Hasman et al. | Dec 2005 | B2 |
6976759 | Magarill et al. | Dec 2005 | B2 |
6981771 | Arai et al. | Jan 2006 | B1 |
7013064 | Wang | Mar 2006 | B2 |
7023512 | Kurtz et al. | Apr 2006 | B2 |
7023602 | Aastuen et al. | Apr 2006 | B2 |
7025464 | Beeson et al. | Apr 2006 | B2 |
7046422 | Kimura et al. | May 2006 | B2 |
7046441 | Huang et al. | May 2006 | B2 |
7046442 | Suganuma | May 2006 | B2 |
7050233 | Nikolov et al. | May 2006 | B2 |
0127829 | Deng et al. | Jun 2006 | A1 |
7075722 | Nakai | Jul 2006 | B2 |
7113335 | Sales | Sep 2006 | B2 |
7131737 | Silverstein et al. | Nov 2006 | B2 |
7142363 | Sato et al. | Nov 2006 | B2 |
7155073 | Momoki et al. | Dec 2006 | B2 |
7158302 | Chiu et al. | Jan 2007 | B2 |
7159987 | Sakata | Jan 2007 | B2 |
7177259 | Nishi et al. | Feb 2007 | B2 |
7185984 | Akiyama | Mar 2007 | B2 |
7213920 | Matsui et al. | May 2007 | B2 |
7221420 | Silverstein et al. | May 2007 | B2 |
7221501 | Flagello et al. | May 2007 | B2 |
7230766 | Rogers | Jun 2007 | B2 |
7234816 | Bruzzone et al. | Jun 2007 | B2 |
7236655 | Momoki et al. | Jun 2007 | B2 |
7255444 | Nakashima et al. | Aug 2007 | B2 |
7256938 | Barton et al. | Aug 2007 | B2 |
7630133 | Perkins | Dec 2009 | B2 |
20010006421 | Parriaux | Jul 2001 | A1 |
20010022687 | Takahashi et al. | Sep 2001 | A1 |
20020001128 | Moseley et al. | Jan 2002 | A1 |
20020040892 | Koyama et al. | Apr 2002 | A1 |
20020122235 | Kurtz et al. | Sep 2002 | A1 |
20020167727 | Hansen et al. | Nov 2002 | A1 |
20020176166 | Schuster | Nov 2002 | A1 |
20020181824 | Huang et al. | Dec 2002 | A1 |
20020191286 | Gale et al. | Dec 2002 | A1 |
20030058408 | Magarill et al. | Mar 2003 | A1 |
20030072079 | Silverstein et al. | Apr 2003 | A1 |
20030081178 | Shimizu et al. | May 2003 | A1 |
20030081179 | Pentico et al. | May 2003 | A1 |
20030117708 | Kane | Jun 2003 | A1 |
20030161029 | Kurtz et al. | Aug 2003 | A1 |
20030180024 | Edlinger | Sep 2003 | A1 |
20030193652 | Pentico et al. | Oct 2003 | A1 |
20030202157 | Pentico et al. | Oct 2003 | A1 |
20030218722 | Tsao et al. | Nov 2003 | A1 |
20030223118 | Sakamoto | Dec 2003 | A1 |
20030223670 | Nikolov et al. | Dec 2003 | A1 |
20040008416 | Okuno | Jan 2004 | A1 |
20040042101 | Wang et al. | Mar 2004 | A1 |
20040047039 | Wang et al. | Mar 2004 | A1 |
20040047388 | Wang et al. | Mar 2004 | A1 |
20040051928 | Mi | Mar 2004 | A1 |
20040070829 | Kurtz et al. | Apr 2004 | A1 |
20040071425 | Wang | Apr 2004 | A1 |
20040095637 | Nikolov et al. | May 2004 | A1 |
20040120041 | Silverstein et al. | Jun 2004 | A1 |
20040125449 | Sales | Jul 2004 | A1 |
20040165126 | Ooi et al. | Aug 2004 | A1 |
20040174596 | Umeki | Sep 2004 | A1 |
20040201889 | Wang et al. | Oct 2004 | A1 |
20040201890 | Crosby | Oct 2004 | A1 |
20040218270 | Wang | Nov 2004 | A1 |
20040227994 | Ma et al. | Nov 2004 | A1 |
20040233362 | Kashima | Nov 2004 | A1 |
20040240777 | Woodgate et al. | Dec 2004 | A1 |
20040258355 | Wang et al. | Dec 2004 | A1 |
20050045799 | Deng et al. | Mar 2005 | A1 |
20050046941 | Satoh et al. | Mar 2005 | A1 |
20050078374 | Tairo et al. | Apr 2005 | A1 |
20050084613 | Wang et al. | Apr 2005 | A1 |
20050088739 | Chiu et al. | Apr 2005 | A1 |
20050122587 | Ouderkirk et al. | Jun 2005 | A1 |
20050128567 | Wang et al. | Jun 2005 | A1 |
20050128587 | Suganuma | Jun 2005 | A1 |
20050152033 | Kang et al. | Jul 2005 | A1 |
20050179995 | Nikolov et al. | Aug 2005 | A1 |
20050180014 | Nikolov et al. | Aug 2005 | A1 |
20050181128 | Nikolov et al. | Aug 2005 | A1 |
20050190445 | Fukuzaki | Sep 2005 | A1 |
20050201656 | Nikolov et al. | Sep 2005 | A1 |
20050213043 | Nakashima et al. | Sep 2005 | A1 |
20050259324 | Flagello et al. | Nov 2005 | A1 |
20050271091 | Wang | Dec 2005 | A1 |
20050275944 | Wang et al. | Dec 2005 | A1 |
20050277063 | Wang et al. | Dec 2005 | A1 |
20060001969 | Wang et al. | Jan 2006 | A1 |
20060061862 | Mi et al. | Mar 2006 | A1 |
20060072074 | Matsui et al. | Apr 2006 | A1 |
20060072194 | Lee | Apr 2006 | A1 |
20060092513 | Momoki | May 2006 | A1 |
20060113279 | Little | Jun 2006 | A1 |
20060118514 | Little et al. | Jun 2006 | A1 |
20060119937 | Perkins | Jun 2006 | A1 |
20060187416 | Ouchi et al. | Aug 2006 | A1 |
20060215263 | Mi et al. | Sep 2006 | A1 |
20060238715 | Hirata et al. | Oct 2006 | A1 |
20060268207 | Tan et al. | Nov 2006 | A1 |
20070146644 | Mi et al. | Jun 2007 | A1 |
20070183035 | Asakawa et al. | Aug 2007 | A1 |
20070195676 | Hendriks et al. | Aug 2007 | A1 |
20070217008 | Wang et al. | Sep 2007 | A1 |
20070223349 | Shimada et al. | Sep 2007 | A1 |
20070242187 | Yamaki et al. | Oct 2007 | A1 |
20070242228 | Chen et al. | Oct 2007 | A1 |
20070242352 | MacMaster | Oct 2007 | A1 |
20090040607 | Amako et al. | Feb 2009 | A1 |
20090109377 | Sawaki et al. | Apr 2009 | A1 |
Number | Date | Country |
---|---|---|
03815026.3 | Aug 2005 | CN |
1692291 | Nov 2005 | CN |
03814105.1 | Nov 2005 | CN |
3707984 | Sep 1988 | DE |
103 27 963 | Jan 2005 | DE |
0317910 | May 1989 | EP |
0336334 | Oct 1989 | EP |
0349309 | Jan 1990 | EP |
0357946 | Mar 1990 | EP |
0407830 | Jan 1991 | EP |
0416157 | Mar 1991 | EP |
0488544 | Jun 1992 | EP |
0507445 | Oct 1992 | EP |
0518111 | Dec 1992 | EP |
0543061 | May 1993 | EP |
566 004 | Oct 1993 | EP |
0588937 | Mar 1994 | EP |
0606940 | Jul 1994 | EP |
0349144 | Sep 1994 | EP |
0634674 | Jan 1995 | EP |
0670506 | Sep 1995 | EP |
0521591 | Oct 1995 | EP |
0731456 | Sep 1996 | EP |
0744634 | Nov 1996 | EP |
56156815 | Dec 1981 | JP |
02-308106 | Dec 1990 | JP |
3005706 | Jan 1991 | JP |
04 366916 | Jun 1991 | JP |
4-12241 | Jan 1992 | JP |
5134115 | May 1993 | JP |
5288910 | Nov 1993 | JP |
7005316 | Jan 1995 | JP |
7-146469 | Jun 1995 | JP |
9090122 | Apr 1997 | JP |
9178943 | Jul 1997 | JP |
09-507926 | Aug 1997 | JP |
9288211 | Nov 1997 | JP |
10-003078 | Jan 1998 | JP |
10073722 | Mar 1998 | JP |
10084502 | Mar 1998 | JP |
10-153706 | Jun 1998 | JP |
10-260403 | Sep 1998 | JP |
10-268301 | Oct 1998 | JP |
1- 164819 | Mar 1999 | JP |
11142650 | May 1999 | JP |
11237507 | Aug 1999 | JP |
11-258603 | Sep 1999 | JP |
11-306581 | Nov 1999 | JP |
2000-147487 | May 2000 | JP |
2001074935 | Mar 2001 | JP |
2004157159 | Jun 2004 | JP |
2004309903 | Nov 2004 | JP |
2005195824 | Jul 2005 | JP |
2005534981 | Nov 2005 | JP |
2006047813 | Feb 2006 | JP |
10-2003-0079268 | Oct 2003 | KR |
10-2003-0090021 | Nov 2003 | KR |
10-2004-0046137 | Jun 2004 | KR |
WO9615474 | May 1996 | WO |
WO 9701788 | Jan 1997 | WO |
WO0070386 | Nov 2000 | WO |
WO0189677 | Apr 2001 | WO |
WO03054619 | Jul 2003 | WO |
WO03102652 | Dec 2003 | WO |
WO03107046 | Dec 2003 | WO |
WO2004013684 | Feb 2004 | WO |
WO2004019070 | Mar 2004 | WO |
WO2004072692 | Aug 2004 | WO |
WO2005019503 | Mar 2005 | WO |
WO2005065182 | Jul 2005 | WO |
WO2005079233 | Sep 2005 | WO |
WO2005101112 | Oct 2005 | WO |
WO2005123277 | Dec 2005 | WO |
WO2006014408 | Feb 2006 | WO |
WO2006036546 | Apr 2006 | WO |
Number | Date | Country | |
---|---|---|---|
20080266662 A1 | Oct 2008 | US |
Number | Date | Country | |
---|---|---|---|
Parent | 11005927 | Dec 2004 | US |
Child | 11640112 | US |