Polarization direction of optical devices using selected spatial configurations

Information

  • Patent Grant
  • 9105806
  • Patent Number
    9,105,806
  • Date Filed
    Thursday, July 19, 2012
    11 years ago
  • Date Issued
    Tuesday, August 11, 2015
    8 years ago
Abstract
A GaN based light emitting diode device which emits polarized light or light of various degrees of polarization for use in the creation of optical devices. The die are cut to different shapes, or contain some indicia that are used to represent the configuration of the weak dipole plane and the strong dipole plane. This allows for the more efficient manufacturing of such light emitting diode based optical devices.
Description
BACKGROUND OF THE INVENTION

The present invention relates generally to lighting techniques. More specifically, embodiments of the invention include techniques for the more efficient fabrication and handling of optical devices on semipolar or nonpolar crystalline semiconductor materials. Merely by way of example, the invention can be applied to applications such as white lighting, multi-colored lighting, general illumination, decorative lighting, automotive and aircraft lamps, street lights, lighting for plant growth, indicator lights, lighting for flat panel displays, other optoelectronic devices, and the like.


In the late 1800's, Thomas Edison invented the light bulb. The conventional light bulb, commonly called the “Edison bulb,” has been used for over one hundred years. The conventional light bulb uses a tungsten filament enclosed in a glass bulb sealed in a base, which is screwed into a socket. The socket is coupled to an AC power or DC power source. The conventional light bulb can be found commonly in houses, buildings, and outdoor lightings, and other areas requiring light. Unfortunately, drawbacks exist with the conventional Edison light bulb. That is, the conventional light bulb dissipates much thermal energy. More than 90% of the energy used for the conventional light bulb dissipates as thermal energy. Additionally, the conventional light bulb routinely fails often due to thermal expansion and contraction of the filament element.


To overcome some of the drawbacks of the conventional light bulb, fluorescent lighting has been developed. Fluorescent lighting uses an optically clear tube structure filled with a halogen gas and, which typically also contains mercury. A pair of electrodes is coupled between the halogen gas and couples to an alternating power source through a ballast. Once the gas has been excited, it discharges to emit light. Typically, the optically clear tube is coated with phosphors, which are excited by the light. Many building structures use fluorescent lighting and, more recently, fluorescent lighting has been fitted onto a base structure, which couples into a standard socket.


Solid state lighting techniques have also been used. Solid state lighting relies upon semiconductor materials to produce light emitting diodes, commonly called LEDs. At first, red LEDs were demonstrated and introduced into commerce. Red LEDs use Aluminum Indium Gallium Phosphide or AlInGaP semiconductor materials. Most recently, Shuji Nakamura pioneered the use of InGaN materials to produce LEDs emitting light in the blue and green color range for blue and green LEDs. The blue colored LEDs led to innovations such as solid state white lighting, the blue laser diode, which in turn enabled the BluRay™ DVD player, and other developments. Other colored LEDs have also been proposed.


High intensity UV, blue, and green LEDs based on GaN have been proposed and even demonstrated with some success. Efficiencies have typically been highest in the UV-violet, dropping off as the emission wavelength increases to blue or green. Unfortunately, achieving high intensity, high-efficiency GaN-based green LEDs has been particularly problematic. The performance of optoelectronic devices fabricated on conventional c-plane GaN suffer from strong internal polarization fields, which spatially separate the electron and hole wave functions and lead to poor radiative recombination efficiency. Since this phenomenon becomes more pronounced in InGaN layers with increased indium content for increased wavelength emission, extending the performance of UV or blue GaN-based LEDs to the blue-green or green regime has been difficult. Furthermore, since increased indium content films often require reduced growth temperature, the crystal quality of the InGaN films is degraded. The difficulty of achieving a high intensity green LED has led scientists and engineers to the term “green gap” to describe the unavailability of such green LED. In addition, the light emission efficiency of conventional GaN-based LEDs drops off significantly at higher current densities, as are required for general illumination applications, a phenomenon known as “roll-over.” Other limitations with blue LEDs using c-plane GaN exist. These limitations include poor yields, low efficiencies, and reliability issues. Although highly successful, solid state lighting techniques must be improved for full exploitation of their potential. These and other limitations may be described throughout the present specification and more particularly below.


From the above, it is seen that techniques for improving optical devices is highly desired.


BRIEF SUMMARY OF THE INVENTION

According to the present invention, optical techniques are provided. More specifically, embodiments of the invention include techniques for the more efficient fabrication, handling, and packaging of light emitting diode devices using gallium nitride containing materials. Merely by way of example, the invention can be applied to applications such as optoelectronic devices, and the like. Other applications that desire polarized emission include liquid crystal display (“LCD”) backlighting, liquid crystal on silicon (“LCOS”) lighting, selected applications of home and/or building lighting, medical applications, biological sampling, plant and algae growth, biofuels, microscopes, film and video (e.g., amusement, action, nature, in-door), multi-dimensional display or televisions, micro and/or pico displays, health and wellness, optical and/or data transmission/communication, security and safety, and others.


In a preferred embodiment, the present invention provides a light emitting diode device, commonly called an LED, e.g., single LED device, array of LEDs. The device has a GaN substrate comprising a shape including a width and a length, the width (W) and the length (L) being different in magnitude. The LED device is provided on the GaN substrate and configured to emit partially or fully polarized electromagnetic radiation. The polarized electromagnetic radiation comprises a weak dipole plane and a strong dipole plane, the weak dipole plane being orthogonal to the strong dipole plane, the strong dipole plane being parallel or perpendicular to the width of the GaN substrate.


In an alternative specific embodiment, the present invention provides a method for indicating a dipole configuration of an LED device provided on a GaN substrate. The method determines a dipole configuration of an LED device provided on a gallium nitride containing substrate, which is configured to emit electromagnetic radiation having a weak dipole plane and a strong dipole plane. In a specific embodiment, the method includes forming one or more indicia on the LED device or gallium nitride substrate to correlate either the weak dipole plane or the strong dipole plane to the one or more indicia. The method also includes spatially orienting the LED devices provided on a gallium nitride substrates using at least the one or more indicia on the LED device provided on a gallium nitride substrate.


In still other embodiments, the present invention provides an optical device, e.g., LED array. The device has two or more GaN substrates configured in a package. Each of the GaN substrates is characterized by a shape including a width and a length, the width (W) and the length (L) being different in magnitude. An LED device is provided on each of the GaN substrates. The LED device is configured to emit partially or fully polarized electromagnetic radiation. The polarized electromagnetic radiation comprises a weak dipole plane and a strong dipole plane. In a preferred embodiment, the length and width are characterized by an aspect ratio of 1.1, 1.2, 1.3, 1.4, 1.5 and greater, or can be slightly less in some embodiments.


In one or more embodiments of the present invention, a method is provided for determining the strong and weak dipole planes of an LED die on a bulk semi-polar or non-polar GaN substrate used for an optical device. Specifically the dies are cut with at least one side of the die being different in length or shape than other sides of the die, in order to serve as a marker indicating the strong and weak dipole planes of the bulk GaN substrate material.


In an alternative specific embodiment, the die is cut into a rectangular shape. The die is cut from the wafer in such a manner that either the side of shorter length or the side of longer length indicates the strong and weak dipole planes of the GaN substrate material.


In another specific embodiment of the present invention, one side of the die is cut at an angle such that the side is not perpendicular to opposing parallel sides of the die. Such side thereby serves as indicia representing the strong or weak dipole plane of the GaN substrate material.


In another specific embodiment of the present invention, the die can be cut into any shape that is used to distinguish configuration of the strong and weak dipole planes.


In an alternate embodiment of the present invention a mark or feature is made on either of the larger surface area faces of the die, serving as indicia representing the configuration of the strong and weak dipole planes of the GaN substrate material, upon which the LEDs are built upon.


In another set of embodiments of the present invention, the method of determining the configuration of the strong and weak dipole planes of the die is used when combined with multiple die in an optical device in order to maximize light intensity.


In an alternate embodiment of the present invention, the method of determining the configuration of the strong and weak dipole planes of the die is used when combined with multiple die in an optical device in order to create a device capable of simultaneously emitting light of varying intensity levels.


Benefits are achieved by the present invention over conventional techniques. In one or more embodiments, the present device and method can provide a spatial orientation that is easily detectable for handling and packaging of die having strong and/or weak dipole planes. In other embodiments, the present device and method can be achieved using conventional technologies of scribing, breaking, and/or sawing/singulating. Preferably, the shaped die can be configured along with other die to form an array configuration. The array configuration is characterized by a system efficiency that is often higher than conventional unpolarized LEDs using c-plane GaN substrates in applications, which desire polarized emission. Depending upon the embodiment, one or more of these benefits may be achieved. These and other benefits are further described throughout the present specification and more specifically below.


The present invention achieves these benefits and others in the context of known process technology. However, a further understanding of the nature and advantages of the present invention may be realized by reference to the latter portions of the specification and attached drawings.





BRIEF DESCRIPTION OF THE DRAWINGS


FIG. 1 shows a simplified diagram of a cross sectional view of a sample LED device structure fabricated on a bulk GaN substrate wafer according to an embodiment of the present invention.



FIG. 1A is a simplified diagram illustrating one or more orientations of the strong and weak dipole planes relative to the wafer's major and minor axes by recording the emission intensity from an individual LED device with a polarizing optic placed between the device and a detector for a sufficiently large number of angular orientations of the polarizing optic.



FIG. 2 shows a simplified diagram of a top view of a conventional square die including the configuration of the strong and weak dipole planes.



FIG. 3 shows a simplified diagram of a top view of a rectangular cut die used to indicate the configuration of the strong and weak dipole planes.



FIG. 4 shows a simplified diagram of a top view of a die with one side cut at an angle to indicate the configuration of the strong and weak dipole planes according to an embodiment of the present invention.



FIG. 5 shows a simplified diagram of a top view of a die with a mark used to indicate the configuration of the strong and weak dipole planes according to an embodiment of the present invention.



FIG. 6 shows a simplified diagram of a top view of an optical device created with multiple die wherein the configuration of the strong and weak dipole planes of the die are not aligned in the same direction according to an embodiment of the present invention.



FIG. 7 shows a simplified diagram of a top view of an optical device created with multiple die wherein the configuration of the strong and weak dipole planes of the die are aligned in the same direction according to an embodiment of the present invention.





DETAILED DESCRIPTION OF THE INVENTION

According to the present invention, methods and devices for the more efficient fabrication of optical devices are provided. More specifically, methods and devices for determining the configuration of the strong and weak emission dipole planes of the die made from GaN materials are provided. Merely by way of example, the invention can be applied to applications such as optoelectronic devices, and the like. Other applications that desire polarized emission include liquid crystal display (“LCD”) backlighting, liquid crystal on silicon (“LCOS”) lighting, selected applications of home and/or building lighting, medical applications, biological sampling, plant and algae growth, biofuels, microscopes, film and video (e.g., amusement, action, nature, in-door), multi-dimensional display or televisions, micro and/or pico displays, health and wellness, optical and/or data transmission/communication, security and safety, and others.


While conventional optical devices have been fabricated on the c-plane of GaN substrates, researchers are exploring the properties of optical devices fabricated on m-plane GaN substrates. Specifically c-plane bulk GaN is polar, while m-plane bulk GaN is non-polar along the growth direction. LEDs fabricated on the m-plane of bulk GaN substrates can emit highly polarized light. By utilizing non-polar GaN substrate-based LEDs in applications which require polarized light (such as LCD back-lighting), improved system efficiencies can therefore be achieved. Furthermore, optical devices are also fabricated from GaN substrates wherein the largest area surface is angled from the polar c-plane leading to semi-polar bulk GaN substrates. LEDs fabricated on bulk semi-polar GaN substrates can also emit partially polarized light according to other embodiments. The degree of polarization of the emission can be related to the crystallographic orientation of the largest surface area of the bulk GaN substrate, the composition and constitution of the individual layers that make up the LED structure, the electrical current density at which the polarization ratio is measured, how the measurement occurs, among other factors. Regarding the measurement, complex equipment including selected polarizers, photodetectors, and handling techniques are often required to determine the degree of polarization. The use of non-polar or semi-polar GaN in the fabrication of LEDs allows for the creation of optical devices that produce light of various levels of polarization.


In order to maximize system efficiencies in end-applications for GaN LEDs with partially polarized emission, it is desirable in device manufacturing to know the orientations of the strong and weak emission dipole planes relative to largest surface area (or other surface area) of the LED chips fabricated from both non-polar and semi-polar bulk GaN substrates. As background information, non-polar and semi-polar bulk GaN substrates are available in wafer form, and are subsequently singulated into individual die following epitaxial growth and device wafer-level device fabrication. In wafer form, the orientations of the strong and weak dipole planes relative to the wafer's major and minor axes may be easily determined, by recording the emission intensity from an individual LED device with a polarizing optic placed between the device and a detector, for a sufficiently large number of angular orientations of the polarizing optic, as shown in FIG. 1A—the orientation of the strong emission dipole is then simply represented by the angular orientation of the polarizing optic at which the measured emission intensity is the strongest, with the weak emission dipole orientation being orthogonal to the strong emission dipole orientation. Typically, the LED devices are oriented relative to the substrate surface such that the orthogonal strong and weak dipole orientations are aligned to the edges of the individual LED chips. However, after singulation into individual LED die with typical square or similar geometries with high rotational symmetry, it can be extremely difficult, cumbersome, if not impossible, to keep track of the strong and weak dipole plane orientations for individual LED chips.


In order to maximize multi-LED system efficiency, the proper polarization field direction of individual die must often be easily determined during the packaging and assembly of the optical devices. In one or more embodiments, the strength of the dipole plane is related to a spatial feature of the individual die. In a specific embodiment, the spatial feature corresponding to either the strong or weak dipole of the individual die can be aligned in a desired configuration. In handling or packaging each individual die, it can be oriented along a preferred spatial orientation until the strong or weak dipole plane is aligned in a desired configuration in a specific embodiment. In alternative embodiments, the selected dipole can be aligned with a secondary optic, which can have a polarizing or non-polarizing property. In still other alternative embodiments, the selected dipole can be aligned with an Nth optic, where N is greater than 2 for general application. Of course, there can be other variations, modifications, and alternatives.



FIG. 1 shows a sample LED device fabricated on a bulk GaN substrate wafer. This diagram is merely an example, which should not unduly limit the scope of the claims herein. One of ordinary skill in the art would recognize other variations, modifications, and alternatives. The substrate of the wafer includes a high quality nitride crystal with a release layer, as disclosed in U.S. Patent application 61/091,591, entitled, “Nitride crystal with release layer, method of making, and method of use,” commonly assigned, and which is hereby incorporated by reference in its entirety. The nitride crystal comprises nitrogen and has a surface dislocation density below 105 cm−2. The nitride crystal or wafer may comprise AlxInyGa1-x-yN, where 0≦x, y, x+y≦1. In one specific embodiment, the nitride crystal comprises GaN. In a preferred embodiment, the nitride crystal is substantially free of low-angle grain boundaries, or tilt boundaries, over a length scale of at least 3 millimeters. The nitride crystal has a release layer with an optical absorption coefficient greater than 1000 cm−1 at least one wavelength where the base crystal underlying the release layer is substantially transparent, with an optical absorption coefficient less than 50 cm-1, and may further comprise a high quality epitaxial layer, which also has a surface dislocation density below 105 cm-2. The release layer may be etched under conditions where the nitride base crystal and the high quality epitaxial layer are not.


The substrate may have a large-surface orientation within ten degrees, within five degrees, within two degrees, within one degree, within 0.5 degree, or within 0.2 degree of (0 0 0 1), (0 0 0-1), {1-1 0 0}, {1 1-2 0}, {1-1 0±1}, {1-1 0±2}, {1-1 0±3}, or {1 1-2±2}. The substrate may have a dislocation density below 104 cm−2, below 103 cm−2, or below 102 cm−2. The nitride base crystal or wafer may have an optical absorption coefficient below 100 cm−1, below 50 cm−1 or below 5 cm−1 at wavelengths between about 465 nm and about 700 nm. The nitride base crystal may have an optical absorption coefficient below 100 cm−1, below 50 cm−1 or below 5 cm−1 at wavelengths between about 700 nm and about 3077 nm and at wavelengths between about 3333 nm and about 6667 nm.


In one or more embodiments, the device can be configured with an optional release layer. The release layer comprises heavily cobalt-doped GaN, has a high crystal quality, and is substantially black, with an optical absorption coefficient greater than 1000 cm−1 or greater than 5000 cm−1 across the visible spectrum, including the range between about 465 nm and about 700 nm. The release layer is between about 0.05 micron and about 50 microns thick and has a temperature stability approximately the same as the underlying base crystal and exhibits minimal strain with respect to the underlying base crystal.


An n-type AluInvGa1-u-vN layer, where 0≦u, v, u+v≦1, is deposited on the substrate. The carrier concentration may lie in the range between about 1017 cm−3 and 1020 cm−3. The deposition may be performed using metal organic chemical vapor deposition (MOCVD) or molecular beam epitaxy (MBE).


Following deposition of the n-type AluInvGa1-u-vN layer for a predetermined period of time, so as to achieve a predetermined thickness, an active layer is deposited. The active layer may comprise a single quantum well or a multiple quantum well, with 2-10 quantum wells. The quantum wells may comprise InGaN wells and GaN barrier layers. In other embodiments, the well layers and barrier layers comprise AlwInxGa1-w-xN and AlyInzGa1-y-zN, respectively, where 0≦w, x, y, z, w+x, y+z≦1, where w<u, y and/or x>v, z so that the bandgap of the well layer(s) is less than that of the barrier layer(s) and the n-type layer. The well layers and barrier layers may each have a thickness between about 1 nm and about 20 nm. In another embodiment, the active layer comprises a double heterostructure, with an InGaN or AlwInxGa1-w-xN layer about 20 nm to about 500 nm thick surrounded by GaN or AlyInzGa1-y-zN layers, where w<u, y and/or x>v, z. The composition and structure of the active layer are chosen to provide light emission at a preselected wavelength. The active layer may be left undoped (or unintentionally doped) or may be doped n-type or p-type.


Next, a p-type doped AlqInrGa1-q-rN, where 0≦q, r, q+r≦1, layer is deposited above the active layer. The p-type layer may be doped with Mg, to a level between about 1017 cm−3 and 1021 cm−3, and may have a thickness between about 5 nm and about 500 nm. The outermost 1-30 nm of the p-type layer may be doped more heavily than the rest of the layer, so as to enable an improved electrical contact.


A reflective electrical contact, with a reflectivity greater than about 70%, is then deposited on the p-type semiconductor layer or on the second n-type layer above a tunnel junction, if it is present. In another embodiment, the reflective electrical contact is placed on the n-type side of the device structure. In a preferred embodiment, the reflectivity of the reflective electrical contact is greater than 80% or greater than 90%. The reflective electrical contact may comprise at least one of silver, gold, aluminum, nickel, platinum, rhodium, palladium, chromium, or the like. The reflective electrical contact may be deposited by thermal evaporation, electron beam evaporation, sputtering, or another suitable technique. In a preferred embodiment, the reflective electrical contact serves as the p-type electrode for the textured-surface LED. In another embodiment, the reflective electrical contact serves as an n-type electrode for the textured-surface LED. Further details of the present invention are found throughout the present specification and more particularly below. Of course, there can be other variations, modifications, and alternatives.


To further understand the present method and structures, FIG. 2 shows a top view of a conventional square shaped die with the configuration of the strong and weak dipole planes. After the LED structures of FIG. 1 are created on the bulk GaN substrate wafer, the wafer is then cut into individual die, typically in the shape of a square, which we discovered led to limitations in packaging and orienting the die in a desired manner. While the configuration of the strong and weak dipole planes of the bulk GaN substrate wafer may be known while the substrate is in wafer form, once the wafer has been processed and singulated to form a plurality of individual die including one or more optical devices, such planes are no longer known by visual inspection of the individual square dice. As a result, in order to determine the polarization field direction, a person must often manually tests and reorient in a trial and error basis each die in order to determine the configuration of the strong and weak dipole planes. Accordingly, conventional square shaped die have limitations in handling and lead to inefficiencies in packaging and the like.



FIG. 3 shows a top view of a rectangular die of the present invention with the configuration of the strong and weak dipole planes according to an embodiment of the present invention. Cutting the die from the wafer in a rectangular shape provides a visible configuration that can represent the configuration of such planes. Specifically, since the configuration of the strong and weak dipole planes of the wafer is known, all of the die can be cut in a rectangular shape such that the longer side of the rectangle indicates the configuration of the strong and weak dipole planes. Alternatively, the die can be cut in a rectangular shape such that the shorter side indicates the configuration of such planes. Regardless of which side is used to represent the configuration of the strong and weak dipole planes, upon removal from the wafer, such configuration is known by visual inspection. This allows a user to quickly determine what the dipole plane configuration is and thereby more efficiently create optical devices using the die for purposes of handling and packaging. Of course, there can be other variations, modifications, and alternatives.



FIG. 4 shows a top view of a die of the present invention with one side cut at an angle and the configuration of the strong and weak dipole planes according to an embodiment of the present invention. Similar to the rectangular shape, alternatively, one side of the die can be cut at an angle when cutting the die from wafer, thereby providing a visible configuration that represents the configuration of the strong and weak dipole planes. In this embodiment of the invention, any side can be used to the dipole plane configuration. For example the angled side can be used, or the side opposing the angle side can be used to indicate the dipole planes. Likewise, the shorter of the parallel sides or the longer of the parallel sides can be used to indicate the dipole planes. Of course, there can be other variations, modifications, and alternatives.


In theory any non-square shaped die can be used as an indicator of the configuration of the strong and weak dipole planes of the individual die. All that is required is that each die is cut in the same configuration from the wafer so that the visual indication of the dipole planes remains constant amongst all of the die that are cut from the wafer. The shape of the die that is used to represent the dipole plane configuration is completely dependent on the fabrication process, and what shape is most effective and well suited for the resulting optical devices that are fabricated from such die.



FIG. 5 shows a top view of a die with a mark that is used to indicate the configuration of the strong and weak dipole planes according to an embodiment of the present invention. The mark merely serves as indicia and can be of any shape, size, or design. The mark can be either permanent or non-permanent. A permanent mark can be created through any suitable means that does not create defects in the actual LEDs on the die, including but not limited to, lithography, milling, scribing, sawing, laser marking, masking, screen printing, chemical etching during the LED fabrication process. This mark can be placed on any side of any shaped die based on the preference of the manufacturer. In the shown embodiment a star is used to indicate the side of the die that is parallel to the strong dipole plane. Alternatively, a similar mark can be made on the back side of the die to ensure that the LED structure is not altered or damaged in any way. In a specific embodiment, the mark should be larger than about 10 microns, 100 microns, or greater, or large enough to be detectable by a machine reader (e.g., optical, capacitive, inductive, electrical, mechanical or any combination) or visual by a human being assisted with a microscope or under normal vision or other tool. Of course, there can be other variations, modifications, and alternatives.



FIG. 6 shows a top view of a sample optical device made from multiple die, wherein the configuration of the strong and weak dipole planes of each individual die are not aligned in the same direction according to an embodiment of the present invention. This can dramatically affect the performance of the device, as the light that is emitted from the misaligned die has a different direction of polarization, thereby decreasing the intensity of correctly polarized light that is emitted from the device. This is what creates the need for a method to quickly determine the configuration of the strong and weak dipole planes of the die. Of course, there can be other variations, modifications, and alternatives.



FIG. 7 shows a top view of a sample optical device made from multiple die, wherein the configuration of the strong and weak dipole planes of each individual die are aligned in the same direction according to an embodiment of the present invention. Using any of the embodiments of this invention, a user can ensure that when packaging multiple die to create an optical device, the die are positioned correctly such that the dipole planes are aligned along the same direction. This in turn ensures that all light is emitted along the same polarized field direction, thereby maximizing light intensity levels.


In some embodiments, at least one light emitting diode is packaged along with at least one phosphor, as described in U.S. patent application 61/086,139, entitled “White light devices using non-polar or semipolar gallium containing materials and phosphors,” which is hereby incorporated by reference in its entirety. In other embodiments, at least one textured-surface light emitting diode is co-packaged along with at least one additional light emitting diode, as described in U.S. patent application 61/076,596, entitled “Copackaging configurations for nonpolar GaN and/or semipolar GaN LEDs,” which is hereby incorporated by reference in its entirety. Thus, the present invention is not limited to the packaging of identical die fabricated from bulk GaN material. Instead, the present invention can be used with optical devices that utilize die fabricated from various materials. The present invention merely ensures that the manufacturer properly aligns the bulk GaN based die within the optical device.


While the above is a full description of the specific embodiments, various modifications, alternative constructions and equivalents may be used. Therefore, the above description and illustrations should not be taken as limiting the scope of the present invention which is defined by the appended claims.

Claims
  • 1. A method for indicating a dipole configuration of an LED device provided on a gallium-containing substrate, the method comprising: determining a dipole configuration of an LED device provided on a substrate, the LED device being configured to emit electromagnetic radiation having a weak dipole plane and a strong dipole plane; andforming one or more indicia on the gallium-containing substrate to correlate the weak dipole plane, the strong dipole plane, or both the weak and the strong dipole plane to the one or more indicia;wherein the one or more indicia comprises a shape including a width and a length, the width (W) and the length (L) being different in magnitude, wherein the shape is similar to a rectangular shape in which one side is cut at an angle.
  • 2. The method of claim 1, wherein the one or more indicia comprises one or more marks on either of one of the faces of the device or substrate.
  • 3. The method of claim 1, wherein the weak dipole plane is orthogonal to the strong dipole plane, the strong dipole plane being parallel or perpendicular to the width of the gallium-containing substrate.
  • 4. The method of claim 1, wherein the gallium-containing substrate comprises a gallium species and a nitrogen species.
  • 5. The method of claim 1, wherein the gallium-containing substrate is a gallium nitride (GaN) substrate.
  • 6. The method of claim 5, wherein the GaN substrate comprises a semipolar GaN substrate.
  • 7. The method of claim 5, wherein the GaN substrate comprises a non-polar GaN substrate.
  • 8. The method of claim 1, wherein the length and the width are characterized by an aspect ratio (L/W) of 1.5 and greater.
  • 9. The method of claim 1, wherein the length and the width are characterized by an aspect ratio (L/W) of 2 and greater.
  • 10. The method of claim 1, wherein the LED device is formed on a semi-polar plane of the gallium-containing substrate.
  • 11. The method of claim 1, wherein the LED device is formed on a non-polar plane of the gallium-containing substrate.
  • 12. The method of claim 1, wherein the gallium-containing substrate is characterized by a wurtzite crystalline structure.
  • 13. A method for indicating a dipole configuration of a plurality of LED devices provided on a gallium-containing substrate, the method comprising: determining a dipole configuration of each of the plurality of LED devices, each of the plurality of LED devices being configured to emit electromagnetic radiation having a weak dipole plane and a strong dipole plane; andcutting one or more of the plurality of LED devices to provide one or more indicia on the gallium-containing substrate to correlate the weak dipole plane, the strong dipole plane, or both the weak and the strong dipole plane to the one or more indicia;wherein the one or more indicia comprises a shape including a width and a length, the width (W) and the length (L) being different in magnitude, wherein the shape is similar to a rectangular shape in which one side is cut at an angle.
  • 14. The method of claim 13, wherein each of the plurality of LED devices is configured to emit the polarized electromagnetic radiation in a common direction.
  • 15. The method of claim 13, wherein the weak dipole plane is orthogonal to the strong dipole plane, the strong dipole plane being parallel or perpendicular to the width of the gallium-containing substrate.
  • 16. The method of claim 13, wherein the gallium-containing substrate comprises a gallium species and a nitrogen species.
  • 17. The method of claim 13, wherein the LED device is formed on a semi-polar plane of the gallium-containing substrate.
  • 18. The method of claim 13, wherein the LED device is formed on a non-polar plane of the gallium-containing substrate.
  • 19. A method of assembling an optical device from a plurality of LED devices, comprising: providing a plurality of LED devices wherein, each of the plurality of LED devices is provided on a gallium-containing substrate and is configured to emit electromagnetic radiation having a weak dipole plane and a strong dipole plane; andeach of the plurality of LED devices comprises one or more indicia on the gallium-containing substrate to correlate the weak dipole plane, the strong dipole plane, or both the weak and the strong dipole plane to the one or more indicia;wherein the one or more indicia comprises a shape including a width and a length, the width (W) and the length (L) being different in magnitude, wherein the shape is similar to a rectangular shape in which one side is cut at an angle; andorienting each of the plurality of LED devices based on the one or more indicia.
CROSS-REFERENCES TO RELATED APPLICATIONS

This application is a divisional application of U.S. application Ser. No. 12/720,593 filed on Mar. 9, 2010 now U.S. Pat. No. 8,247,886, now allowed, which claims priority to U.S. Provisional Application No. 61/158,622, filed on Mar. 9, 2009, each of which is commonly assigned, and incorporated by reference herein for all purposes.

US Referenced Citations (325)
Number Name Date Kind
3647522 Single Mar 1972 A
4065688 Thornton Dec 1977 A
4870045 Gasper et al. Sep 1989 A
5331654 Jewell et al. Jul 1994 A
5366953 Char et al. Nov 1994 A
5607899 Yoshida et al. Mar 1997 A
5632812 Hirabayashi May 1997 A
5685885 Khandros et al. Nov 1997 A
5764674 Hibbs-Brenner et al. Jun 1998 A
5813753 Vriens et al. Sep 1998 A
5926493 O'Brien et al. Jul 1999 A
6069394 Hashimoto et al. May 2000 A
6072197 Horino et al. Jun 2000 A
6147953 Duncan Nov 2000 A
6195381 Botez et al. Feb 2001 B1
6335771 Hiraishi Jan 2002 B1
6379985 Cervantes et al. Apr 2002 B1
6498355 Harrah et al. Dec 2002 B1
6501154 Morita et al. Dec 2002 B2
6509651 Matsubara et al. Jan 2003 B1
6533874 Vaudo et al. Mar 2003 B1
6547249 Collins, III et al. Apr 2003 B2
6586762 Kozaki Jul 2003 B2
6639925 Niwa et al. Oct 2003 B2
6680959 Tanabe et al. Jan 2004 B2
6734461 Shiomi et al. May 2004 B1
6809781 Setlur et al. Oct 2004 B2
6858882 Tsuda et al. Feb 2005 B2
6860628 Robertson et al. Mar 2005 B2
6936488 D'Evelyn et al. Aug 2005 B2
6956246 Epler et al. Oct 2005 B1
7009199 Hall Mar 2006 B2
7012279 Wierer, Jr. et al. Mar 2006 B2
7019325 Li et al. Mar 2006 B2
7128849 Setlur et al. Oct 2006 B2
7285801 Eliashevich et al. Oct 2007 B2
7303630 Motoki et al. Dec 2007 B2
7341880 Erchak et al. Mar 2008 B2
7348600 Narukawa et al. Mar 2008 B2
7358542 Radkov et al. Apr 2008 B2
7358543 Chua et al. Apr 2008 B2
7390359 Miyanaga et al. Jun 2008 B2
7419281 Porchia et al. Sep 2008 B2
7470555 Matsumura Dec 2008 B2
7470938 Lee et al. Dec 2008 B2
7483466 Uchida et al. Jan 2009 B2
7489441 Scheible et al. Feb 2009 B2
7491984 Koike et al. Feb 2009 B2
7518159 Masui et al. Apr 2009 B2
7566639 Kohda Jul 2009 B2
7598104 Teng et al. Oct 2009 B2
7622742 Kim et al. Nov 2009 B2
7733571 Li Jun 2010 B1
7816238 Osada et al. Oct 2010 B2
7858408 Mueller et al. Dec 2010 B2
7862761 Okushima et al. Jan 2011 B2
7871839 Lee et al. Jan 2011 B2
7884538 Mitsuishi et al. Feb 2011 B2
7923741 Zhai et al. Apr 2011 B1
7976630 Poblenz et al. Jul 2011 B2
8044412 Murphy et al. Oct 2011 B2
8142566 Kiyomi et al. Mar 2012 B2
8148801 D'Evelyn Apr 2012 B2
8188504 Lee May 2012 B2
8198643 Lee et al. Jun 2012 B2
8207548 Nagai Jun 2012 B2
8207554 Shum Jun 2012 B2
D662899 Shum et al. Jul 2012 S
D662900 Shum et al. Jul 2012 S
8247886 Sharma et al. Aug 2012 B1
8247887 Raring et al. Aug 2012 B1
8252662 Poblenz et al. Aug 2012 B1
8293551 Sharma et al. Oct 2012 B2
8299473 D'Evelyn et al. Oct 2012 B1
8304265 Nakamura et al. Nov 2012 B2
8310143 Van De Ven et al. Nov 2012 B2
8314429 Raring et al. Nov 2012 B1
8324835 Shum Dec 2012 B2
8350273 Vielemeyer Jan 2013 B2
8351478 Raring et al. Jan 2013 B2
8355418 Raring et al. Jan 2013 B2
8455894 D'Evelyn et al. Jun 2013 B1
8477259 Kubota et al. Jul 2013 B2
8502465 Katona et al. Aug 2013 B2
8524578 Raring et al. Sep 2013 B1
8575728 Raring et al. Nov 2013 B1
8597967 Krames et al. Dec 2013 B1
8686431 Batres et al. Apr 2014 B2
8786053 D'Evelyn et al. Jul 2014 B2
8791499 Sharma et al. Jul 2014 B1
20010009134 Kim et al. Jul 2001 A1
20010043042 Murazaki et al. Nov 2001 A1
20010048114 Morita et al. Dec 2001 A1
20010055208 Kimura Dec 2001 A1
20020027933 Tanabe et al. Mar 2002 A1
20020050488 Nikitin et al. May 2002 A1
20020070416 Morse et al. Jun 2002 A1
20020096994 Iwafuchi et al. Jul 2002 A1
20020105986 Yamasaki Aug 2002 A1
20020127824 Shelton et al. Sep 2002 A1
20020155691 Lee et al. Oct 2002 A1
20020182768 Morse et al. Dec 2002 A1
20020190260 Shen et al. Dec 2002 A1
20030000453 Unno et al. Jan 2003 A1
20030001238 Ban Jan 2003 A1
20030020087 Goto et al. Jan 2003 A1
20030047076 Liu Mar 2003 A1
20030080345 Motoki et al. May 2003 A1
20030164507 Edmond et al. Sep 2003 A1
20030178617 Appenzeller et al. Sep 2003 A1
20030216011 Nakamura et al. Nov 2003 A1
20040070004 Eliashevich et al. Apr 2004 A1
20040080256 Hampden-Smith et al. Apr 2004 A1
20040104391 Maeda et al. Jun 2004 A1
20040116033 Ouderkirk et al. Jun 2004 A1
20040124435 D'Evelyn et al. Jul 2004 A1
20040161222 Niida et al. Aug 2004 A1
20040196877 Kawakami et al. Oct 2004 A1
20040207998 Suehiro et al. Oct 2004 A1
20040245543 Yoo Dec 2004 A1
20040251471 Dwilinski et al. Dec 2004 A1
20050001227 Niki et al. Jan 2005 A1
20050012446 Jermann et al. Jan 2005 A1
20050045894 Okuyama et al. Mar 2005 A1
20050087753 D'Evelyn et al. Apr 2005 A1
20050109240 Maeta et al. May 2005 A1
20050121679 Nagahama et al. Jun 2005 A1
20050140270 Henson et al. Jun 2005 A1
20050167680 Shei et al. Aug 2005 A1
20050199899 Lin et al. Sep 2005 A1
20050214992 Chakraborty et al. Sep 2005 A1
20050224830 Blonder et al. Oct 2005 A1
20050230701 Huang Oct 2005 A1
20050232327 Nomura et al. Oct 2005 A1
20050263791 Yanagihara et al. Dec 2005 A1
20060038542 Park et al. Feb 2006 A1
20060060131 Atanackovic Mar 2006 A1
20060060872 Edmond et al. Mar 2006 A1
20060077795 Kitahara et al. Apr 2006 A1
20060079082 Bruhns et al. Apr 2006 A1
20060118799 D'Evelyn et al. Jun 2006 A1
20060163589 Fan et al. Jul 2006 A1
20060166390 Letertre et al. Jul 2006 A1
20060169993 Fan et al. Aug 2006 A1
20060186418 Edmond et al. Aug 2006 A1
20060189098 Edmond Aug 2006 A1
20060204865 Erchak et al. Sep 2006 A1
20060205199 Baker et al. Sep 2006 A1
20060213429 Motoki et al. Sep 2006 A1
20060214287 Ogihara et al. Sep 2006 A1
20060255343 Ogihara et al. Nov 2006 A1
20060256482 Araki et al. Nov 2006 A1
20060273339 Steigerwald et al. Dec 2006 A1
20060288928 Eom et al. Dec 2006 A1
20070045200 Moon et al. Mar 2007 A1
20070054476 Nakahata et al. Mar 2007 A1
20070062440 Sato et al. Mar 2007 A1
20070072324 Krames et al. Mar 2007 A1
20070093073 Farrell et al. Apr 2007 A1
20070096239 Cao et al. May 2007 A1
20070105351 Motoki et al. May 2007 A1
20070114569 Wu et al. May 2007 A1
20070121690 Fujii et al. May 2007 A1
20070131967 Kawaguchi et al. Jun 2007 A1
20070202624 Yoon et al. Aug 2007 A1
20070210074 Maurer et al. Sep 2007 A1
20070217462 Yamasaki Sep 2007 A1
20070228404 Tran et al. Oct 2007 A1
20070231978 Kanamoto et al. Oct 2007 A1
20070264733 Choi et al. Nov 2007 A1
20070280320 Feezell et al. Dec 2007 A1
20070290224 Ogawa Dec 2007 A1
20080023691 Jang et al. Jan 2008 A1
20080030976 Murazaki et al. Feb 2008 A1
20080054290 Shieh et al. Mar 2008 A1
20080073660 Ohno et al. Mar 2008 A1
20080083741 Giddings et al. Apr 2008 A1
20080083929 Fan et al. Apr 2008 A1
20080087919 Tysoe et al. Apr 2008 A1
20080099777 Erchak et al. May 2008 A1
20080106212 Yen et al. May 2008 A1
20080121906 Yakushiji May 2008 A1
20080121913 McKenzie et al. May 2008 A1
20080128752 Wu Jun 2008 A1
20080142781 Lee Jun 2008 A1
20080164489 Schmidt et al. Jul 2008 A1
20080164578 Tanikella et al. Jul 2008 A1
20080173884 Chitnis et al. Jul 2008 A1
20080179607 DenBaars et al. Jul 2008 A1
20080179610 Okamoto et al. Jul 2008 A1
20080191192 Feezell et al. Aug 2008 A1
20080191223 Nakamura et al. Aug 2008 A1
20080194054 Lin et al. Aug 2008 A1
20080198881 Farrell et al. Aug 2008 A1
20080210958 Senda et al. Sep 2008 A1
20080211416 Negley et al. Sep 2008 A1
20080217745 Miyanaga et al. Sep 2008 A1
20080230765 Yoon et al. Sep 2008 A1
20080237569 Nago et al. Oct 2008 A1
20080261381 Akiyama et al. Oct 2008 A1
20080272463 Butcher et al. Nov 2008 A1
20080282978 Butcher et al. Nov 2008 A1
20080283851 Akita Nov 2008 A1
20080284346 Lee Nov 2008 A1
20080285609 Ohta et al. Nov 2008 A1
20080291961 Kamikawa et al. Nov 2008 A1
20080298409 Yamashita et al. Dec 2008 A1
20080303033 Brandes Dec 2008 A1
20090028204 Hiroyama et al. Jan 2009 A1
20090032828 Romano et al. Feb 2009 A1
20090058532 Kikkawa et al. Mar 2009 A1
20090065798 Masui et al. Mar 2009 A1
20090071394 Nakahata et al. Mar 2009 A1
20090072252 Son et al. Mar 2009 A1
20090078944 Kubota et al. Mar 2009 A1
20090078955 Fan et al. Mar 2009 A1
20090081857 Hanser et al. Mar 2009 A1
20090086475 Caruso et al. Apr 2009 A1
20090095973 Tanaka et al. Apr 2009 A1
20090140279 Zimmerman et al. Jun 2009 A1
20090146170 Zhong et al. Jun 2009 A1
20090155989 Uematsu et al. Jun 2009 A1
20090194796 Hashimoto et al. Aug 2009 A1
20090206354 Kitano et al. Aug 2009 A1
20090227056 Kyono et al. Sep 2009 A1
20090250686 Sato et al. Oct 2009 A1
20090252191 Kubota et al. Oct 2009 A1
20090267098 Choi Oct 2009 A1
20090267100 Miyake et al. Oct 2009 A1
20090273005 Lin Nov 2009 A1
20090309110 Raring et al. Dec 2009 A1
20090309127 Raring et al. Dec 2009 A1
20090315480 Yan et al. Dec 2009 A1
20090321745 Kinoshita et al. Dec 2009 A1
20090321778 Chen et al. Dec 2009 A1
20100001300 Raring et al. Jan 2010 A1
20100006873 Raring et al. Jan 2010 A1
20100006876 Moteki et al. Jan 2010 A1
20100025656 Raring et al. Feb 2010 A1
20100032691 Kim Feb 2010 A1
20100055819 Ohba et al. Mar 2010 A1
20100067241 Lapatovich et al. Mar 2010 A1
20100096615 Okamoto et al. Apr 2010 A1
20100108985 Chung et al. May 2010 A1
20100109030 Krames et al. May 2010 A1
20100117101 Kim et al. May 2010 A1
20100117106 Trottier May 2010 A1
20100117118 Dabiran et al. May 2010 A1
20100140634 van de Ven et al. Jun 2010 A1
20100148145 Ishibashi et al. Jun 2010 A1
20100149814 Zhai et al. Jun 2010 A1
20100155746 Ibbetson et al. Jun 2010 A1
20100195687 Okamoto et al. Aug 2010 A1
20100200837 Zimmerman et al. Aug 2010 A1
20100219505 D'Evelyn Sep 2010 A1
20100220262 DeMille et al. Sep 2010 A1
20100240158 Ter-Hovhannissian Sep 2010 A1
20100276663 Enya et al. Nov 2010 A1
20100290208 Pickard Nov 2010 A1
20100295054 Okamoto et al. Nov 2010 A1
20100295088 D'Evelyn et al. Nov 2010 A1
20100302464 Raring et al. Dec 2010 A1
20100309943 Chakraborty et al. Dec 2010 A1
20100316075 Raring et al. Dec 2010 A1
20110017298 Lee Jan 2011 A1
20110031508 Hamaguchi et al. Feb 2011 A1
20110056429 Raring et al. Mar 2011 A1
20110057167 Ueno et al. Mar 2011 A1
20110062415 Ohta et al. Mar 2011 A1
20110064100 Raring et al. Mar 2011 A1
20110064101 Raring et al. Mar 2011 A1
20110064102 Raring et al. Mar 2011 A1
20110064103 Ohta et al. Mar 2011 A1
20110075694 Yoshizumi et al. Mar 2011 A1
20110100291 D'Evelyn May 2011 A1
20110101400 Chu et al. May 2011 A1
20110101414 Thompson et al. May 2011 A1
20110103418 Hardy et al. May 2011 A1
20110108081 Werthen et al. May 2011 A1
20110121331 Simonian et al. May 2011 A1
20110124139 Chang May 2011 A1
20110175200 Yoshida Jul 2011 A1
20110177631 Gardner et al. Jul 2011 A1
20110180781 Raring et al. Jul 2011 A1
20110182056 Trottier et al. Jul 2011 A1
20110186860 Enya et al. Aug 2011 A1
20110186874 Shum Aug 2011 A1
20110186887 Trottier et al. Aug 2011 A1
20110188530 Lell et al. Aug 2011 A1
20110216795 Hsu et al. Sep 2011 A1
20110220912 D'Evelyn Sep 2011 A1
20110247556 Raring et al. Oct 2011 A1
20110256693 D'Evelyn et al. Oct 2011 A1
20110262773 Poblenz et al. Oct 2011 A1
20110266552 Tu et al. Nov 2011 A1
20110279054 Katona et al. Nov 2011 A1
20110281422 Wang et al. Nov 2011 A1
20110315999 Sharma et al. Dec 2011 A1
20110317397 Trottier et al. Dec 2011 A1
20120000415 D'Evelyn et al. Jan 2012 A1
20120007102 Feezell et al. Jan 2012 A1
20120043552 David et al. Feb 2012 A1
20120073494 D'Evelyn Mar 2012 A1
20120091465 Krames et al. Apr 2012 A1
20120104412 Zhong et al. May 2012 A1
20120118223 D'Evelyn May 2012 A1
20120135553 Felker et al. May 2012 A1
20120137966 D'Evelyn et al. Jun 2012 A1
20120178215 D'Evelyn Jul 2012 A1
20120187412 D'Evelyn et al. Jul 2012 A1
20120199841 Batres et al. Aug 2012 A1
20120199952 D'Evelyn et al. Aug 2012 A1
20120235201 Shum Sep 2012 A1
20130022064 Raring et al. Jan 2013 A1
20130022758 Trottier Jan 2013 A1
20130026483 Sharma et al. Jan 2013 A1
20130044782 Raring Feb 2013 A1
20130064261 Sharma et al. Mar 2013 A1
20130112987 Fu et al. May 2013 A1
20130126902 Isozaki et al. May 2013 A1
20130234108 David et al. Sep 2013 A1
20140103356 Krames et al. Apr 2014 A1
20140175492 Steranka et al. Jun 2014 A1
20140346524 Batres et al. Nov 2014 A1
20140346546 D'Evelyn et al. Nov 2014 A1
Foreign Referenced Citations (21)
Number Date Country
0961328 Dec 1999 EP
2381490 Oct 2011 EP
06-334215 Dec 1994 JP
1997-036430 Feb 1997 JP
09-082587 Mar 1997 JP
11-340507 Dec 1999 JP
11-340576 Dec 1999 JP
2001-160627 Jun 2001 JP
2001-177146 Jun 2001 JP
2002-185085 Jun 2002 JP
2003-031844 Jan 2003 JP
2000-294883 Feb 2004 JP
2006-173621 Jun 2006 JP
2007-110090 Apr 2007 JP
2008-084973 Apr 2008 JP
2008-172040 Jul 2008 JP
2008-311640 Dec 2008 JP
2009-21824 Jan 2009 JP
WO 2006062880 Jun 2006 WO
WO 2009001039 Dec 2008 WO
WO 2010138923 Feb 2010 WO
Non-Patent Literature Citations (131)
Entry
Aguilar, ‘Ohmic n-contacts to Gallium Nitride Light Emitting Diodes’, National Nanotechnologhy Infrastructure Network, 2007, p. 56-81.
Baker et al., ‘Characterization of Planar Semipolar Gallium Nitride Films on Spinel Substrates’, Japanese Journal of Applied Physics, vol. 44, No. 29, 2005, p. L920-L922.
Founta et al., ‘Anisotropic Morphology of Nonpolar a-Plane GaN Quantum Dots and Quantum Wells’, Journal of Applied Physics, vol. 102, vol. 7, 2007, p. 074304-1-074304-6.
Lu et al., ‘Etch-Pits of GaN Films with Different Etching Methods’, Journal of the Korean Physical Society, vol. 45, Dec. 2004, p. S673-S675.
Rickert et al., ‘n-GaN Surface Treatments for Metal Contacts Studied Via X-ray Photoemission Spectroscopy’, Applied Physics Letters, vol. 80, No. 2, Jan. 14, 2002, p. 204-206.
Sato et al., ‘High Power and High Efficiency Semipolar InGaN Light Emitting Diodes’, Journal of Light and Visible Environment, vol. 32, No. 2, Dec. 13, 2007, p. 57-60.
Sato et al., ‘Optical Properties of Yellow Light-Emitting Diodes Grown on Semipolar (1122) Bulk GaN Substrate’, Applied Physics Letters, vol. 92, No. 22, 2008, p. 221110-1-221110-3.
Selvanathan et al., ‘Investigation of Surface Treatment Schemes on n-type GaN and A1 0.20Ga0.80N’, Journal of Vacuum Science and Technology B, vol. 23, No. 6, May 10, 2005, p. 2538-2544.
Semendy et al., ‘Observation and Study of Dislocation Etch Pits in Molecular Beam Epitaxy Grown Gallium Nitride with the use of Phosphoric Acid and Molten Potassium Hydroxide’, Army Research Laboratory, ARL-TR-4164, Jun. 2007, 18 pages.
Communication from the Japanese Patent Office re 2012-529969, dated Oct. 15, 2013, 6 pages.
Weaver et al., ‘Optical Properties of Selected Elements’, Handbook of Chemistry and Physics, 94th Edition, 2013-2014, p. 12-126-12-150.
USPTO Office Action for U.S. Appl. No. 12/491,169 dated Oct. 22, 2010 (9 pages).
USPTO Office Action for U.S. Appl. No. 12/491,169 dated May 11, 2011 (9 pages).
USPTO Office Action for U.S. Appl. No. 12/497,289 dated Feb. 2, 2012 (6 pages).
USPTO Notice of Allowance for U.S. Appl. No. 12/497,289 dated May 22, 2012 (7 pages).
USPTO Office Action for U.S. Appl. No. 12/785,953 dated Apr. 12, 2012 (11 pages).
USPTO Office Action for U.S. Appl. No. 12/785,953 dated Jan. 11, 2013 (14 pages).
USPTO Office Action for U.S. Appl. No. 12/785,953 dated Oct. 3, 2013 (10 pages).
USPTO Office Action for U.S. Appl. No. 12/880,803 dated Feb. 22, 2012 (8 pages).
USPTO Notice of Allowance for U.S. Appl. No. 12/880,803 dated Jul. 18, 2012 (5 pages).
USPTO Office Action for U.S. Appl. No. 12/995,946 dated Mar. 28, 2012 (17 pages).
USPTO Office Action for U.S. Appl. No. 12/995,946 dated Jan. 29, 2013 (25 pages).
USPTO Office Action for U.S. Appl. No. 12/995,946 dated Aug. 2, 2013 (15 pages).
USPTO Office Action for U.S. Appl. No. 13/019,897 dated Dec. 2, 2013 (17 pages).
USPTO Notice of Allowance for U.S. Appl. No. 13/281,221 dated Nov. 12, 2013 (10 pages).
USPTO Office Action for U.S. Appl. No. 13/328,978 dated Sep. 26, 2013 (25 pages).
USPTO Office Action for U.S. Appl. No. 13/548,635 dated Jun. 14, 2013 (5 pages).
USPTO Notice of Allowance for U.S. Appl. No. 13/548,635 dated Sep. 16, 2013 (6 pages).
USPTO Office Action for U.S. Appl. No. 13/548,770 dated Mar. 12, 2013 (5 pages).
USPTO Notice of Allowance for U.S. Appl. No. 13/548,770 dated Jun. 25, 2013 (6 pages).
USPTO Office Action for U.S. Appl. No. 13/629,366 dated Oct. 31, 2013 (7 pages).
USPTO Office Action for U.S. Appl. No. 13/723,968 dated Nov. 29, 2013 (23 pages).
Farrell et al., ‘Continuous-Wave Operation of AIGaN-Cladding-Free Nonpolar m-Plane InGaN/GaN Laser Diodes’, 2007, Japanese Journal of Applied Physics, vol. 46, No. 32, 2007, pp. L761-L763.
Feezell et al., ‘AIGaN-Cladding-Free Nonpolar InGaN/GaN Laser Diodes’, Japanese Journal of Applied Physics, vol. 46, No. 13, 2007, pp. L284-L286.
Haskell et al., ‘Defect Reduction in (1100) m-plane gallium nitride via lateral epitaxial overgrowth by hydride vapor phase epitaxy’, Applied Physics Letters 86, 111917 (2005), pp. 1-3.
Kojima et al., ‘Stimulated Emission At 474 nm From an InGaN Laser Diode Structure Grown on a (1122) GaN Substrate’, Applied Physics Letters, vol. 91, 2007, pp. 251107-251107-3.
Kubota et al., ‘Temperature Dependence of Polarized Photoluminescence From Nonpolar m-Plane InGaN Multiple Quantum Wells For Blue Laser Diodes’, Applied Physics Letter, vol. 92, 2008, pp. 011920-1-011920-3.
PCT Communication Including Partial Search and Examination Report for PCT/US2011/041106, dated Oct. 4, 2011, 4 pages total.
International Search Report of PCT Application No. PCT/US2011/041106, dated Jan. 5, 2012, 4 pages total.
Tsuda et al., ‘Blue Laser Diodes Fabricated on m-Plane GaN Substrates’, Applied Physics Express, vol. 1, 2008, pp. 011104-1-011104-3.
Tyagi et al., ‘Semipolar (1011) InGaN/GaN Laser Diodes on Bulk GaN Substrates’, Japanese Journal of Applied Physics, vol. 46, No. 19, 2007, pp. L444-L445.
USPTO Office Action for U.S. Appl. No. 12/478,736 dated Feb. 7, 2012 (6 pages).
USPTO Office Action for U.S. Appl. No. 12/634,665 dated Apr. 25, 2012 (9 pages).
USPTO Notice of Allowance for U.S. Appl. No. 12/720,593 dated Jul. 11, 2012 (7 pages).
USPTO Notice of Allowance for U.S. Appl. No. 12/785,953 dated Mar. 20, 2014 (8 pages).
USPTO Office Action for U.S. Appl. No. 12/861,765 dated Mar. 28, 2014 (12 pages).
USPTO Notice of Allowance for U.S. Appl. No. 13/012,674 dated Apr. 30, 2014 (8 pages).
USPTO Office Action for U.S. Appl. No. 13/019,897 dated Jun. 12, 2014 (8 pages).
USPTO Office Action for U.S. Appl. No. 13/304,182 dated May 9, 2014 (12 pages).
USPTO Office Action for U.S. Appl. No. 13/357,578 dated May 13, 2014 (8 pages).
USPTO Office Action for U.S. Appl. No. 13/629,366 dated Apr. 18, 2014 (7 pages).
Kim et al., ‘High Brightness Light Emitting Diodes Using Dislocation-Free Indium Gallium Nitride/Gallium Nitride Multiquantum-Well Nanorod Arrays’, Nano Letters, vol. 4, No. 6, 2004, pp. 1059-1062.
Communication from the Korean Patent Office re 10-2012-7009980, dated Apr. 15, 2013, 6 pages.
USPTO Office Action for U.S. Appl. No. 12/569,841 dated Mar. 26, 2013.
USPTO Office Action for U.S. Appl. No. 12/749,466 dated Jul. 3, 2012.
USPTO Notice of Allowance for U.S. Appl. No. 12/936,238 dated Apr. 16, 2013.
USPTO Office Action for U.S. Appl. No. 13/019,897 dated Jan. 16, 2013.
USPTO Office Action for U.S. Appl. No. 13/328,978 dated May 15, 2013.
USPTO Office Action for U.S. Appl. No. 13/465,976 dated Dec. 20, 2012.
Motoki et al., ‘Dislocation reduction in GaN crystal by advanced-DEEP’, Journal of Crystal Growth, vol. 305, Apr. 1, 2007, pp. 377-383.
Communication from the Japanese Patent Office re 2013515583 dated Feb. 27, 2014, 2 pages.
USPTO Office Action for U.S. Appl. No. 12/569,841 dated Feb. 14, 2014, 20 pages.
USPTO Office Action for U.S. Appl. No. 13/012,674 dated Jan. 17, 2014, 15 pages.
Cich et al., ‘Bulk GaN based violet light-emitting diodes with high efficiency at very high current density’, Applied Physics Letters, 101, Nov. 29, 2012, pp. 223509-1-223509-3.
USPTO Office Action for U.S. Appl. No. 12/481,543 dated Jun. 27, 2011.
USPTO Office Action for U.S. Appl. No. 12/749,476 dated Apr. 11, 2011.
USPTO Office Action for U.S. Appl. No. 12/749,476 dated Nov. 8, 2011.
USPTO Notice of Allowance for U.S. Appl. No. 12/749,476 dated May 4, 2012.
USPTO Notice of Allowance for U.S. Appl. No. 12/749,476 dated Jun. 26, 2012.
USPTO Office Action for U.S. Appl. No. 12/861,765 dated Jul. 2, 2012.
USPTO Office Action for U.S. Appl. No. 12/879,784 dated Jan. 25, 2012.
USPTO Notice of Allowance for U.S. Appl. No. 12/879,784 dated Apr. 3, 2012.
USPTO Office Action for U.S. Appl. No. 12/880,889 dated Feb. 27, 2012.
USPTO Office Action for U.S. Appl. No. 12/880,889 dated Sep. 19, 2012.
USPTO Office Action for U.S. Appl. No. 12/936,238 dated Aug. 30, 2012.
USPTO Office Action for U.S. Appl. No. 13/014,622 dated Nov. 28, 2011.
USPTO Office Action for U.S. Appl. No. 13/014,622 dated Apr. 30, 2012.
USPTO Office Action for U.S. Appl. No. 13/019,897 dated Mar. 30, 2012.
USPTO Notice of Allowance for U.S. Appl. No. 13/163,482 dated Jul. 31, 2012.
USPTO Office Action for U.S. Appl. No. 13/465,976 dated Aug. 16, 2012.
Benke et al., ‘Uncertainty in Health Risks from Artificial Lighting due to Disruption of Circadian Rythm and Melatonin Secretion: A Review’, Human and Ecological Risk Assessment: An International Journal, vol. 19, No. 4, 2013, pp. 916-929.
Hanifin et al., ‘Photoreception for Circadian, Neuroendocrine, and Neurobehavioral Regulation’, Journal of Physiological Anthropology, vol. 26, 2007, pp. 87-94.
International Search Report & Written Opinion of PCT Application No. PCT/US2013/029453, dated Jul. 25, 2013, 11 pages total.
http://www.philipslumileds.com/products/luxeon-flash, ‘LUXEON Flash’, Philips Lumileds, Aug. 8, 2013, pp. 1-2.
Rea et al., ‘White Lighting’, COLOR Research and Application, vol. 38, No. 2, Sep. 3, 2011, pp. 82-92.
USPTO Office Action for U.S. Appl. No. 12/569,841 dated Aug. 13, 2013, 21 pages.
USPTO Office Action for U.S. Appl. No. 12/861,765 dated Sep. 17, 2013, 10 pages.
USPTO Office Action for U.S. Appl. No. 13/281,221 dated Jun. 21, 2013, 6 pages.
Iso et al., ‘High Brightness Blue InGaN/GaN Light Emitting Diode on Nonpolar m-Plane Bulk GaN Substrate,’ Japanese Journal of Applied Physics, 2007, vol. 46, No. 40, pp. L960-L962.
USPTO Office Action for U.S. Appl. No. 12/569,841 dated Dec. 23, 2011.
USPTO Office Action for U.S. Appl. No. 12/569,844 dated Oct. 12, 2012.
USPTO Notice of Allowance for U.S. Appl. No. 12/569,844 dated Mar. 7, 2013.
USPTO Notice of Allowance for U.S. Appl. No. 12/754,886 dated May 17, 2012.
USPTO Notice of Allowance for U.S. Appl. No. 12/754,886 dated Jun. 5, 2012.
USPTO Notice of Allowance for U.S. Appl. No. 12/754,886 dated Jun. 20, 2012.
USPTO Office Action for U.S. Appl. No. 12/861,765 dated Mar. 7, 2013.
USPTO Office Action for U.S. Appl. No. 12/936,238 dated Jan. 30, 2013.
USPTO Office Action for U.S. Appl. No. 13/025,833 dated Jul. 12, 2012.
USPTO Office Action for U.S. Appl. No. 13/179,346 dated Aug. 17, 2012.
USPTO Office Action for U.S. Appl. No. 13/179,346 dated Dec. 13, 2012.
Mastro et al., ‘Hydride vapor phase epitaxy-grown A1GaN/GaN high electron mobility transistors’, Solid-State Electronics, vol. 47, Issue 6, Jun. 2003, pp. 1075-1079.
Morkoc, ‘Handbook of Nitride Semiconductors and Devices’, vol. 1, 2008, p. 704.
USPTO Office Action for U.S. Appl. No. 13/014,622 dated Jun. 20, 2014 (15 pages).
USPTO Notice of Allowance for U.S. Appl. No. 13/304,182 dated Aug. 27, 2014 (8 pages).
USPTO Office Action for U.S. Appl. No. 13/465,976 dated Aug. 25, 2014 (21 pages).
USPTO Office Action for U.S. Appl. No. 14/054,234 dated Aug. 14, 2014 (24 pages).
Enya, ‘531nm Green Lasing of InGaN Based Laser Diodes on Semi-Polar {20-21} Free-Standing GaN Substrates’, Applied Physics Express, Jul. 17, 2009, vol. 2, pp. 082101.
Fujii et al., ‘Increase in the Extraction Efficiency of GaN-Based Light-Emitting Diodes Via Surface Roughening’, 2Applied Physics Letters, vol. 84, No. 6, 2004, pp. 855-857.
Kendall et al., ‘Energy Savings Potential of Solid State Lighting in General Lighting Applications’, Report for the Department of Energy, 2001, pp. 1-35.
International Search Report of PCT Application No. PCT/US2011/023622, dated Apr. 1, 2011, 2 pages total.
International Preliminary Report & Written Opinion of PCT Application No, PCT/US2011/037792, dated Dec. 6, 2012, 8 pages total.
Schmidt et al., ‘High Power and High External Efficiency m-Plane InGaN Light Emitting Diodes’, Japanese Journal of Applied Physics, vol. 46, No. 7, 2007, pp. L126-L128.
Shchekin et al., ‘High Performance Thin-film Flip-Chip InGaN-GaN Light-Emitting Diodes’, Applied Physics Letters, vol. 89, 2006, pp. 071109-1-071109-3.
Tyagi et al., ‘High Brightness Violet InGaN/GaN Light Emitting Diodes on Sernipolar (1011) Bulk GaN Substrates’, Japanese Journal of Applied Physics, vol. 46, No. 7, 2007, pp. L129-L131.
Communication from the German Patent Office re 11 2010 003 697.7 dated Apr. 11, 2013, (6 pages).
Communication from the Japanese Patent Office re 2012-529905 dated Apr. 19, 2013, (4 pages).
Communication from the Chinese Patent Office re 201180029188.7 dated Sep. 29, 2014 (7 pages).
Communication from the Japanese Patent Office re 2013-515583 dated Sep. 12, 2014 (4 pages).
Wierer et al., ‘High-Power A1GalnN Flip-Chip Light-Emilting Diodes’, Applied Physics Letters, vol. 78, No. 22, 2001, pp. 3379-3381.
Yamaguchi, ‘Anisotropic Optical Matrix Elements in Strained GaN-Quantum Wells With Various Substrate Orientations’, Physica Status Solidi (PSS), vol. 5, No. 6, 2008, pp. 2329-2332.
Yoshizumi et al., ‘Continuous-Wave Operation of 520nm Green InGaN-Based Laser Diodes On . Semi- Polar {2021} GaN Substrates’, Applied Physics Express, vol. 2, 2009, pp. 092101-1-092101-3.
USPTO Office Action for U.S. Appl. No. 12/883,652 dated Jan. 11, 2013 (11 pages).
USPTO Office Action for U.S. Appl. No. 12/942,817 dated Feb. 20, 2013 (11 pages).
USPTO Office Action for U.S. Appl. No. 13/019,897 dated Dec. 5, 2014 (18 pages).
USPTO Notice of Allowance for U.S. Appl. No. 13/108,645 dated Jan. 28, 2013 (8 pages).
USPTO Office Action for U.S. Appl. No. 13/291,922 dated Feb. 20, 2013 (9 pages).
USPTO Notice of Allowance for U.S. Appl. No. 13/425,304 dated Aug. 22, 2012 (7 pages).
USPTO Office Action for U.S. Appl. No. 13/425,354 dated Feb. 14, 2013 (12 pages).
USPTO Office Action for U.S. Appl. No. 13/606,894 dated Feb. 5, 2013 (7 pages).
USPTO Office Action for U.S. Appl. No. 14/181,386 dated Oct. 28, 2014 (10 pages).
USPTO Notice of Allowance for U.S. Appl. No. 14/301,520 dated Nov. 25, 2014 (8 pages).
Related Publications (1)
Number Date Country
20120288974 A1 Nov 2012 US
Provisional Applications (1)
Number Date Country
61158622 Mar 2009 US
Divisions (1)
Number Date Country
Parent 12720593 Mar 2010 US
Child 13553691 US