Polarization transfer device and control method therefor

Abstract

A polarization transfer device includes a ferroelectric thin film formed continuously as one piece; a plurality of polarization switches formed by placing the ferroelectric thin film between a first gate electrode and a second gate electrode; and a plurality of polarization accumulators formed by placing the ferroelectric thin film between a first electrode plate and a second electrode plate, wherein the plurality of polarization switches and the plurality of polarization accumulators are arranged alternately.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a sectional view showing a structure of a polarization transfer device according to a first embodiment of the present invention and at the same time a connection diagram showing a relationship with control signals;

FIG. 2 is a sectional view showing a structure of a polarization transfer device according to a third embodiment of the present invention and at the same time a connection diagram showing a relationship with control signals;

FIG. 3 is a sectional view showing a structure of a polarization transfer device according to a fifth embodiment of the present invention and at the same time a connection diagram showing a relationship with control signals;

FIG. 4 is a sectional view showing a structure of a polarization transfer device according to an eighth embodiment of the present invention and at the same time a connection diagram showing a relationship with control signals;

FIG. 5 is a sectional view showing a structure of a polarization transfer device according to a tenth embodiment of the present invention and at the same time a connection diagram showing a relationship with control signals;

FIG. 6 is a sectional view showing a structure of a polarization transfer device according to a second embodiment of the present invention and at the same time a connection diagram showing a relationship with control signals;

FIG. 7 is a sectional view showing a structure of a polarization transfer device according to a seventh embodiment of the present invention and at the same time a connection diagram showing a relationship with control signals;

FIG. 8 is a sectional view showing a structure of a polarization transfer device according to a fourth embodiment of the present invention and at the same time a connection diagram showing a relationship with control signals;

FIG. 9 is a sectional view showing a structure of a polarization transfer device according to a sixth embodiment of the present invention and at the same time a connection diagram showing a relationship with control signals;

FIG. 10 is a sectional view showing a structure of a polarization transfer device according to a ninth embodiment of the present invention and at the same time a connection diagram showing a relationship with control signals;

FIG. 11 is a sectional view showing a structure of a polarization transfer device according to an eleventh embodiment of the present invention and at the same time a connection diagram showing a relationship with control signals;

FIG. 12 is a diagram showing a relationship among potentials of signals for use to control the polarization transfer device according to the present invention;

FIGS. 13A1, 13B1 and 13C1 are first state diagrams of polarized signals when the polarization transfer device according to the present invention is operated using control signals of a first example;

FIGS. 14D1, 14E1 and 14F1 are second state diagrams of polarized signals when the polarization transfer device according to the present invention is operated using control signals of the first example;

FIGS. 15G1, 15H1 and 15I1 are first state diagrams of polarized signals when the polarization transfer device according to the present invention is operated using control signals of a second example;

FIGS. 16J1, 16K1 and 16L1 are second state diagrams of polarized signals when the polarization transfer device according to the present invention is operated using control signals of the second example;

FIGS. 17A2, 17B2 and 17C2 are first state diagrams of polarized signals when the polarization transfer device according to the present invention is operated using control signals of a seventh example;

FIGS. 18D2, 18E2 and 18F2 are second state diagrams of polarized signals when the polarization transfer device according to the present invention is operated using control signals of the seventh example;

FIGS. 19G2, 19H2 and 1912 are first state diagrams of polarized signals when the polarization transfer device according to the present invention is operated using control signals of an eighth example;

FIGS. 20J2, 20K2 and 20L2 are second state diagrams of polarized signals when the polarization transfer device according to the present invention is operated using control signals of the eighth example;

FIGS. 21A3, 21B3 and 21C3 are first state diagrams of polarized signals when the polarization transfer device according to the present invention is operated using control signals of a third example;

FIGS. 22D3, 22E3 and 22F3 are second state diagrams of polarized signals when the polarization transfer device according to the present invention is operated using control signals of the third example;

FIGS. 23A4, 23B4 and 23C4 are first state diagrams of polarized signals when the polarization transfer device according to the present invention is operated using control signals of a fourth example;

FIGS. 24D4, 24E4 and 24F4 are second state diagrams of polarized signals when the polarization transfer device according to the present invention is operated using control signals of the fourth example;

FIG. 25 is a diagram showing signal waveforms of a first example used to control the polarization transfer device according to the present invention;

FIG. 26 is a diagram showing signal waveforms of a ninth example used to control the polarization transfer device according to the present invention;

FIG. 27 is a diagram showing signal waveforms of a tenth example used to control the polarization transfer device according to the present invention;

FIG. 28 is a diagram showing signal waveforms of a second example used to control the polarization transfer device according to the present invention;

FIG. 29 is a diagram showing signal waveforms of a seventh example used to control the polarization transfer device according to the present invention;

FIG. 30 is a diagram showing signal waveforms of an eighth example used to control the polarization transfer device according to the present invention;

FIG. 31 is a diagram showing signal waveforms of a third example used to control the polarization transfer device according to the present invention;

FIG. 32 is a diagram showing signal waveforms of a fourth example used to control the polarization transfer device according to the present invention;

FIG. 33 is a diagram showing signal waveforms of a fifth example used to control the polarization transfer device according to the present invention;

FIG. 34 is a diagram showing signal waveforms of a sixth example used to control the polarization transfer device according to the present invention;

FIG. 35 is a diagram showing signal waveforms of an eleventh example used to control the polarization transfer device according to the present invention;

FIG. 36 is a diagram showing signal waveforms of a twelfth example used to control the polarization transfer device according to the present invention;

FIG. 37 is a diagram showing signal waveforms of a thirteenth example used to control the polarization transfer device according to the present invention;

FIG. 38 is a diagram showing signal waveforms of a fourteenth example used to control the polarization transfer device according to the present invention;

FIG. 39 is a state diagram showing an example of polarization of a ferroelectric material used in the present invention and a conventional example;

FIGS. 40A and 40B are state diagrams showing another example of polarization of a ferroelectric material used in the present invention and a conventional example;

FIGS. 41C and 41D are state diagrams showing an example of polarization of a ferroelectric material in a structure of the polarization transfer device according to the present invention;

FIG. 42 is a characteristic curve showing a relationship between applied voltage and polarized charge of a ferroelectric capacitor used in the present invention and a conventional example;

FIG. 43 is a sectional view showing a structure of a ferroelectric capacitor used in the present invention and a conventional example;

FIG. 44 is a circuit block diagram of a memory cell used for a conventional ferroelectric memory;

FIG. 45 is a sectional view showing a structure of a field effect transistor used for a conventional ferroelectric memory, with a ferroelectric thin film formed in the gate; and

FIG. 46 is a circuit block diagram of a memory cell array in a conventional ferroelectric memory device using field effect transistors with a ferroelectric thin film formed in the gate.

Claims

1. A polarization transfer device comprising: a ferroelectric thin film formed continuously as one piece;a plurality of polarization switches formed by placing the ferroelectric thin film between a first gate electrode and a second gate electrode; anda plurality of polarization accumulators formed by placing the ferroelectric thin film between a first electrode plate and a second electrode plate, whereinthe plurality of polarization switches and the plurality of polarization accumulators are arranged alternately.

2. The polarization transfer device according to claim 1, wherein the first gate electrode of the plurality of polarization switches and the first electrode plate of the plurality of polarization accumulators are constituted of a continuous common electrode.

3. The polarization transfer device according to claim 1, wherein the second gate electrode of the plurality of polarization switches and the second electrode plate of the plurality of polarization accumulators are formed in different manufacturing processes.

4. The polarization transfer device according to claim 2, wherein the continuous common electrode is made of platinum.

5. The polarization transfer device according to claim 1, wherein an insulating layer made of paraelectric material is provided between the ferroelectric thin film and the second electrode of the plurality of polarization switches as well as between the ferroelectric thin film and the second electrode plate of the plurality of polarization accumulators.

6. The polarization transfer device according to claim 1, wherein a first insulating layer made of paraelectric material is provided between the ferroelectric thin film and the second electrode of the plurality of polarization switches; a second insulating layer made of paraelectric material is provided between the ferroelectric thin film and the second electrode plate of the plurality of polarization accumulators; and the first insulating layer and the second insulating layer differ in dielectric constant.

7. The polarization transfer device according to claim 5, wherein the paraelectric material of the insulating layer is nickel oxide.

8. The polarization transfer device according to claim 1, wherein the ferroelectric thin film is made of PZTN, PZT, or SBT.

9. A transfer control method for controlling the polarization transfer device according to claim 1, wherein a control voltage applied between the first gate electrode and the second gate electrode of the polarization switches and a control voltage applied between the first electrode plate and the second electrode plate of the polarization accumulators are not higher than coercive voltage of the ferroelectric thin film.

10. A transfer control method for controlling the polarization transfer device according to claim 1, wherein a control signal is given so as to apply a voltage between the first electrode plates and/or between the second electrode plates of adjacent first and second polarization accumulators among the plurality of polarization accumulators in such a way as to attract or repel polarization of signals in a direction of transfer.

11. The polarization transfer device according to claim 2, wherein the second gate electrode of the plurality of polarization switches and the second electrode plate of the plurality of polarization accumulators are formed in different manufacturing processes.

12. A transfer control method for controlling the polarization transfer device according to claim 2, wherein a control voltage applied between the first gate electrode and the second gate electrode of the polarization switches and a control voltage applied between the first electrode plate and the second electrode plate of the polarization accumulators are not higher than coercive voltage of the ferroelectric thin film.

13. A transfer control method for controlling the polarization transfer device according to claim 2, wherein a control signal is given so as to apply a voltage between the first electrode plates and/or between the second electrode plates of adjacent first and second polarization accumulators among the plurality of polarization accumulators in such a way as to attract or repel polarization of signals in a direction of transfer.