The present application is related generally to wire grid polarizers.
Wire grid polarizers may be used for polarizing light, by allowing one polarization of light to pass through the polarizer, and reflecting or absorbing an opposite polarization of light. For simplicity, the polarization that primarily passes through the polarizer will be hereafter referred to as p-polarized light and the polarization that is primarily reflected or absorbed will be hereafter referred to as s-polarized light. Goals of wire grid polarizer design include increasing transmission of p-polarized light, decreasing transmission of s-polarized light, and increasing reflection or absorption of s-polarized light. Different applications have different requirements.
The goals of increasing transmission of p-polarized light and decreasing transmission of s-polarized light are common to most or all applications. There can be a trade-off between these two. In other words, certain designs that may increase transmission of p-polarized light may also undesirably increase transmission of s-polarized light. Other designs that decrease transmission of s-polarized light may also undesirably decrease transmission of p-polarized light.
For some applications, it is desirable to reflect as much s-polarized light as possible. For example, reflected light from a wire grid polarizing beam splitter can effectively utilize both the transmitted p-polarized light and the reflected s-polarized light. It can be important in such designs to increase reflection of s-polarized light without reducing transmission of p-polarized light. Sometimes there is a trade-off in a particular design between increasing transmission of p-polarized light and increasing reflection of s-polarized light.
For other applications, absorption of s-polarized light may be preferred, such as for example if reflection of light can disrupt the image or other intended use. In a transmissive panel image projection system, reflected light may go back into the LCD imager causing image degradation, or stray light can reach the screen, degrading contrast. An ideal selectively absorptive wire grid polarizer will transmit all p-polarized light and selectively absorb all s-polarized light. In reality, some s-polarized light is transmitted and some reflected and some p-polarized light is absorbed and some reflected. Sometimes there is a trade-off in a particular design between increasing transmission of p-polarized light and increasing absorption of s-polarized light.
The effectiveness of a wire grid polarizer can thus be quantified by (1) high transmission of p-polarized light; (2) high contrast; and (3) depending on the design, high absorption or reflection of s-polarized light. Contrast is equal to percent of p-polarized light transmitted (Tp) divided by percent of s-polarized light transmitted (Ts): Contrast=Tp/Ts.
It can be important in wire grid polarizers for infrared, visible, and ultraviolet light to have small wires with small pitch, such as nanometer or micrometer size and pitch, for effective polarization. Typically, a pitch of less than half of the wavelength of light to be polarized is needed for effective polarization. Smaller pitches may improve the contrast. Thus, small pitch can be an important feature of wire grid polarizers. Manufacture of wire grid polarizers with sufficiently small pitch is challenging, and is a goal of research in this field.
Small wires can be damaged by handling and by environmental conditions. Protection of the wires can be important in wire grid polarizers. Durability of wire grid polarizers is thus another important feature. Increasing degrees of freedom of the polarizer can be valuable at allowing a wire grid polarizer to optimize its design for a specific application or wavelength.
For example, see U.S. Pat. No. 5,991,075, U.S. Pat. No. 6,288,840, U.S. Pat. No. 6,665,119, U.S. Pat. No. 7,630,133, U.S. Pat. No. 7,692,860, U.S. Pat. No. 7,800,823, U.S. Pat. No. 7,961,393, and U.S. Pat. No. 8,426,121; U.S. Patent Publication Numbers US 2008/0055723, US 2009/0041971, and US 2009/0053655; U.S. patent application Ser. No. 13/326,566, filed on Dec. 15, 2011; “Application of 100 Å linewidth structures fabricated by shadowing techniques” by D. C. Flanders in J. Vac. Sci. Technol., 19(4), November/December 1981; and “Submicron periodicity gratings as artificial anisotropic dielectrics” by Dale C. Flanders in Appl. Phys. Lett. 42 (6), 15 Mar. 1983, pp. 492-494.
It has been recognized that it would be advantageous to provide a durable wire grid polarizer with high transmission of p-polarized light, high contrast, and/or small pitch. High absorption or high reflection of s-polarized light, depending on the design, can also be important. It has been recognized that it would be advantageous to provide a wire grid polarizer with increased degrees of freedom. The present invention is directed to various embodiments of, and methods of making, wire grid polarizers. Each of the various embodiments or methods may satisfy one or more of these needs.
In one embodiment, the wire grid polarizer can comprise an array of parallel, elongated nano-structures disposed over a surface of a substrate. Each of the nano-structures can include a pair of parallel, elongated wires, each oriented laterally with respect to one another. Each wire of the pair of wires can include a top rib disposed over a bottom rib. There can be a first gap disposed between the pair of wires. The first gap can extend between adjacent top ribs and adjacent bottom ribs. Each of the nano-structures can be separated from an adjacent nano-structure by a second gap disposed between adjacent nanostructures, and thus between adjacent pairs of wires. A first gap width of the first gap can be different than a second gap width of the second gap.
In another embodiment, the wire grid polarizer can comprise an array of parallel, elongated nano-structures disposed over a surface of a substrate. Each of the nano-structures can include a pair of parallel, elongated top ribs, each oriented laterally with respect to one another, and a first gap disposed between the pair of top ribs. Each of the nano-structures can be separated from an adjacent nano-structure by a second gap disposed between adjacent nanostructures, and thus between adjacent pairs of top ribs. There can be a first gap width of the first gap that is different than a second gap width of the second gap.
A method of making a wire grid polarizer can comprise some or all of the following steps:
Many materials used in optical structures absorb some light, reflect some light, and transmit some light. The following definitions are intended to distinguish between materials or structures that are primarily absorptive, primarily reflective, or primarily transmissive.
As illustrated in
The first gap G1 and the second gap G2 can extend from a base 15b of the nanostructures 15 to a top 15t of the nanostructures 15. The base 15b of the nanostructures 15 can substantially terminate in a common plane 15bp. A top 15t of the nanostructures 15 can substantially terminate in a common plane 15tp. A base 12b of the top ribs 12 can substantially terminate in a common plane 12bp and a top 14t of the bottom ribs 14 can also substantially terminate in this common plane 12bp.
As shown in
As illustrated in
Method of Making a Wire Grid Polarizer
A method of making a wire grid polarizer can comprise some or all of the following steps. These steps can be performed in order in the order specified.
For the polarizers described above (10, 20, 30, and 90), a first gap width W1 of the first gap G1 can be different than a second gap width W2 of the second gap G2. Varying the first gap width W1 with respect to the second gap width W2 can affect transmission of p-polarized light (Tp) and transmission of s-polarized light (Ts). The effect of this relationship between the two gaps G is wavelength dependent. Having the ability to adjust one gap width (W1 or W2) with respect to the other gap width (W2 or W1) thus gives a polarizer designer an additional degree of freedom in optimizing wire grid polarizer design, and allows optimization of a polarizer for a specific wavelength or range of wavelengths of light.
There can be many different ratios of the two gap widths, depending on desired wavelength range of use and overall polarizer structure. For example, a ratio of the two gap widths can be from 1.05 to 1.3 in one aspect, from 1.3 to 1.5 in another aspect, from 1.5 to 2.0 in another aspect, greater than 1.15 in another aspect, or greater than 2.0 in another aspect. In other words, a larger of the first gap width W1 or the second gap width W2 divided by a smaller of the first gap width W1 or the second gap width W2 can be greater than or equal to 1.05 and less than or equal to
in one aspect, greater than or equal to 1.3 and less than or equal to 1.5 in another
aspect
greater than or equal to 1.5 and less than or equal to 2.0 in another aspect
greater than 1.15 in another aspect
or greater than 2.0 in another aspect
A difference between the first gap width W1 and the second gap width W2 can be between 5 nanometers and 20 nanometers in one aspect, between 19 nanometers and 40 nanometers, or between 39 nanometers and 100 nanometers in another aspect. A difference between the first gap width W1 and the second gap width W2 can be at least 5 nanometers in one aspect, at least 10 nanometers in another aspect, or at least 25 nanometers in another aspect.
The first gap width W1 can be the same as, or approximately the same as, the support rib width W13. The second gap width W2 can be approximately equal to the support rib gap width WG8 minus two times the wire width W16 (W2=WGs−2*W16). Support rib gap width WGs and support rib width W13 can be controlled by the lithography technique (mask, interference lithography, etc.) used to make the support ribs 13. Wire width W16 can be controlled by the layer of material width W52, which can be determined by the deposition technique used (e.g. ALD or sputter) and duration of application of this layer of material 52.
A width W12 of the top ribs 12 can be the same as or approximately the same as a width W14 of the bottom ribs 14, and this can equal wire width W16. Alternatively, depending on the nature of the etch used to form the bottom ribs 14 while using the top ribs 12 as a mask, and the materials used for the top ribs 12 and the bottom ribs 14, the top rib width W12 can be different from the bottom rib width W14. For example, if the etch has increased isotropic property, and if the bottom ribs 14 etch more easily than the top ribs 12, then these widths can differ from each other. Wire grid performance at the desired wavelength(s) and durability are factors to consider in a determination of whether these widths should be equal or not.
Measurement of width on an actual wire grid polarizer may be less precise than measurement on a drawing because the wires 16 or ribs 12 and 14 can lean to one side and can vary in width from top to bottom. Thus, if there question of where to measure in order to determine if the widths fall within the requirements specified above, then measure at base 12b of the top ribs 12.
At least one of the top ribs 12, the bottom ribs 14, or the second fill material ribs 21r can be absorptive in order to substantially absorb one polarization state of the incoming light. At least one of the top ribs 12, the bottom ribs 14, or the second fill material ribs 21r can be transmissive. At least one of the top ribs 12, the bottom ribs 14, or the second fill material ribs 21r can be reflective in order to substantially polarize incident light. The substrate 11 and/or the second fill material 21 can be transmissive.
U.S. patent application Ser. No. 13/326,566, filed on Dec. 15, 2011, and U.S. Pat. Nos. 7,570,424 and 7,961,393, incorporated herein by reference in their entirety, provide examples of possible substrate materials, dielectric materials including absorptive dielectric materials and transmissive dielectric materials, and reflective materials. The reflective materials can also be made of a semiconductor material doped to achieve a desired level of conductivity, or other types of conductors such as certain forms of carbon.
The wire grid polarizers described herein can be made with a relatively high aspect ratio (top rib thickness divided by top rib width—Th12/W12, bottom rib thickness divided by bottom rib width—Th14/W14, and/or wire thickness divided by wire width—Th16/W16,). A large aspect ratio can be accomplished by formation of relatively tall support ribs 13 in relation to a width W52 of the layer of material 52 (which may approximate eventual top rib width W12) and/or by a deep etch during formation of the bottom ribs 14.
Modeling has shown good polarization characteristics with aspect ratios (of the top ribs 12, the bottom ribs 14, or the wires 16) of between 8 and 60 in one aspect, between 4 and 7 in another aspect, or between 3 and 8 in another aspect, depending on the wavelength for desired polarization and overall wire grid polarizer design. Modeling has shown good polarization characteristics with a wire width W16 of between 5 nm and 20 nm for polarization of some ultraviolet wavelengths. Modeling has shown good polarization characteristics with a top rib thickness Th12 of between 50 nm and 100 nm in one aspect, between 90 nm and 160 nm in another aspect, or between 150 nm and 300 nm in another aspect, depending on the wavelength for desired polarization.
Lithography techniques can limit a possible minimum pitch. Lithography techniques can limit a pitch of the support ribs 13, but two wires 16 can be made for every support rib 13, thus effectively cutting the pitch in half. This small pitch allows for more effective polarization and allows polarization at lower wavelengths.
This claims priority to U.S. Provisional Patent Application No. 61/924,569, filed on Jan. 7, 2014, 61/924,560, filed on Jan. 7, 2014, 61/895,225, filed on Oct. 24, 2013, which are hereby incorporated herein by reference in their entirety.
Number | Name | Date | Kind |
---|---|---|---|
2224214 | Brown | Dec 1940 | A |
2237567 | Land | Apr 1941 | A |
2287598 | Brown | Jun 1942 | A |
2391451 | Fischer | Dec 1945 | A |
2403731 | MacNeille | Jul 1946 | A |
2605352 | Fischer | Jul 1952 | A |
2748659 | Geffcken et al. | Jun 1956 | A |
2813146 | Glenn | Nov 1957 | A |
2815452 | Mertz | Dec 1957 | A |
2887566 | Marks | May 1959 | A |
3046839 | Bird et al. | Jul 1962 | A |
3084590 | Glenn, Jr. | Apr 1963 | A |
3202039 | Lang et al. | Aug 1965 | A |
3213753 | Rogers | Oct 1965 | A |
3235630 | Doherty et al. | Feb 1966 | A |
3291550 | Bird et al. | Dec 1966 | A |
3291871 | Francis | Dec 1966 | A |
3293331 | Doherty | Dec 1966 | A |
3436143 | Garrett | Apr 1969 | A |
3479168 | Bird et al. | Nov 1969 | A |
3536373 | Bird et al. | Oct 1970 | A |
3566099 | Makas | Feb 1971 | A |
3627431 | Komarniski | Dec 1971 | A |
3631288 | Rogers | Dec 1971 | A |
3653741 | Marks | Apr 1972 | A |
3731986 | Fergason | May 1973 | A |
3857627 | Harsch | Dec 1974 | A |
3857628 | Strong | Dec 1974 | A |
3876285 | Schwarzmüller | Apr 1975 | A |
3877789 | Marie | Apr 1975 | A |
3912369 | Kashnow | Oct 1975 | A |
3969545 | Slocum | Jul 1976 | A |
4009933 | Firester | Mar 1977 | A |
4025164 | Doriguzzi et al. | May 1977 | A |
4025688 | Nagy et al. | May 1977 | A |
4049944 | Garvin et al. | Sep 1977 | A |
4068260 | Ohneda et al. | Jan 1978 | A |
4073571 | Grinberg et al. | Feb 1978 | A |
4104598 | Abrams | Aug 1978 | A |
4181756 | Fergason | Jan 1980 | A |
4220705 | Sugibuchi et al. | Sep 1980 | A |
4221464 | Pedinoff et al. | Sep 1980 | A |
4268127 | Oshima et al. | May 1981 | A |
4289381 | Garvin et al. | Sep 1981 | A |
4294119 | Soldner | Oct 1981 | A |
4308079 | Venables et al. | Dec 1981 | A |
4441791 | Hornbeck | Apr 1984 | A |
4456515 | Krueger et al. | Jun 1984 | A |
4466704 | Schuler et al. | Aug 1984 | A |
4492432 | Kaufmann et al. | Jan 1985 | A |
4512638 | Sriram et al. | Apr 1985 | A |
4514479 | Ferrante | Apr 1985 | A |
4515441 | Wentz | May 1985 | A |
4515443 | Bly | May 1985 | A |
4532619 | Sugiyama et al. | Jul 1985 | A |
4560599 | Regen | Dec 1985 | A |
4679910 | Efron et al. | Jul 1987 | A |
4688897 | Grinberg et al. | Aug 1987 | A |
4701028 | Clerc et al. | Oct 1987 | A |
4711530 | Nakanowatari et al. | Dec 1987 | A |
4712881 | Shurtz, II et al. | Dec 1987 | A |
4724436 | Johansen et al. | Feb 1988 | A |
4743092 | Pistor | May 1988 | A |
4743093 | Oinen | May 1988 | A |
4759611 | Downey, Jr. | Jul 1988 | A |
4759612 | Nakatsuka et al. | Jul 1988 | A |
4763972 | Papuchon et al. | Aug 1988 | A |
4795233 | Chang | Jan 1989 | A |
4799776 | Yamazaki et al. | Jan 1989 | A |
4818076 | Heppke et al. | Apr 1989 | A |
4840757 | Blenkhorn | Jun 1989 | A |
4865670 | Marks | Sep 1989 | A |
4870649 | Bobeck et al. | Sep 1989 | A |
4893905 | Efron et al. | Jan 1990 | A |
4895769 | Land et al. | Jan 1990 | A |
4904060 | Grupp | Feb 1990 | A |
4913529 | Goldenberg et al. | Apr 1990 | A |
4915463 | Barbee, Jr. | Apr 1990 | A |
4939526 | Tsuda | Jul 1990 | A |
4946231 | Pistor | Aug 1990 | A |
4966438 | Mouchart et al. | Oct 1990 | A |
4974941 | Gibbons et al. | Dec 1990 | A |
4991937 | Urino | Feb 1991 | A |
5029988 | Urino | Jul 1991 | A |
5039185 | Uchida et al. | Aug 1991 | A |
5061050 | Ogura | Oct 1991 | A |
5087985 | Kitaura et al. | Feb 1992 | A |
5092774 | Milan | Mar 1992 | A |
5113285 | Franklin et al. | May 1992 | A |
5115305 | Baur | May 1992 | A |
5122887 | Mathewson | Jun 1992 | A |
5122907 | Slocum | Jun 1992 | A |
5124841 | Oishi | Jun 1992 | A |
5139340 | Okumura | Aug 1992 | A |
5157526 | Kondo et al. | Oct 1992 | A |
5163877 | Marpert et al. | Nov 1992 | A |
5177635 | Keilmann | Jan 1993 | A |
5196926 | Lee | Mar 1993 | A |
5196953 | Yeh et al. | Mar 1993 | A |
5198921 | Aoshima et al. | Mar 1993 | A |
5204765 | Mitsui et al. | Apr 1993 | A |
5206674 | Puech et al. | Apr 1993 | A |
5216539 | Boher et al. | Jun 1993 | A |
5222907 | Katabuchi et al. | Jun 1993 | A |
5225920 | Kasazumi et al. | Jul 1993 | A |
5235443 | Barnik et al. | Aug 1993 | A |
5235449 | Imazeki et al. | Aug 1993 | A |
5239322 | Takanashi et al. | Aug 1993 | A |
5245471 | Iwatsuka et al. | Sep 1993 | A |
5267029 | Kurematsu | Nov 1993 | A |
5279689 | Shvartsman | Jan 1994 | A |
5295009 | Barnik et al. | Mar 1994 | A |
5298199 | Hirose et al. | Mar 1994 | A |
5305143 | Taga et al. | Apr 1994 | A |
5325218 | Willett et al. | Jun 1994 | A |
5333072 | Willett | Jul 1994 | A |
5349192 | Mackay | Sep 1994 | A |
5357370 | Miyatake et al. | Oct 1994 | A |
5383053 | Hegg et al. | Jan 1995 | A |
5387953 | Minoura et al. | Feb 1995 | A |
5391091 | Nations | Feb 1995 | A |
5401587 | Motohiro et al. | Mar 1995 | A |
5422756 | Weber | Jun 1995 | A |
5430573 | Araujo et al. | Jul 1995 | A |
5436761 | Kamon | Jul 1995 | A |
5455589 | Huguenin et al. | Oct 1995 | A |
5466319 | Zager et al. | Nov 1995 | A |
5477359 | Okazaki | Dec 1995 | A |
5485499 | Pew et al. | Jan 1996 | A |
5486935 | Kalmanash | Jan 1996 | A |
5486949 | Schrenk et al. | Jan 1996 | A |
5490003 | Van Sprang | Feb 1996 | A |
5499126 | Abileah et al. | Mar 1996 | A |
5504603 | Winker et al. | Apr 1996 | A |
5506704 | Broer et al. | Apr 1996 | A |
5508830 | Imoto et al. | Apr 1996 | A |
5510215 | Prince et al. | Apr 1996 | A |
5513023 | Fritz et al. | Apr 1996 | A |
5513035 | Miyatake et al. | Apr 1996 | A |
5517356 | Araujo et al. | May 1996 | A |
5535047 | Hornbeck | Jul 1996 | A |
5548427 | May | Aug 1996 | A |
5555186 | Shioya | Sep 1996 | A |
5557343 | Yamagishi | Sep 1996 | A |
5559634 | Weber | Sep 1996 | A |
5570213 | Ruiz et al. | Oct 1996 | A |
5570215 | Omae et al. | Oct 1996 | A |
5574580 | Ansley | Nov 1996 | A |
5576854 | Schmidt et al. | Nov 1996 | A |
5579138 | Sannohe et al. | Nov 1996 | A |
5594561 | Blanchard | Jan 1997 | A |
5599551 | Kelly | Feb 1997 | A |
5600383 | Hornbeck | Feb 1997 | A |
5602661 | Schadt et al. | Feb 1997 | A |
5609939 | Petersen et al. | Mar 1997 | A |
5612820 | Schrenk et al. | Mar 1997 | A |
5614035 | Nadkarni | Mar 1997 | A |
5619356 | Kozo et al. | Apr 1997 | A |
5620755 | Smith, Jr. et al. | Apr 1997 | A |
5626408 | Heynderickx et al. | May 1997 | A |
5638197 | Gunning, III et al. | Jun 1997 | A |
5652667 | Kurogane | Jul 1997 | A |
5658060 | Dove | Aug 1997 | A |
5686979 | Weber et al. | Nov 1997 | A |
5706063 | Hong | Jan 1998 | A |
5706131 | Ichimura et al. | Jan 1998 | A |
5719695 | Heimbuch | Feb 1998 | A |
5731246 | Bakeman et al. | Mar 1998 | A |
5748368 | Tamada et al. | May 1998 | A |
5748369 | Yokota | May 1998 | A |
5751388 | Larson | May 1998 | A |
5751466 | Dowling et al. | May 1998 | A |
5767827 | Kobayashi et al. | Jun 1998 | A |
5798819 | Hattori et al. | Aug 1998 | A |
5808795 | Shimomura et al. | Sep 1998 | A |
5826959 | Atsuchi | Oct 1998 | A |
5826960 | Gotoh et al. | Oct 1998 | A |
5828489 | Johnson et al. | Oct 1998 | A |
5833360 | Knox et al. | Nov 1998 | A |
5838403 | Jannson et al. | Nov 1998 | A |
5841494 | Hall | Nov 1998 | A |
5844722 | Stephens et al. | Dec 1998 | A |
5864427 | Fukano et al. | Jan 1999 | A |
5886754 | Kuo | Mar 1999 | A |
5890095 | Barbour et al. | Mar 1999 | A |
5898521 | Okada | Apr 1999 | A |
5899551 | Neijzen et al. | May 1999 | A |
5900976 | Handschy et al. | May 1999 | A |
5907427 | Scalora et al. | May 1999 | A |
5912762 | Li et al. | Jun 1999 | A |
5914818 | Tejada et al. | Jun 1999 | A |
5917562 | Woodgate et al. | Jun 1999 | A |
5918961 | Ueda | Jul 1999 | A |
5930050 | Dewald | Jul 1999 | A |
5943171 | Budd et al. | Aug 1999 | A |
5958345 | Turner et al. | Sep 1999 | A |
5965247 | Jonza et al. | Oct 1999 | A |
5969861 | Ueda et al. | Oct 1999 | A |
5973833 | Booth et al. | Oct 1999 | A |
5978056 | Shintani et al. | Nov 1999 | A |
5982541 | Li et al. | Nov 1999 | A |
5986730 | Hansen et al. | Nov 1999 | A |
5991075 | Katsuragawa et al. | Nov 1999 | A |
5991077 | Carlson et al. | Nov 1999 | A |
6005918 | Harris et al. | Dec 1999 | A |
6008871 | Okumura | Dec 1999 | A |
6008951 | Anderson | Dec 1999 | A |
6010121 | Lee | Jan 2000 | A |
6016173 | Crandall | Jan 2000 | A |
6018841 | Kelsay et al. | Feb 2000 | A |
6046851 | Katayama | Apr 2000 | A |
6049428 | Khan et al. | Apr 2000 | A |
6053616 | Fujimori et al. | Apr 2000 | A |
6055103 | Woodgate et al. | Apr 2000 | A |
6055215 | Katsuragawa | Apr 2000 | A |
6056407 | Iinuma et al. | May 2000 | A |
6062694 | Oikawa et al. | May 2000 | A |
6075235 | Chun | Jun 2000 | A |
6081312 | Aminaka et al. | Jun 2000 | A |
6081376 | Hansen et al. | Jun 2000 | A |
6082861 | Dove et al. | Jul 2000 | A |
6089717 | Iwai | Jul 2000 | A |
6096155 | Harden et al. | Aug 2000 | A |
6096375 | Ouderkirk et al. | Aug 2000 | A |
6100928 | Hata | Aug 2000 | A |
6108131 | Hansen et al. | Aug 2000 | A |
6122103 | Perkins et al. | Sep 2000 | A |
6122403 | Rhoads | Sep 2000 | A |
6124971 | Ouderkirk et al. | Sep 2000 | A |
6141075 | Ohmuro et al. | Oct 2000 | A |
6147728 | Okumura et al. | Nov 2000 | A |
6172813 | Tadic-Galeb et al. | Jan 2001 | B1 |
6172816 | Tadic-Galeb et al. | Jan 2001 | B1 |
6181386 | Knox | Jan 2001 | B1 |
6181458 | Brazas, Jr. et al. | Jan 2001 | B1 |
6185041 | TadicGaleb et al. | Feb 2001 | B1 |
6208463 | Hansen et al. | Mar 2001 | B1 |
6215547 | Ramanujan et al. | Apr 2001 | B1 |
6234634 | Hansen et al. | May 2001 | B1 |
6243199 | Hansen et al. | Jun 2001 | B1 |
6247816 | Cipolla et al. | Jun 2001 | B1 |
6249378 | Shimamura et al. | Jun 2001 | B1 |
6250762 | Kuijper | Jun 2001 | B1 |
6251297 | Komura Eiju et al. | Jun 2001 | B1 |
6282025 | Huang et al. | Aug 2001 | B1 |
6288840 | Perkins et al. | Sep 2001 | B1 |
6291797 | Koyama et al. | Sep 2001 | B1 |
6310345 | Pittman et al. | Oct 2001 | B1 |
6339454 | Knox | Jan 2002 | B1 |
6340230 | Bryars et al. | Jan 2002 | B1 |
6345895 | Maki et al. | Feb 2002 | B1 |
6348995 | Hansen et al. | Feb 2002 | B1 |
6375330 | Mihalakis | Apr 2002 | B1 |
6390626 | Knox | May 2002 | B2 |
6398364 | Bryars | Jun 2002 | B1 |
6406151 | Fujimori | Jun 2002 | B1 |
6409525 | Hoelscher et al. | Jun 2002 | B1 |
6411749 | Teng et al. | Jun 2002 | B2 |
6424436 | Yamanaka | Jul 2002 | B1 |
6426837 | Clark et al. | Jul 2002 | B1 |
6447120 | Hansen et al. | Sep 2002 | B1 |
6452724 | Hansen et al. | Sep 2002 | B1 |
6460998 | Watanabe | Oct 2002 | B1 |
6473236 | Tadic-Galeb et al. | Oct 2002 | B2 |
6486997 | Bruzzone et al. | Nov 2002 | B1 |
6490017 | Huang et al. | Dec 2002 | B1 |
6496239 | Seiberle | Dec 2002 | B2 |
6496287 | Seiberle et al. | Dec 2002 | B1 |
6511183 | Shimizu et al. | Jan 2003 | B2 |
6514674 | Iwasaki | Feb 2003 | B1 |
6520645 | Yamamoto et al. | Feb 2003 | B2 |
6532111 | Kurtz et al. | Mar 2003 | B2 |
6547396 | Svardal et al. | Apr 2003 | B1 |
6580471 | Knox | Jun 2003 | B2 |
6583930 | Schrenk et al. | Jun 2003 | B1 |
6585378 | Kurtz et al. | Jul 2003 | B2 |
6624936 | Kotchick et al. | Sep 2003 | B2 |
6643077 | Magarill et al. | Nov 2003 | B2 |
6654168 | Borrelli | Nov 2003 | B1 |
6661475 | Stahl et al. | Dec 2003 | B1 |
6661484 | Iwai et al. | Dec 2003 | B1 |
6665119 | Kurtz et al. | Dec 2003 | B1 |
6666556 | Hansen et al. | Dec 2003 | B2 |
6669343 | Shahzad et al. | Dec 2003 | B2 |
6698891 | Kato | Mar 2004 | B2 |
6704469 | Xie et al. | Mar 2004 | B1 |
6710921 | Hansen et al. | Mar 2004 | B2 |
6713396 | Anthony | Mar 2004 | B2 |
6714350 | Silverstein et al. | Mar 2004 | B2 |
6721096 | Bruzzone et al. | Apr 2004 | B2 |
6739723 | Haven et al. | May 2004 | B1 |
6746122 | Knox | Jun 2004 | B2 |
6764181 | Magarill et al. | Jul 2004 | B2 |
6769779 | Ehrne et al. | Aug 2004 | B1 |
6781640 | Huang | Aug 2004 | B1 |
6785050 | Lines et al. | Aug 2004 | B2 |
6788461 | Kurtz et al. | Sep 2004 | B2 |
6805445 | Silverstein et al. | Oct 2004 | B2 |
6809864 | Martynov et al. | Oct 2004 | B2 |
6809873 | Cobb | Oct 2004 | B2 |
6811274 | Olczak | Nov 2004 | B2 |
6813077 | Borrelli et al. | Nov 2004 | B2 |
6816290 | Mukawa | Nov 2004 | B2 |
6821135 | Martin | Nov 2004 | B1 |
6823093 | Chang et al. | Nov 2004 | B2 |
6829090 | Katsumata et al. | Dec 2004 | B2 |
6844971 | Silverstein et al. | Jan 2005 | B2 |
6846089 | Stevenson et al. | Jan 2005 | B2 |
6859303 | Wang et al. | Feb 2005 | B2 |
6876784 | Nikolov et al. | Apr 2005 | B2 |
6896371 | Shimizu et al. | May 2005 | B2 |
6897926 | Mi et al. | May 2005 | B2 |
6899440 | Bierhuizen | May 2005 | B2 |
6900866 | Kurtz et al. | May 2005 | B2 |
6909473 | Mi et al. | Jun 2005 | B2 |
6920272 | Wang | Jul 2005 | B2 |
6922287 | Wiki et al. | Jul 2005 | B2 |
6926410 | Weber et al. | Aug 2005 | B2 |
6927915 | Nakai | Aug 2005 | B2 |
6934082 | Allen et al. | Aug 2005 | B2 |
6943941 | Flagello et al. | Sep 2005 | B2 |
6947215 | Hoshi | Sep 2005 | B2 |
6954245 | Mi et al. | Oct 2005 | B2 |
6972906 | Hasman et al. | Dec 2005 | B2 |
6976759 | Magarill et al. | Dec 2005 | B2 |
6981771 | Arai et al. | Jan 2006 | B1 |
7009768 | Sakamoto | Mar 2006 | B2 |
7013064 | Wang | Mar 2006 | B2 |
7023512 | Kurtz et al. | Apr 2006 | B2 |
7023602 | Aastuen et al. | Apr 2006 | B2 |
7025464 | Beeson et al. | Apr 2006 | B2 |
7026046 | Edlinger et al. | Apr 2006 | B2 |
7046422 | Kimura et al. | May 2006 | B2 |
7046441 | Huang et al. | May 2006 | B2 |
7046442 | Suganuma | May 2006 | B2 |
7050233 | Nikolov et al. | May 2006 | B2 |
7050234 | Gage et al. | May 2006 | B2 |
7075602 | Sugiura et al. | Jul 2006 | B2 |
7075722 | Nakai | Jul 2006 | B2 |
7085050 | Florence | Aug 2006 | B2 |
7099068 | Wang et al. | Aug 2006 | B2 |
7113335 | Sales | Sep 2006 | B2 |
7116478 | Momoki et al. | Oct 2006 | B2 |
7129183 | Mori et al. | Oct 2006 | B2 |
7131737 | Silverstein et al. | Nov 2006 | B2 |
7142363 | Sato et al. | Nov 2006 | B2 |
7142375 | Nikolov et al. | Nov 2006 | B2 |
7155073 | Momoki et al. | Dec 2006 | B2 |
7158302 | Chiu et al. | Jan 2007 | B2 |
7159987 | Sakata | Jan 2007 | B2 |
7177259 | Nishi et al. | Feb 2007 | B2 |
7184115 | Mi et al. | Feb 2007 | B2 |
7185984 | Akiyama | Mar 2007 | B2 |
7203001 | Deng et al. | Apr 2007 | B2 |
7213920 | Matsui et al. | May 2007 | B2 |
7220371 | Suganuma | May 2007 | B2 |
7221420 | Silverstein et al. | May 2007 | B2 |
7221501 | Flagello et al. | May 2007 | B2 |
7227684 | Wang et al. | Jun 2007 | B2 |
7230766 | Rogers | Jun 2007 | B2 |
7234816 | Bruzzone et al. | Jun 2007 | B2 |
7236655 | Momoki et al. | Jun 2007 | B2 |
7255444 | Nakashima et al. | Aug 2007 | B2 |
7256938 | Barton et al. | Aug 2007 | B2 |
7268946 | Wang | Sep 2007 | B2 |
7297386 | Suzuki et al. | Nov 2007 | B2 |
7298475 | Gandhi et al. | Nov 2007 | B2 |
7306338 | Hansen et al. | Dec 2007 | B2 |
7375887 | Hansen | May 2008 | B2 |
7414784 | Mi et al. | Aug 2008 | B2 |
7466484 | Mi et al. | Dec 2008 | B2 |
7545564 | Wang | Jun 2009 | B2 |
7561332 | Little et al. | Jul 2009 | B2 |
7570424 | Perkins et al. | Aug 2009 | B2 |
7619816 | Deng et al. | Nov 2009 | B2 |
7630133 | Perkins | Dec 2009 | B2 |
7670758 | Wang et al. | Mar 2010 | B2 |
7692860 | Sato et al. | Apr 2010 | B2 |
7722194 | Amako et al. | May 2010 | B2 |
7755718 | Amako et al. | Jul 2010 | B2 |
7789515 | Hansen | Sep 2010 | B2 |
7800823 | Perkins | Sep 2010 | B2 |
7813039 | Perkins et al. | Oct 2010 | B2 |
7944544 | Amako et al. | May 2011 | B2 |
7961393 | Perkins et al. | Jun 2011 | B2 |
8009355 | Nakai | Aug 2011 | B2 |
8027087 | Perkins et al. | Sep 2011 | B2 |
8049841 | Sugita et al. | Nov 2011 | B2 |
8138534 | Adkisson et al. | Mar 2012 | B2 |
8248697 | Kenmochi | Aug 2012 | B2 |
8426121 | Brueck et al. | Apr 2013 | B2 |
8493658 | Nishida et al. | Jul 2013 | B2 |
8506827 | Wu et al. | Aug 2013 | B2 |
8611007 | Davis | Dec 2013 | B2 |
8619215 | Kumai | Dec 2013 | B2 |
8696131 | Sawaki | Apr 2014 | B2 |
8709703 | Deng et al. | Apr 2014 | B2 |
8755113 | Gardner et al. | Jun 2014 | B2 |
8804241 | Wu et al. | Aug 2014 | B2 |
8808972 | Wang et al. | Aug 2014 | B2 |
8913321 | Davis | Dec 2014 | B2 |
9097857 | Hanashima | Aug 2015 | B2 |
20010006421 | Parriaux | Jul 2001 | A1 |
20010053023 | Kameno et al. | Dec 2001 | A1 |
20020003661 | Nakai | Jan 2002 | A1 |
20020015135 | Hansen et al. | Feb 2002 | A1 |
20020040892 | Koyama et al. | Apr 2002 | A1 |
20020122235 | Kurtz et al. | Sep 2002 | A1 |
20020167727 | Hansen et al. | Nov 2002 | A1 |
20020176166 | Schuster | Nov 2002 | A1 |
20020181824 | Huang et al. | Dec 2002 | A1 |
20020191286 | Gale et al. | Dec 2002 | A1 |
20030058408 | Magarill et al. | Mar 2003 | A1 |
20030072079 | Silverstein et al. | Apr 2003 | A1 |
20030081178 | Shimizu et al. | May 2003 | A1 |
20030081179 | Pentico et al. | May 2003 | A1 |
20030112190 | Ballarda et al. | Jun 2003 | A1 |
20030117708 | Kane | Jun 2003 | A1 |
20030142400 | Hansen et al. | Jul 2003 | A1 |
20030156325 | Hoshi | Aug 2003 | A1 |
20030161029 | Kurtz et al. | Aug 2003 | A1 |
20030193652 | Pentico et al. | Oct 2003 | A1 |
20030202157 | Pentico et al. | Oct 2003 | A1 |
20030218722 | Tsao et al. | Nov 2003 | A1 |
20030223118 | Sakamoto | Dec 2003 | A1 |
20030223670 | Nikolov et al. | Dec 2003 | A1 |
20030224116 | Chen et al. | Dec 2003 | A1 |
20030227678 | Lines et al. | Dec 2003 | A1 |
20040008416 | Okuno | Jan 2004 | A1 |
20040042101 | Wang | Mar 2004 | A1 |
20040047039 | Wang et al. | Mar 2004 | A1 |
20040047388 | Wang et al. | Mar 2004 | A1 |
20040051928 | Mi | Mar 2004 | A1 |
20040070829 | Kurtz et al. | Apr 2004 | A1 |
20040071425 | Wang | Apr 2004 | A1 |
20040095637 | Nikolov et al. | May 2004 | A1 |
20040120041 | Silverstein et al. | Jun 2004 | A1 |
20040125449 | Sales | Jul 2004 | A1 |
20040141108 | Tanaka et al. | Jul 2004 | A1 |
20040165126 | Ooi et al. | Aug 2004 | A1 |
20040169924 | Flagello et al. | Sep 2004 | A1 |
20040174596 | Umeki | Sep 2004 | A1 |
20040201889 | Wang et al. | Oct 2004 | A1 |
20040201890 | Crosby | Oct 2004 | A1 |
20040218270 | Wang | Nov 2004 | A1 |
20040227923 | Flagello et al. | Nov 2004 | A1 |
20040227994 | Ma et al. | Nov 2004 | A1 |
20040233362 | Kashima | Nov 2004 | A1 |
20040240777 | Woodgate et al. | Dec 2004 | A1 |
20040258355 | Wang et al. | Dec 2004 | A1 |
20050008839 | Cramer et al. | Jan 2005 | A1 |
20050018308 | Cassarly et al. | Jan 2005 | A1 |
20050045799 | Deng et al. | Mar 2005 | A1 |
20050046941 | Satoh et al. | Mar 2005 | A1 |
20050078374 | Tairo et al. | Apr 2005 | A1 |
20050084613 | Wang et al. | Apr 2005 | A1 |
20050088739 | Chiu et al. | Apr 2005 | A1 |
20050122587 | Ouderkirk et al. | Jun 2005 | A1 |
20050128567 | Wang et al. | Jun 2005 | A1 |
20050128587 | Suganuma | Jun 2005 | A1 |
20050152033 | Kang et al. | Jul 2005 | A1 |
20050179995 | Nikolov et al. | Aug 2005 | A1 |
20050180014 | Nikolov et al. | Aug 2005 | A1 |
20050181128 | Nikolov et al. | Aug 2005 | A1 |
20050190445 | Fukuzaki | Sep 2005 | A1 |
20050195485 | Hirai et al. | Sep 2005 | A1 |
20050201656 | Nikolov et al. | Sep 2005 | A1 |
20050206847 | Hansen et al. | Sep 2005 | A1 |
20050213043 | Nakashima et al. | Sep 2005 | A1 |
20050259324 | Flagello et al. | Nov 2005 | A1 |
20050271091 | Wang | Dec 2005 | A1 |
20050275944 | Wang et al. | Dec 2005 | A1 |
20050277063 | Wang et al. | Dec 2005 | A1 |
20060001969 | Wang et al. | Jan 2006 | A1 |
20060056024 | Ahn et al. | Mar 2006 | A1 |
20060061862 | Mi et al. | Mar 2006 | A1 |
20060072074 | Matsui et al. | Apr 2006 | A1 |
20060072194 | Lee | Apr 2006 | A1 |
20060087602 | Kunisada et al. | Apr 2006 | A1 |
20060092513 | Momoki | May 2006 | A1 |
20060103810 | Ma et al. | May 2006 | A1 |
20060113279 | Little | Jun 2006 | A1 |
20060118514 | Little et al. | Jun 2006 | A1 |
20060119937 | Perkins | Jun 2006 | A1 |
20060127829 | Deng et al. | Jun 2006 | A1 |
20060127830 | Deng et al. | Jun 2006 | A1 |
20060187416 | Ouchi et al. | Aug 2006 | A1 |
20060192960 | Rencs et al. | Aug 2006 | A1 |
20060215263 | Mi et al. | Sep 2006 | A1 |
20060238715 | Hirata et al. | Oct 2006 | A1 |
20060268207 | Tan et al. | Nov 2006 | A1 |
20070146644 | Ma et al. | Jun 2007 | A1 |
20070183035 | Asakawa et al. | Aug 2007 | A1 |
20070195676 | Hendriks et al. | Aug 2007 | A1 |
20070217008 | Wang et al. | Sep 2007 | A1 |
20070223349 | Shimada et al. | Sep 2007 | A1 |
20070242187 | Yamaki et al. | Oct 2007 | A1 |
20070242228 | Chen et al. | Oct 2007 | A1 |
20070242352 | MacMaster | Oct 2007 | A1 |
20070297052 | Wang et al. | Dec 2007 | A1 |
20080018997 | Kawazu | Jan 2008 | A1 |
20080037101 | Jagannathan et al. | Feb 2008 | A1 |
20080038467 | Jagannathan et al. | Feb 2008 | A1 |
20080055549 | Perkins | Mar 2008 | A1 |
20080055719 | Perkins | Mar 2008 | A1 |
20080055720 | Perkins | Mar 2008 | A1 |
20080055721 | Perkins | Mar 2008 | A1 |
20080055722 | Perkins | Mar 2008 | A1 |
20080055723 | Gardner | Mar 2008 | A1 |
20080094547 | Sugita et al. | Apr 2008 | A1 |
20080137188 | Sato et al. | Jun 2008 | A1 |
20080192346 | Kim et al. | Aug 2008 | A1 |
20080316599 | Wang et al. | Dec 2008 | A1 |
20090009865 | Nishida et al. | Jan 2009 | A1 |
20090040607 | Amako et al. | Feb 2009 | A1 |
20090041971 | Wang et al. | Feb 2009 | A1 |
20090052030 | Kaida | Feb 2009 | A1 |
20090053655 | Deng et al. | Feb 2009 | A1 |
20090109377 | Sawaki et al. | Apr 2009 | A1 |
20090231702 | Wu et al. | Sep 2009 | A1 |
20100072170 | Wu | Mar 2010 | A1 |
20100091236 | Matera et al. | Apr 2010 | A1 |
20100103517 | Davis et al. | Apr 2010 | A1 |
20100188747 | Ammako et al. | Jul 2010 | A1 |
20100225832 | Kumai | Sep 2010 | A1 |
20100238555 | Amako et al. | Sep 2010 | A1 |
20100239828 | Cornaby | Sep 2010 | A1 |
20100328767 | Kato | Dec 2010 | A1 |
20100328768 | Lines | Dec 2010 | A1 |
20100328769 | Perkins | Dec 2010 | A1 |
20110037928 | Little | Feb 2011 | A1 |
20110080640 | Kaida et al. | Apr 2011 | A1 |
20110096396 | Kaida et al. | Apr 2011 | A1 |
20110115991 | Sawaki | May 2011 | A1 |
20110235181 | Hayashibe et al. | Sep 2011 | A1 |
20120008205 | Perkins et al. | Jan 2012 | A1 |
20120075699 | Davis et al. | Mar 2012 | A1 |
20120086887 | Lee et al. | Apr 2012 | A1 |
20120105745 | Kumai | May 2012 | A1 |
20120206805 | Meng et al. | Aug 2012 | A1 |
20120250154 | Davis | Oct 2012 | A1 |
20130043956 | Salit et al. | Feb 2013 | A1 |
20130077164 | Davis | Mar 2013 | A1 |
20130128358 | Hanashima | May 2013 | A1 |
20130153534 | Resnick et al. | Jun 2013 | A1 |
20130155516 | Lines et al. | Jun 2013 | A1 |
20130201557 | Davis | Aug 2013 | A1 |
20130250411 | Bangerter et al. | Sep 2013 | A1 |
20130258471 | Davis | Oct 2013 | A1 |
20140300964 | Davis et al. | Oct 2014 | A1 |
20150077851 | Wang et al. | Mar 2015 | A1 |
20150116824 | Wang et al. | Apr 2015 | A1 |
20150131150 | Probst et al. | May 2015 | A1 |
Number | Date | Country |
---|---|---|
1438544 | Aug 2003 | CN |
1692291 | Nov 2005 | CN |
101688939 | Mar 2010 | CN |
3707984 | Sep 1988 | DE |
10327963 | Jan 2005 | DE |
10341596 | Apr 2005 | DE |
102004041222 | Mar 2006 | DE |
300563 | Jan 1989 | EP |
1347315 | Sep 2003 | EP |
2270553 | Jan 2011 | EP |
56156815 | Dec 1981 | JP |
58-042003 | Mar 1983 | JP |
61122626 | Jun 1986 | JP |
1028675 | Jan 1989 | JP |
2308106 | Dec 1990 | JP |
3005706 | Jan 1991 | JP |
H 03084502 | Apr 1991 | JP |
3126910 | May 1991 | JP |
04 366916 | Jun 1991 | JP |
4331913 | Nov 1992 | JP |
5134115 | May 1993 | JP |
5288910 | Nov 1993 | JP |
5341234 | Dec 1993 | JP |
6138413 | May 1994 | JP |
H06-138413 | May 1994 | JP |
06-174907 | Jun 1994 | JP |
6202042 | Jul 1994 | JP |
7005316 | Jan 1995 | JP |
7072428 | Mar 1995 | JP |
7-146469 | Jun 1995 | JP |
07202266 | Aug 1995 | JP |
7294850 | Nov 1995 | JP |
7294851 | Nov 1995 | JP |
7318861 | Dec 1995 | JP |
9015534 | Jan 1997 | JP |
9090122 | Apr 1997 | JP |
9090129 | Apr 1997 | JP |
9178943 | Jul 1997 | JP |
9212896 | Aug 1997 | JP |
9288211 | Nov 1997 | JP |
10-003078 | Jan 1998 | JP |
10073722 | Mar 1998 | JP |
10-153706 | Jun 1998 | JP |
10-260403 | Sep 1998 | JP |
10- 268301 | Oct 1998 | JP |
11-014814 | Jan 1999 | JP |
11-164819 | Mar 1999 | JP |
11064794 | Mar 1999 | JP |
11142650 | May 1999 | JP |
11-174396 | Jul 1999 | JP |
11237507 | Aug 1999 | JP |
11-258603 | Sep 1999 | JP |
11-306581 | Nov 1999 | JP |
2000147487 | May 2000 | JP |
2000284117 | Oct 2000 | JP |
2001074935 | Mar 2001 | JP |
2002116302 | Apr 2002 | JP |
2003207646 | Jul 2003 | JP |
3486334 | Jan 2004 | JP |
2004157159 | Jun 2004 | JP |
2004309903 | Nov 2004 | JP |
2005151154 | Jun 2005 | JP |
2005195824 | Jul 2005 | JP |
2005202104 | Jul 2005 | JP |
2005534981 | Nov 2005 | JP |
2006047813 | Feb 2006 | JP |
2006133402 | May 2006 | JP |
2006201540 | Aug 2006 | JP |
2006330178 | Dec 2006 | JP |
2007058100 | Mar 2007 | JP |
2007101859 | Apr 2007 | JP |
2011248284 | Dec 2011 | JP |
2003-0079268 | Oct 2003 | KR |
10-2003-0090021 | Nov 2003 | KR |
10-2004-0046137 | Jun 2004 | KR |
10-2005-0017871 | Feb 2005 | KR |
10-0707083 | Apr 2007 | KR |
10-2013-0024041 | Mar 2013 | KR |
1283685 | Jan 1987 | SU |
1781659 | Dec 1992 | SU |
200528927 | Jan 2010 | TW |
WO 9615474 | May 1996 | WO |
WO 9959005 | Nov 1999 | WO |
WO 0070386 | Nov 2000 | WO |
WO 0151964 | Jul 2001 | WO |
WO 0221205 | Mar 2002 | WO |
WO 02077588 | Oct 2002 | WO |
03502708 | Jan 2003 | WO |
WO 03069381 | Aug 2003 | WO |
WO 03107046 | Dec 2003 | WO |
WO 2004013684 | Feb 2004 | WO |
WO 2005123277 | Dec 2005 | WO |
WO 2006014408 | Feb 2006 | WO |
WO 2006036546 | Apr 2006 | WO |
WO 2011056496 | May 2011 | WO |
Entry |
---|
Auton et al.; “Grid Polarizers for Use in the Near Infrared.” Infrared Physics, 1972, vol. 12, pp. 95-100. |
Auton; “Infrared Transmission Polarizers by Photolithography.” Applied Optics; Jun. 1967; vol. 6, No. 6, pp. 1023-1027. |
Baur; “A new type of beam splitting polarizer cube.” Meadowlark Optics, 2005, pp. 1-9. |
Bird et al.; “The Wire Grid as a Near-Infrared Polarizer.” J. Op. Soc. Am. vol. 50 No. 9 (1960). |
Brummelaar et al.; “Beam combining optical components,” Chara Technical Report, Jan. 5, 1998, pp. TR61-1 to TR 61-17, No. 61. |
Bruzzone et al.; “High-performance LCoS optical engine using cartesian polarizer technology;” SID 03 Digest, 2003, pp. 1-4. |
Chen et al.; Novel polymer patterns formed by lithographically induced self-assembly (LISA)., American Chemical Society, Jan. 2005, pp. 818-821, vol. 21, No. 3. |
Chen et al.; “Optimum film compensation modes for TN and VA LCDs.” SID 98 Digest, pp. 315-318, 1998. |
Dainty et al.; “Measurements of light scattering by characterized random rough surface.” Waves in Random Media 3 (1991). |
Deguzman et al.; “Stacked subwavelength gratings as circular polarization filters.” Applied Optics, Nov. 1, 2001, pp. 5731-5737, vol. 40, No. 31. |
Deng et al.; “Multiscale structures for polarization control by using imprint and UV lithography.” Proc. of SPIE, 2005, pp. 1-12. vol. 6003. |
Deng et al.; “Wideband antireflective polarizers based on integrated diffractive multilayer microstructures.” Optics Letters, Feb. 1, 2006, pp. 344-346, vol. 31., No. 3. |
DeSanto et al.; “Rough surface scattering.” Waves in Random Media 1 (1991). |
Enger et al.; “Optical elements with ultrahigh spatial-frequency surface corrugations.” Applied Optics 15 Oct. 1983, vol. 22, No. 20 pp. 3220-3228. |
Flanders; “Application of .100 Δ linewidth structures fabricated by shadowing techniques.” J. Vac. Sci. Technol., 19(4), Nov./Dec. 1981. |
Flanders; “Submicron periodicity gratings as artificial anisotropic dielectrics.” Appl. Phys. Lett. 42 (6), Mar. 15, 1983, pp. 492-494. |
Fritsch et al.; “A liquid-crystal phase modulator for large-screen projection.” IEEE, Sep. 1989, pp. 1882-1887, vol. 36, No. 9. |
Glytsis et al.; “High-spatial-frequency binary and multilevel stairstep gratings: polarization-selective mirrors and broadband antireflection surfaces.” Applied Optics Aug. 1, 1992 vol. 31, No. 22 pp. 4459-4470. |
Haggans et al.; “Lamellar gratings as polarization components for specularly reflected beams.” Journal of Modern Optics, 1993, vol. 40, No. 4, pp. 675-686. |
Haisma et al.; “Mold-assisted nanolithography: a process for reliable pattern replication.” Journal Vac. Sci. Technology B, Nov./Dec. 1996, pp. 4124-4128, vol. 14, No. 6. |
Handbook of Optics, 1978, pp. 10-68-10-77. |
Hass et al.; “Sheet Infrared Transmission Polarizers.” Applied Optics Aug. 1965, vol. 4, No. 8 pp. 1027-1031. |
Ho et al.; “The mechanical-optical properties of wire-grid type polarizer in projection display system.” SID 02 Digest, pp. 648-651, 2002. |
Knop; “Reflection Grating Polarizer for the Infrared.” Optics Communications vol. 26, No. 3, Sep. 1978. |
Kostal et al.; “Adding parts for a greater whole.” SPIE's oeMagazine, May 2003, pp. 24-26. |
Kostal et al.; “MEMS Meets Nano-optics The marriage of MEMES and nano-optics promises a new and viable platform for tunable optical filters.” www.fiberoptictechnology.net, Fiber Optic Technology, Nov. 2005, pp. 8-13. |
Kostal; “Nano-optic devices enable integrated fabrication.” www.laserfocuswold.com, Jun. 2004 pp. 155, 157-159. |
Kostal; “Nano-optics: robust, optical devices for demanding applications.” Military & Aerospace Electronics, Jul. 2005, 6 pages. |
Kostal; “Using advanced lithography to pattern nano-optic devices;” NanoTechnology; www.solid-state.com, Sep. 2005, p. 26 and 29. |
Kuta et al.; “Coupled-wave analysis of lamellar metal transmission gratings for the visible and the infrared.” J. Opt. Soc. Am. A/vol. 12, No. 5 /May 1995. |
Li Li et al.; “Visible broadband, wide-angle, thin-film multilayer polarizing beam splitter.” Applied Optics May 1, 1996, vol. 35, No. 13, pp. 2221-2224. |
Lloyd; Manual of Advanced Undergraduate Experiments in Physics, p. 302 (1959). |
Lockbihler et al.; “Diffraction from highly conducting wire gratings of arbitrary cross-section.” Journal of Modern Optics, 1993, vol. 40, No. 7, pp. 1273-1298. |
Lopez et al.; “Wave-plate polarizing beam splitter based on a form-birefringent multilayer grating.” Optics Letters, vol. 23, No. 20, pp. 1627-1629, Oct. 15, 1998. |
Maystre & Dainty; Modern Analysis of Scattering Phenomena Proceeding from International Workshop held at Domaine deTournon, Aix en Provence, France Sep. 5-8, 1990. |
Moshier et al.; “The Corrosion and Passively of Aluminum Exposed to Dilute Sodium Sulfate Solutions.” Corrosion Science vol. 27. No. 8 pp. 785-801; (1987). |
N.M. Ceglio; Invited Review “Revolution in X-Ray Optics.” J. X-Ray Science & Tech. 1; pp. 7-78 (1989). |
Nordin et al.; “Micropolarizer array for infrared imaging polarimetry.” J. Op. Soc. Am. A. vol. 16 No. 5 , May 1999. |
Novak et al.; “Far infrared polarizing grids for use at cryogenic temperatures.” Applied Optics, Aug. 15, 1989/vol. 28, No. 15, pp. 3425-3427. |
Optics 9th Edition, pp. 338-339; (1980). |
PCT Application No. PCT/US2012/043979; Filing date Jun. 25, 2012; Moxtek, Inc. et al.; International Search Report dated Feb. 1, 2013. |
PCT Application No. PCT/US2014/045287; Filing date Jul. 2, 2014; Moxtek, Inc.; International Search Report mailed Nov. 7, 2014. |
PCT Application No. PCT/US2008/055685; Filing date Mar. 3, 2008; Moxtek, Inc. et al.; International Search Report mailed Jun. 27, 2008. |
PCT Application No. PCT/US2014/053083; Filing date Aug. 28, 2014; Moxtek, Inc.; International Search Report mailed Dec. 8, 2014. |
PCT Application No. PCT/US2014/053161; Filing date Aug. 28, 2014; Moxtek, Inc.; International Search Report mailed Dec. 8, 2014. |
PCT Application No. PCT/US2014/053216; Filing date Aug. 28, 2014; Moxtek, Inc.; International Search Report mailed Dec. 8, 2014. |
Pentico et al.; “New, High Performance, Durable Polarizers for Projection Displays.” SID 01 Digest, 2001, pp. 1287-1289. |
Richter et al.; “Design considerations of form birefringent microstructures.” Applied Optics, vol. 34, No. 14, pp. 2421-2429, May 10, 1995. |
Robinson et al.; “Wide Field of View Compensation Scheme for Cube Polarizing Beam Splitters.” SID 03 Digest, pp. 1-4, www.colorlink.com. |
Savas et al.; “Achromatic interferometric lithography for 100-nm-period gratings and grids.” Journal Vac. Sci. Technology B, Nov./Dec. 1995, pp. 2732-2735, vol. 13, No. 6. |
Scandurra et al.; “Corrosion Inhibition of Al Metal in Microelectronic Devices Assemble in Plastic Packages.” Journal of the Electrochemical Society, 148 (8) B289-B292 (2001). |
Sonek et al.; “Ultraviolet grating polarizers.” J. Vac. Sci. Technol., 19(4), Nov./Dec. 1981, pp. 921-923. |
Sze; VLSI Technology; 1988; pp. 198-199; 2nd Edition; McGraw-Hill Publishing Company. |
Takano et al.; “Cube polarizers by the use of metal particles in anodic alumina films.” Applied Optics, vol. 33, No. 16, 3507-3512, Jun. 1, 1994. |
Tyan et al.; “Polarizing beam splitter based on the anisotropic spectral reflectivity characteristic of form-birefringent multilayer gratings.” Optics Letters, May 15, 1996, pp. 761-763, vol. 21, No. 10. |
Tyan et al.; “Design, fabrication, and characterization of form-birefringent multilayer polarizing beam splitter.” Optical Society of America, vol. 14, No. 7, pp. 1627-1636, Jul. 1997. |
U.S. Appl. No. 13/937,433, filed Jul. 9, 2013; Paul Steven Mills. |
Wang et al.; “Diffractive optics: nanoimprint lithography enables fabrication of subwavelength optics.” LaserFocusWorld, http://lfw.pennnet.com/Articles/Article—Dispaly.cf . . . Apr. 19, 2006, 6 pages. |
Wang et al.; “Fabrication of a new broadband waveguide polarizer with a double-layer 190 nm period metal-gratings using nanoimprint lithography.” Journal Vac. Sci. Technology B, Nov./Dec. 1999, pp. 2957-2960, vol. 17, No. 6. |
Wang et al.; “High-performance large-area ultra-broadband (UV to IR) nanowire-grid polarizers and polarizing beam-splitters.” Proc. of SPIE 2005, pp. 1-12, vol. 5931. |
Wang et al.; “High-performance nanowire-grid polarizers” Optical Society of America. 2005, pp. 195-197, vol. 30, No. 2. |
Wang et al.; “Monolithically integrated isolators based on nanowire-grid polarizers.” IEEE, Photonics Technology Letters, Feb. 2005, pp. 396-398, vol. 17, No. 2. |
Wang, et al.; “Innovative High-Performance Nanowire-Grid Polarizers and integrated Isolators,” IEEE Journal of Selected Topics in Quantum Electronics, pp. 241-253, vol. 11 No. 1 Jan./Feb. 2005. |
Wang et al.; “Free-Space nano-optical devices and integration: design, fabrication, and manufacturing.” Bell Labs Technical Journal, 2005 pp. 107-127, vol. 10, No. 3. |
Whitbourn et al.; “Phase shifts in transmission line models of thin periodic metal grids.” Applied Optics Aug. 15, 1989 vol. 28, No. 15, pp. 3511-3515. |
Zhang et al.; “A broad-angle polarization beam splitter based on a simple dielectric periodic structure.” Optics Express, Oct. 29, 2007, 6 pages, vol. 15, No. 22. |
Number | Date | Country | |
---|---|---|---|
20150116825 A1 | Apr 2015 | US |
Number | Date | Country | |
---|---|---|---|
61924569 | Jan 2014 | US | |
61924560 | Jan 2014 | US | |
61895225 | Oct 2013 | US |