Polarizing beam splitter

Information

  • Patent Application
  • 20050024725
  • Publication Number
    20050024725
  • Date Filed
    July 29, 2004
    20 years ago
  • Date Published
    February 03, 2005
    19 years ago
Abstract
The present invention relates to a polarizing beam splitter comprised of a film made of a high-refractivity material and a film made of a low-refractivity material alternately stacked on a substrate. When an incidence angle with respect to a film surface in a particular wavelength is set to be θ (°), conditional expressions: 0.99≦Rs(45)/Rs(θ)≦1.04, 0.96≦Tp(45)/Tp(θ)≦1.05 {Rs(θ): reflectivity of polarized light s at an incidence angle of θ, Tp(θ): transmissivity of polarized light p at an incidence angle of θ, Rs(45): reflectivity of polarized light s at the incidence angle of 45°, Tp(45): transmissivity of polarized light p at the incidence angle of 45°} are satisfied in an entire range of 40≦θ≦50 (°). According to the configuration, the transmissivity of the polarized light p can be prevented from decreasing while maintaining the reflectivity of the polarized light s at nearly 100% with respect to even a broad angle region, where a divergence angle of an incident light is ±5° or above.
Description

The present application claims priority to Japanese Patent Application No. 2003-284722 filed Aug. 1, 2003, the entire content of which is hereby incorporated by reference.


BACKGROUND OF THE INVENTION

1. Field of the Invention


The present invention relates to a polarizing beam splitter, more particularly to a polarizing beam splitter capable of a high-level performance suitable for, for example, a light pickup optical system using blue laser, a projection optical system, or the like, and a polarizing, beam splitter film as a component thereof.


2. Description of the Related Art


In a light pickup optical system for a blue region requires a polarizing beam splitter having such polarization separation characteristics that a transmissivity of a polarized light p and a reflectivity of a polarized light s in a wavelength region of around 405 nm both mark nearly 100%. Currently, however, a divergence angle of blue laser is significantly large. Therefore, when an ordinary polarizing beam splitter film is used, the transmissivity of the polarized light p is largely decreased due to a variation of an incidence angle.


Japanese Unexamined Patent Publication Nos. 08-146218 and 09-184916 disclose, in order to solve such a problem, polarizing beam splitters having predetermined polarization separation characteristics with respect to even a broad angle region, where a divergence angle of an incident light is ±5° or above. For example, a polarizing beam splitter film disclosed in No. 09-184916 comprises, when a central wavelength of a split light is λ, an optical film thickness of a film made of a high-refractivity material is H, and an optical film thickness of a film made of a low-refractivity material is L, a first stack constituting 0.8×λ/4≦H≦1×λ/4 and 0.7×λ/4≦L≦1×λ/4, and a second stack constituting 1.3×λ/4≦H≦1.5×λ/4 and 1.2×λ/4≦L≦1.5×λ/4.


However, in the case of polarizing beam splitter films disclosed in No. 08-146218 and No. 9-184916, an angle dependency of the polarized light s can only be controlled at approximately 20% in terms of the transmissivity, which shows insufficient polarization separation characteristics thereof. Therefore, when the polarizing beam splitter film is used in the light pickup optical system using the blue laser, projection optical system, or the like, such a problem as an decreased quantity of light is generated.


SUMMARY OF THE INVENTION

A main object of the present invention is to provide a polarizing beam splitter and a polarizing beam splitter film capable of preventing a transmissivity of a polarized light p from decreasing while maintaining a reflectivity of a polarized light s at nearly 100% with respect to even a broad angle region, where a divergence angle of an incident light is ±5° or above.


In order to achieve the foregoing object and other objects as well, in an stage of the present invention, a polarizing beam splitter having a multilayer structure, wherein a film made of a high-refractivity material and a film made of a low-refractivity are alternately stacked on a substrate, satisfies the following conditional expressions 1A and 1B in an entire range of 40≦θ≦50 (°) when an incidence angle with respect to a film surface in a particular wavelength is set to be θ (°).

0.99≦Rs(45)/Rs(θ)≦1.04  1A
0.96≦Tp(45)/Tp(θ)≦1.05  1B

    • providing that,


Rs(θ): reflectivity of polarized light s at an incidence angle of θ


Tp(θ): transmissivity of polarized light p at an incidence angle of θ


Rs(45): reflectivity of polarized light s at the incidence angle of 45°.


Tp(45): transmissivity of polarized light p at the incidence angle of 45°.


The invention itself, together with further objects and attendant advantages, will best be understood by reference to the following detailed description taken in conjunction with the accompanying drawings.




BRIEF DESCRIPTION OF THE DRAWINGS


FIG. 1 is a graph showing a spectral characteristic with respect to an incidence angle according to an embodiment 1 of the present invention;



FIG. 2 is a graph showing a spectral characteristic with respect to a wavelength according to the embodiment 1;



FIG. 3 is a graph showing a spectral characteristic with respect to an incidence angle according to an embodiment 2 of the present invention; and



FIG. 4 is a graph showing a spectral characteristic with respect to a wavelength according to the embodiment 2.




In the following description, like components are designated by like reference numbers throughout the several drawings.


DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Hereinafter, a polarizing beam splitter and a polarizing beam splitter film executed by the present invention are described referring to the drawings. Tables 1 and 2 respectively show multilayer films according to embodiments 1 and 2 (QWOT=4·n·d/λ, d: physical film thickness, n: refractivity, λ: wavelength) as the polarizing beam splitter film according to the present invention. In the embodiment 1, a film made of a high-refractivity material: TiO2 (titanium oxide) and a film made of a low-refractivity material: SiO2 (silicon oxide) are alternately stacked to thereby form 33 layers on a glass substrate having the refractivity of 1.64 in the order of layer numbers. In the embodiment 2, a film made of a blended material TX including a high-refractivity material: TiO2 (titanium oxide) and a film made of a low-refractivity material: MgF2 (magnesium fluoride) or SiO2 (silicon oxide) are alternately stacked to thereby form 25 layers on a glass substrate having the reflectivity of 1.64 in the order of the layer numbers.


In the case of the polarizing beam splitter film comprised of the film made of the high-refractivity material and the film made of the low-refractivity material alternately stacked as in the embodiments 1 and 2, it is preferable to satisfy the following conditional expressions 1A and 1B in an entire range of 40≦θ≦50 (°) when an incidence angle with respect to a film surface in a particular wavelength is set to be θ (°).

0.99≦Rs(45)/Rs(θ)≦1.04  1A
0.96≦Tp(45)/Tp(θ)≦1.05  1B

    • providing that,


Rs(θ): reflectivity of polarized light s at an incidence angle of θ


Tp(θ): transmissivity of polarized light p at an incidence angle of θ


Rs(45): reflectivity of polarized light s at the incidence angle of 45°


Tp(45): transmissivity of polarized light p at the incidence angle of 45°


Tables 3 and 4 show data according to respective embodiments in the case of wavelength λ=405 nm and 40≦θ≦50 (°): reflectivity Rs (θ) of polarized light s and transmissivity Tp (θ) of polarized light p, and data corresponding to parameters regulated in the conditional expressions 1A and 1B. As learnt from the tables 3 and 4, the embodiments 1 and 2 satisfy the conditional expressions 1A and 1B in the entire range of 40≦θ≦50 (°). Thus, when the conditional expressions 1A and 1B are satisfied in the entire range of 40≦θ≦50 (°), the transmissivity of the polarized light p can be prevented from decreasing while maintaining the reflectivity of the polarized light s at nearly 100% with respect to even a broad angle region, where a divergence angle of an incident light is ±5° or above.


As described, in order to satisfy the conditional expressions 1A and 1B in the entire range of 40≦θ≦50 (°), it is preferable to have at least a stack comprised of a film made of a high-refractivity material satisfying the following conditional expression 2A and a film made of a low-refractivity material satisfying the following conditional expression 2B alternately stacked in two or more repetitive cycles, providing that a pair of a layer of the film made of the high-refractivity material and a layer of the film made of the low-refractivity material constitutes a cycle.

0.7×λ/4≦H≦1×λ/4  2A
1×λ/4≦L≦2×λ/4  2B


providing that,


H: optical film thickness of film made of high-refractivity material


L: optical film thickness of film made of low-refractivity material


λ: central wavelength of split light


In the embodiment 1, a multilayer structure comprised of layers from a 16th layer through a 27th layer (layer No. 16-27) constitutes a stack. The stack is comprised of a film made of TiO2 satisfying the conditional expression 2A and a film made of SiO2 satisfying the conditional expression 2B alternately stacked in six repetitive cycles. In the embodiment 2, a multilayer structure comprised of layers from a 3rd layer through a 14th layer (layer No. 3-14) constitutes a stack. The stack is comprised of a film made of TX satisfying the conditional expression 2A and a film made of SiO2 or MgF2 satisfying the conditional expression 2B alternately stacked in six repetitive cycles. The adoption of such a configuration having a discriminative stack is capable of arranging an angle dependency of the polarized light s to invariably lead to the transmissivity of approximately 0%. Therefore, in an optical system, in which the polarized lights p and s are required to be sufficiently polarized and separated despite the divergence angle of the incident light being large (for example, light pickup optical system using blue laser, projection optical system, or the like), a quantity of light and optical performance can be dramatically improved.



FIGS. 1 and 2 show the polarization separation characteristics according to the embodiment 1 by means of the transmissivity T (%). FIG. 1 shows Tp (θ) , which is the transmissivity of the polarized light p, and Ts (θ), which is the transmissivity of the polarized light s in the case of the wavelength λ=405 nm and the incidence angle with respect to the film surface θ=40-50°. FIG. 2 shows Tp (θ), which is the transmissivity of the polarized light p, and Ts (θ), which is the transmissivity of the polarized light s in the case of the wavelength λ=300-500 nm and the incidence angle with respect to the film surface θ=40°, 45°, and 50°. FIGS. 3 and 4 show the polarization separation characteristics according to the embodiment 2 by means of the transmissivity T (%). FIG. 3 shows Tp (θ), which is the transmissivity of the polarized light p, and Ts (θ), which is the transmissivity of the polarized light s in the case of the wavelength λ=405 nm and the incidence angle with respect to the film surface θ=40-50°. FIG. 4 shows Tp (θ), which is the transmissivity of the polarized light p, and Ts (θ), which is the transmissivity of the polarized light s in the case of the wavelength λ=300-500 nm and the incidence angle with respect to the film surface θ=40°, 45°, and 50°. As learnt from FIGS. 1 through 4, any of the embodiments comprises the polarization separation characteristics suitable for the polarizing beam splitter for blue laser.

TABLE 1Example 1Physical filmLayerthicknessQWOTNo.Materiald (nm)(4 · n · d/λ)1SiO2131.171.9002TiO277.411.9243SiO2122.381.7734TiO258.061.4435SiO2129.011.8696TiO266.921.6637SiO2110.941.6078TiO255.711.3859SiO2110.131.59510TiO265.61.63111SiO2140.192.03112TiO262.11.54313SiO295.961.39014TiO234.820.86515SiO265.770.95316TiO232.510.80817SiO278.931.14318TiO239.280.97619SiO287.411.26620TiO237.040.92121SiO282.481.19522TiO232.380.80523SiO284.141.21924TiO234.710.86325SiO288.871.28726TiO235.270.87727SiO279.751.15528TiO231.220.77629SiO2280.414.06230TiO231.470.78231SiO289.891.30232TiO295.962.38533SiO269.041.000









TABLE 2










Example 2














Physical film




Layer

thickness
QWOT



No.
Material
d (nm)
(4 · n · d/λ)
















1
TX
169.7
3.555



2
MgF2
263.76
3.608



3
TX
38.96
0.816



4
SiO2
94.45
1.368



5
TX
40.59
0.851



6
MgF2
106.31
1.454



7
TX
42.69
0.894



8
SiO2
97.01
1.405



9
TX
39.52
0.828



10
SiO2
87.8
1.272



11
TX
39.26
0.823



12
MgF2
103.89
1.421



13
TX
39.6
0.830



14
SiO2
107.87
1.563



15
TX
60.45
1.266



16
MgF2
179.6
2.457



17
TX
20.82
0.436



18
SiO2
195.14
2.827



19
TX
18.29
0.383



20
MgF2
177.36
2.426



21
TX
58.69
1.230



22
SiO2
122.25
1.771



23
TX
53.07
1.112



24
SiO2
364.74
5.283



25
TX
74.08
1.552

















TABLE 3










Example 1











θ






(°)
Rs (θ)
Tp (θ)
(1A): Rs(45)/Rs(θ)
(1B): Tp(45)/Tp(θ)














40
99.954
98.921
1.000
1.008


41
99.974
99.475
1.000
1.002


42
99.989
99.928
1.000
0.997


43
99.995
99.397
1.000
1.003


44
99.997
99.102
1.000
1.006


45
99.998
99.668
1.000
1.000


46
99.999
99.634
1.000
1.000


47
100.000
99.337
1.000
1.003


48
100.000
99.876
1.000
0.998


49
100.000
99.306
1.000
1.004


50
100.000
98.746
1.000
1.009
















TABLE 4










Example 1











θ






(°)
Rs (θ)
Tp (θ)
(1A): Rs(45)/Rs(θ)
(1B): Tp(45)/Tp(θ)














40
99.954
98.921
1.000
1.008


41
99.974
99.475
1.000
1.002


42
99.989
99.928
1.000
0.997


43
99.995
99.397
1.000
1.003


44
99.997
99.102
1.000
1.006


45
99.998
99.668
1.000
1.000


46
99.999
99.634
1.000
1.000


47
100.000
99.337
1.000
1.003


48
100.000
99.876
1.000
0.998


49
100.000
99.306
1.000
1.004


50
100.000
98.746
1.000
1.009









Although the present invention has been fully described by way of examples with reference to the accompanying drawings, it is to be noted that various changes and modifications will be apparent to those skilled in the art. Therefore, unless such changes and modifications depart from the scope of the present invention, they should be construed as being included therein.

Claims
  • 1. A polarizing beam splitter having a multilayer structure comprised of a film made of a high-refractivity material and a film made of a low-refractivity material alternately stacked on a substrate, wherein the following conditional expressions 1A and 1B are satisfied in an entire range of 40≦0≦50 (°) when an incidence angle with respect to a film surface in a particular wavelength is set to be θ (°)
  • 2. A polarizing beam splitter as claimed in claim 1, the polarizing beam splitter having at least a stack comprised of a film made of a high-refractivity material satisfying the following conditional expression 2A and a film made of a low-refractivity material satisfying the following conditional expression 2B alternately stacked in at least two repetitive cycles.
  • 3. A polarizing beam splitter film having a multilayer structure comprised of a film made of a high-refractivity material and a film made of a low-refractivity material alternately stacked on a substrate, wherein the following conditional expressions 1A and 1B are satisfied in an entire range of 40≦θ≦50 (°) when an incidence angle with respect to a film surface in a particular wavelength is set to be θ (°).
  • 4. A polarizing beam splitter as claimed in claim 3, the polarizing beam splitter having at least a stack comprised of a film made of a high-refractivity material satisfying the following conditional expression 2A and a film made of a low-refractivity material satisfying the following conditional expression 2B alternately stacked in at least two repetitive cycles. 0.7×λ/4≦H≦1×λ/4  2A1×λ/4≦L≦2×λ/4  2Bproviding that, H: optical film thickness of film made of high-refractivity material L: optical film thickness of film made of low-refractivity material λ: central wavelength of split light
Priority Claims (1)
Number Date Country Kind
2003-284722 Aug 2003 JP national