Polishing pad for substrate polishing apparatus

Information

  • Patent Grant
  • D731448
  • Patent Number
    D731,448
  • Date Filed
    Monday, April 28, 2014
    10 years ago
  • Date Issued
    Tuesday, June 9, 2015
    9 years ago
  • US Classifications
    Field of Search
    • US
    • D13 182
    • 257 E21001
    • 257 E21002
    • 257 E21210
    • 257 E21230
    • 361 230000
    • 361 233000
    • 361 234000
    • 451 064000
    • 451 065000
    • 451 066000
    • 451 067000
    • 451 072000
    • 451 259000
    • 451 278000
    • 451 285000
    • 451 286000
    • 451 287000
    • 451 288000
    • 451 290000
  • International Classifications
    • 1303
    • Term of Grant
      14Years
Abstract
Description


FIG. 1 is a top plan view of a first embodiment of a polishing pad for substrate polishing apparatus, showing our new design;



FIG. 2 is a bottom plan view thereof;



FIG. 3 is a front view thereof, the rear view being identical;



FIG. 4 is a right side view thereof, the left side view being identical;



FIG. 5 is an enlarged, top plan view thereof, taken along lines 5-5 of FIG. 1;



FIG. 6 is an enlarged, cross-sectional view thereof, taken along lines 6-6 of FIG. 5;



FIG. 7 is a top plan view of a second embodiment of a polishing pad for substrate polishing apparatus, showing our new design;



FIG. 8 is a bottom plan view thereof;



FIG. 9 is a front view thereof, the rear view being identical;



FIG. 10 is a right side view thereof, the left view being identical;



FIG. 11 is an enlarged, partial top plan view thereof, taken along lines 11-11 of FIG. 7; and,



FIG. 12 is an enlarged, cross-sectional view thereof, taken along lines 12-12 of FIG. 11.


The dashed-dot-dashed lines represent the boundary lines of the claimed design. The even dashed broken lines depict environment subject matter only and form no part of the claimed design.


Claims
  • The ornamental design for a polishing pad for substrate polishing apparatus, as shown and described.
Priority Claims (2)
Number Date Country Kind
2013-025148 Oct 2013 JP national
2013-025149 Oct 2013 JP national
US Referenced Citations (13)
Number Name Date Kind
5284659 Cherukuri et al. Feb 1994 A
5431918 Ferrero et al. Jul 1995 A
7109068 Akram et al. Sep 2006 B2
D560810 Hennessy Jan 2008 S
7572173 Huang et al. Aug 2009 B2
7799618 Kawase et al. Sep 2010 B2
D649126 Takahashi Nov 2011 S
D684551 Nguyen Jun 2013 S
D702655 Kimura Apr 2014 S
20020160693 Nihonmatsu et al. Oct 2002 A1
20050095963 Stark et al. May 2005 A1
20060079160 Balagani et al. Apr 2006 A1
20120164917 Kobata et al. Jun 2012 A1
Foreign Referenced Citations (2)
Number Date Country
1334824 May 2008 JP
1396602 May 2013 TW