Claims
- 1. A polishing apparatus comprising:
- a base;
- a nut rotatably mounted to said base;
- an elongated shaft having a forward end and a rearward end, extending through said nut, and being fixed for rotation with said nut;
- a rotary drive unit operably connected to said nut to rotate said nut relative to said base;
- a polishing tool fixedly secured to said forward end of said shaft, said polishing tool comprising a casing having a chamber defined therein adapted to receive pressurized fluid, and a flexible elastic polishing sheet fixedly secured to said casing to close a forward end of said chamber;
- biasing means for biasing said shaft forwardly relative to said base in order to press said elastic polishing sheet against a workpiece under a constant pressure; and
- pressurized fluid supply means for supplying pressurized fluid to said chamber to cause expansion of said flexible elastic polishing sheet while allowing inward flexion of portions of said polishing sheet to accommodate an aspheric shape of the workpiece.
- 2. A polishing apparatus as recited in claim 1, wherein
- said pressurized fluid supply means includes a bore formed axially through said elongated shaft and opening into said chamber.
- 3. A polishing apparatus as recited in claim 2, wherein
- said pressurized fluid supply means further includes a fluid source, and a fluid line connecting said fluid source to said bore; and
- a rotary joint is provided to allow rotation of said elongated shaft relative to said fluid line.
- 4. A polishing apparatus as recited in claim 1, wherein
- said elongated shaft comprises a spline shaft.
- 5. A polishing apparatus as recited in claim 1, further comprising
- a main body; and
- means for axially displacing said elongated shaft relative to said main body.
- 6. A polishing apparatus as recited in claim 1, further comprising
- pressure detecting means for detecting a reduction in pressure of the pressurized fluid fed to said chamber of said polishing tool.
- 7. A polishing apparatus as recited in claim 1, wherein said polishing tool is secured to said elongated shaft in an airtight manner.
Priority Claims (1)
Number |
Date |
Country |
Kind |
2-208600 |
Aug 1990 |
JPX |
|
Parent Case Info
This application is a continuation of now abandoned application Ser. No. 07/740,614, filed Aug. 5, 1991.
US Referenced Citations (6)
Continuations (1)
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Number |
Date |
Country |
Parent |
740614 |
Aug 1991 |
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