Polishing tape and polishing device using same

Abstract

A polishing device has a reel core around which a polishing tape is wound and a reel plate with flanges that engage with the polishing tape and sandwich it from both sides. A memory element with data on the polishing tape is provided to the reel core such that errors caused by using a wrong kind of polishing tape can be obviated.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic view of a polishing device embodying this invention.

FIG. 2 is an exploded diagonal view of an example of polishing tape containing an IC chip of this invention.

DETAILED DESCRIPTION OF THE INVENTION

The invention is described next with reference to the drawings. FIG. 1 shows an example of polishing device 1 embodying this invention, comprising a horizontal table plate 2 and a moving device 3 set thereon for moving a target object W to be polished in an up-down direction, rotating it and moving it horizontally.

A polishing head 5 is provided to a front plate 4 which is perpendicularly attached to the table plate 2. If necessary, a pipe for supplying water to be used for the polishing and a pipe for supplying the agents necessary for the chemical-mechanical polishing may be set on this front plate 4.

A supply roller 10 for supplying a polishing tape T and a wind-up roller 11 for winding up the polishing tape T are set on a plate disposed on one side of the table plate 2. In addition, feed rollers 12 and auxiliary rollers 13 are provided. The feed rollers 12 are for feeding the polishing tape T at a constant speed, and the auxiliary rollers 13 are for preventing the polishing tape T from experiencing any needlessly large stress as the polishing head 5 undergoes an oscillating (reciprocating) motion.

FIG. 2 is an exploded diagonal view of the supply roller 10 for supplying the polishing tape T, including a reel core 20 around which the polishing tape T is wound and reel plates 21 and 22 which sandwich the reel core 20 from both sides to thereby hold it. The reel plates 21 and 22 are provided with flanges 23 and 23′ engaging with the reel core 20. The reel plates 21 and 22, the real core 20 and the flanges 23 and 23′ are disposed coaxially with the axial line X and are fastened by means of a reel attaching knob 29.

According to a preferred embodiment of the invention, a memory element 24 such as an IC chip is embedded in the reel core 20. The IC chip 24 has recorded thereon as electronic data information useful for identifying polishing tapes such as their kinds, production histories and quality records, as well as for quality control such that a defective polishing tape can be quickly identified in the case of occurrence of defective polishing of a target object. The IC chip 24 may be preferably placed on the inner side of the reel core 20 at a peripheral portion.

An ID data reading part 25 and a protrusion are provided on the outer peripheral surface of the flange 23, and a small fine groove 26 is formed near the inner peripheral edge part of the reel core 20 along the direction of the axial line X. As the reel core 20 engages with the flange 23, the fine groove 26 engages with the protrusion 26 such that the IC chip 24 is properly positioned with respect to the IC data reading part 25.

There is also a slip ring 28 provided on the axial line X for transmitting signal data from the IC chip 24 to a control device (not shown) provided, for example, with a programmable control circuit and a memory for storing polishing conditions for target objects. Such a control device may be provided additionally with an external memory for storing the data on the IC chip such as the kinds of polishing tapes (such as the kinds of the abrading particles, their grain diameters, surface roughness, as well as mechanical characteristics and physical values including the binder and the base film), lot numbers, and production records such as the production dates. The control device may be further adapted to optimize the conditions for the polishing operation from the results of a polishing operation after a target object has been polished such that the setting of polishing conditions may be sequentially updated. Moreover, polishing conditions other than those preliminarily set may be manually inputted. In such a case, a warning lamp may be caused to blink so as to output a warning, if the inputted value exceeds a certain threshold value. The control circuit may include electric circuits of all kinds and may be formed with a single circuit or a plurality of circuits.

Next, a method of identifying polishing tapes will be explained.

Firstly, the operator sets polishing conditions either manually or by making a selection from a menu of the control device according to the target object to be polished such that these polishing conditions are loaded in the memory of the control device. Next, as the operator attaches the reel core 20 of the polishing tape T, the data stored on the IC chip 24 are read out by the IC data reading part 25 and transmitted through the slip ring 28 to the control device. The control device compares the polishing conditions loaded in the memory and the data transmitted from the IC chip 24. If they are found to match as a result of the comparison, the polishing device 1 enters an operating condition. If they do not match, the polishing device 1 is not activated.

In summary, errors in exchanging polishing tapes can be obviated by embedding an IC chip in the reel core of each polishing tape. Since the history of each polishing tape is recorded, it becomes possible to identify a defective tape. Thus, this invention has the merit of reducing defective polishing.

Claims

1. A polishing device for using polishing tapes to polish a target object, said polishing device comprising: a reel core for winding a polishing tape around;a reel plate having flanges that engage with said polishing tape and sandwich said polishing tape from both sides; anda memory element that stores data on said polishing tape, said memory element being provided to said reel core.

2. The polishing device of claim 1 wherein said memory element is disposed near a peripheral edge portion of said reel core.

3. The polishing device of claim 1 wherein said data include data for identifying polishing tapes and also for quality control of said polishing tapes.

4. The polishing device of claim 1 wherein said data include at least one selected from the group consisting of the kind, production record and quality record of said polishing tape.

5. The polishing device of claim 1 further comprising a data reading part for said memory element, said data reading part being provided on an outer peripheral surface of said flange.

6. The polishing device of claim 1 further comprising a control device.

7. The polishing device of claim 6 wherein said control device includes a memory that stores polishing condition data.

8. The polishing device of claim 7 wherein said control device compares data stored by said memory element and said polishing condition data stored by said memory and serves to drive said polishing device only if these compared data match.

9. The polishing device of claim 7 wherein said control device, when in a polishing process by using a plurality of polishing tapes, compares data stored by said memory element and said polishing condition data stored by said memory for each of the plurality of polishing tapes used in said polishing process and serves to drive said polishing device only if these compared data match.

10. The polishing device of claim 1 wherein said memory element comprises an IC chip.

11. A polishing tape wound around a reel core wherein said reel core is provided with a memory element that stores data for identifying polishing tapes and also for quality control of said polishing tapes.

12. The polishing tape of claim 11 wherein said memory element comprises an IC chip.