Number | Name | Date | Kind |
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5101171 | Redmond | Mar 1992 | A |
5146614 | Furuno | Sep 1992 | A |
5175871 | Kunkel | Dec 1992 | A |
5432473 | Mattila et al. | Jul 1995 | A |
5530923 | Heinonen | Jun 1996 | A |
5661434 | Brozovich et al. | Aug 1997 | A |
5724005 | Chen et al. | Mar 1998 | A |
5758269 | Wu | May 1998 | A |
5929643 | Aihara | Jun 1999 | A |
6097250 | Kamali et al. | Aug 2000 | A |
Number | Date | Country |
---|---|---|
57-211812 | Dec 1982 | JP |
Entry |
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IBM Tech Disclosure Bulletin “Automatic Tuning Controller for Anode Tuded Sputtering” Apr. 1977, vo. 17, Issue 11, pp. 4087-4088. |