Patent Application
20250081416
The present invention relates to a power supply device used, for example, in an electron beam irradiation device.
For example, a power supply device used in an electron beam irradiation device or the like includes a power supply device main body for generating high voltage and a tank housing the power supply device main body. For example, in the power supply device described in Patent Document 1, a closed space is formed inside the tank. The tank is filled with, for example, electrically insulating gas. For example, the same power supply device supplies high voltage to an accelerating tube that accelerates electrons to generate an electron beam. Further, the same power supply device is also provided with a cooling mechanism to lower the temperature inside the tank. The cooling mechanism includes a cooler outside the tank. Gas in the tank flows into the cooler through piping. The gas cooled by the cooler flows into the tank again. The cooling mechanism maintains the temperature inside the tank at an appropriate level, allowing the power supply device to operate stably.
Patent Document 1: Japanese Patent Application Laid-Open (JP-A) No. H09-84260
Since the power supply device as disclosed in Patent Document 1 includes a cooler outside the tank, there is a problem in that the power supply device as a whole becomes larger. Thus, the present inventor studied a configuration in which the cooler is provided inside the tank. In that case, since the cooler is provided in a limited space within the tank, it is necessary to make the cooler smaller. However, if the cooler is made smaller, it becomes difficult to obtain sufficient cooling capacity, so there is room for improvement in this respect.
The present invention has been made to solve the above problems, and an object thereof is to provide a power supply device that is downsized and has improved cooling capacity. Means for solving the Problems
The power supply device for solving the above-mentioned problems includes: a power supply device main body; a tank, housing the power supply device main body; a cooler, provided inside the tank; an electric fan, provided inside the tank; and a magnetic shield member, provided between the electric fan and the power supply device main body.
According to this configuration, by providing the cooler inside the tank, the power supply device may be downsized. By providing an electric fan inside the tank, the gas, which has become high in temperature due to the heat generated by the power supply device main body inside the tank, may be sent to the cooler using the electric fan. That is, by forced convection caused by driving the electric fan, the temperature inside the tank may be efficiently lowered by the cooler. Further, with this configuration, the magnetism emitted from the power supply device main body may be shielded between the power supply device main body and the electric fan by the magnetic shield member. In this way, the electric fan is prevented from malfunctioning due to the magnetism emitted from the power supply device main body. Thus, the effect of improving the cooling capacity may be stably exhibited by the electric fan. In this way, according to this configuration, the cooling capacity may be improved while downsizing the power supply device.
In the power supply device, the cooler has cooling fins, and the magnetic shield member has a first shield portion positioned between the power supply device main body and the electric fan, and a second shield portion positioned between the power supply device main body and the cooling fin.
According to this configuration, the electric fan is shielded by the first shield portion and the cooling fins are shielded by the second shield portion against the magnetism of the power supply device main body. By shielding the cooling fins with the second shield portion, the cooling fins are suppressed from receiving magnetism and generating heat. Thus, a decrease in the cooling capacity of the cooler may be suppressed.
In the power supply device, a direction that is orthogonal to an opposing direction of the power supply device main body and the electric fan is referred to as an orthogonal direction, and the cooling fins are positioned on sides in the orthogonal direction with respect to the electric fan.
According to this configuration, the first shield portion and the second shield portion may be arranged in a line along the orthogonal direction in the magnetic shield member. Thus, the shape of the magnetic shield member having the first shield portion and the second shield portion may be simplified.
In the power supply device, the tank has a cylindrical shape with two ends closed, the power supply device main body is provided in a position that overlaps a center axis of the tank, and in a radial direction of the tank, the magnetic shield member is provided on an outer side of the power supply device main body, and the electric fan is provided on an outer side of the magnetic shield member.
According to this configuration, the electric fan is provided in a position closer to the inner circumferential surface of the tank with respect to the power supply device main body provided in a position closer to the center of the tank. In this way, the electric fan may be arranged in such a manner that the space within the tank is effectively utilized.
In the power supply device, the electric fan is provided so as to blow air from inside to outside in the radial direction, inside the tank, a pair of air flow paths are formed from an outside in the radial direction of the electric fan to two sides in an orthogonal direction of the electric fan that is orthogonal to an opposing direction between the power supply device main body and the electric fan, the cooler has a plurality of cooling fins, and the cooling fins are provided in each of the pair of air flow paths.
According to this configuration, the cooling fins are provided in each of the pair of air flow paths through which air from the electric fan passes. Thus, gas taken in from the power supply device main body side may be suitably blown to the cooling fins by the electric fan. As a result, the cooling efficiency of the cooler may be improved.
The power supply device described above is used as a power supply to supply power to an accelerating tube included in an electron beam irradiation device.
According to this configuration, the cooling capacity may be improved while downsizing the power supply device used in the electron beam irradiation device.
The power supply device of the present invention exhibits the effect of improving cooling capacity while being downsized.
Hereinafter, one embodiment of the power supply device will be described with reference to the drawings. In the drawings, for convenience, a part of the configuration may be exaggerated or simplified. Furthermore, the dimensional ratio of each part may also differ from the actual size. Furthermore, “orthogonal” in this description includes not only strictly orthogonal cases, but also approximately orthogonal cases within the range where the functions and effects of this embodiment may be achieved.
As shown in
The accelerating tube 13 has a cylindrical shape with a closed upper end where the filament 11 is provided. The accelerating tube 13 has a plurality of accelerating electrodes 14 arranged in parallel in the axial direction of the tube. The accelerating electrodes 14 generate an electric field that converges the electrons emitted from the filament 11 and accelerates the same downward based on the power supplied from a power supply for accelerating electrode 15 included in the power supply device main body 31. That is, in the accelerating tube 13, the electric field generated at the accelerating electrodes 14 cause an electron flow directed downward in the axial direction of the tube, that is, an electron beam e. A scanning tube 16 is connected to the lower end portion of the accelerating tube 13. The accelerating tube 13 and the scanning tube 16 communicate with each other through an internal space 17, and the electron beam e advances from the accelerating tube 13 toward the scanning tube 16 in that internal space 17.
The scanning tube 16 has a shape that is narrow at the upper end and widens toward the bottom. The scanning tube 16 is provided with a scanning coil 18 at the narrow upper end portion. The scanning coil 18 deflects the direction of the electron beam e generated by the accelerating tube 13, that is, scans the electron beam e, based on energization thereof. For example, a substantially rectangular-shaped opening window portion 19 is provided at the lower end portion of the scanning tube 16, and a substantially rectangular-shaped window foil 20 is attached to the opening window portion 19. The window foil 20 seals the opening window portion 19 while allowing the electron beam e to pass through. In other words, the internal space 17 spanning the accelerating tube 13 and the scanning tube 16 is configured as a closed space. The internal space 17 is kept in a vacuum state, for example, by driving a vacuum pump 21 connected to the scanning tube 16, at least during a period in which the electron beam e is generated.
The power supply for filament 12, the power supply for accelerating electrode 15, the scanning coil 18, and the vacuum pump 21 described above are controlled by a controller 22. The controller 22 performs output adjustment of the electron beam e through the power supply for filament 12 and the power supply for accelerating electrode 15, scanning control of the electron beam e through the scanning coil 18, vacuum adjustment of the internal space 17 of the accelerating tube 13 and the scanning tube 16 through the vacuum pump 21, and the like.
Then, the electron beam e emitted through the window foil 20 attached to the opening window portion 19 is, for example, irradiated onto an object 24 to be irradiated, which is conveyed in a conveying direction x by a conveying device 23. In this case, the electron beam irradiation device 10 is configured such that the longitudinal direction of the substantially rectangular-shaped opening window portion 19 faces a conveying orthogonal direction y of the conveying device 23. A predetermined scan of the electron beam e including the conveying direction x and the conveying orthogonal direction y is performed, and an irradiation on a substantially rectangular-shaped irradiation area A corresponding to the opening window portion 19 is performed. The effect of irradiating the object 24 to be irradiated with the electron beam e is expected to be, for example, improving the properties of the material, adding functionality, and sterilizing/sterilizing the material.
As shown in
It is noted that
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As shown in
The electron beam irradiation device 10 is provided with a cooling unit 40 inside the pressure tank 32. The cooling unit 40 includes a cooler 41, an electric fan 42, and a magnetic shield member 43. That is, the cooler 41, the electric fan 42, and the magnetic shield member 43 included in the cooling unit 40 are provided inside the pressure tank 32. Further, the cooling unit 40 is provided in a position closer to the inner circumferential surface of the peripheral wall 33 of the pressure tank 32 with respect to the power supply device main body 31 provided in a position closer to the center axis L of the pressure tank 32.
As shown in
The cooling fins 44 are provided so that the length direction thereof runs along the center axis L. Further, the plurality of cooling fins 44 are connected in series by the connecting pipe 45. One of the plurality of cooling fins 44 is connected to an inflow side pipe 46 extending outside the pressure tank 32. Further, one of the plurality of cooling fins 44 is connected to an outflow side pipe 47 extending outside the pressure tank 32.
The cooler 41 of this embodiment is, for example, a water-cooled type. The water flowing into the cooling fins 44 from the inflow side pipe 46 receives heat from the cooling fins 44 and is then discharged from the outflow side pipe 47. It is noted that the cooling medium in the cooler 41 is not limited to water, and may be changed to other fluids.
It is noted that the connecting pipe 45, the inflow side pipe 46, and the outflow side pipe 47 are made of, for example, stainless steel. In the case where the connecting pipe 45, the inflow side pipe 46, and the outflow side pipe 47 are made of copper, which requires brazing, there is a risk of water leakage. In this regard, the possibility of water leakage may be reduced by making the connecting pipe 45, the inflow side pipe 46, and the outflow side pipe 47 of stainless steel that may be welded rather than brazed.
The magnetic shield member 43 is provided between the electric fan 42 and the power supply device main body 31. The magnetic shield member 43 is made of a conductive material such as a metal material. As the metal material forming the magnetic shield member 43, a material having high thermal conductivity, such as copper, is used. Further, the magnetic shield member 43, for example, has a thin plate shape.
The magnetic shield member 43 faces the power supply device main body 31 in the radial direction of the pressure tank 32. It is noted that in the following description, the radial direction of the pressure tank 32 may be simply referred to as “radial direction.” Further, in the radial direction, the direction in which the power supply device main body 31 and the magnetic shield member 43 face each other is called an opposing direction D1.
The power supply device main body 31, the magnetic shield member 43, and the electric fan 42 are provided in a line along the radial direction of the pressure tank 32. That is, the electric fan 42 is provided on the outside in the radial direction of the magnetic shield member 43. Further, the electric fan 42 is provided between the power supply device main body 31 and the cooler 41 in the radial direction.
The cooling unit 40 includes, for example, a plurality of electric fans 42. The plurality of electric fans 42 are arranged in a line along the center axis L. As shown in
As shown in
The outer wall portion 62 is supported by the pressure tank 32. Specifically, the outer wall portion 62 is provided with connecting pieces 65. The connecting pieces 65 are fixed to first fixed portions 33a extending from the inner circumferential surface of the peripheral wall 33 with screws or the like. As a result, the outer wall portion 62 is fixed to the pressure tank 32.
Side wall portions 66 are provided at two ends of the outer wall portion 62 in the direction along the center axis L, respectively. The side wall portions 66 close a space in which the air flow paths 61 and the electric fans 42 are housed in a direction along the center axis L. The inner wall portion 63 and the electric fans 42 are supported by the side wall portions 66.
A plurality of cooling fins 44 are provided inside the pair of air flow paths 61. Each cooling fin 44 is supported by, for example, the side wall portions 66. In each air flow path 61, the plurality of cooling fins 44 are arranged in a line along the air flow path 61. Further, each cooling fin 44 arranged in each of the pair of air flow paths 61 is positioned on sides in the orthogonal direction D2 with respect to the electric fans 42.
The magnetic shield member 43 has a first shield portion 71 and a second shield portion 72. The first shield portion 71 is positioned between the power supply device main body 31 and the electric fans 42 in the opposing direction D1. The second shield portion 72 is positioned between the power supply device main body 31 and the cooling fins 44 in the opposing direction D1. The first shield portion 71 and the second shield portion 72 are included in the plate-shaped magnetic shield member 43. That is, in the magnetic shield member 43, the first shield portion 71 and the second shield portion 72 are arranged in a line along the orthogonal direction D2. By magnetically shielding the cooling fins 44 by the second shield portion 72, the cooling fins 44 are prevented from receiving magnetism and generating heat.
The intake hole 74 is provided so as to face the blade portion 51 of the electric fan 42 in the opposing direction D1. Further, the intake hole 74 is not provided in a position facing the motor 53, which are arranged in the center part of the electric fan 42, in the opposing direction D1. That is, the first shield portion 71 has a motor shield portion 75 that does not have an intake hole 74 in a position facing the motor 53 in the opposing direction D1.
The second shield portion 72 has an exhaust hole 76 that penetrates from the cooling fin 44 side to the power supply device main body 31 side. The exhaust hole 76 penetrates the second shield portion 72 in the opposing direction D1. For example, a plurality of exhaust holes 76 are provided along the center axis L. It is noted that the size of each intake hole 74 and each exhaust hole 76 is set to a size that does not allow the electromagnetic field calculated based on the magnetic frequency to penetrate.
As shown in
The side shield portions 81 are, for example, divided into a plurality of parts in the direction along the center axis L. For example, support portions 33c extending from the inner circumferential surface of the peripheral wall 33 of the pressure tank 32 is provided between the two side shield portions 81 divided in the direction along the center axis L. The support portions 33c are for, for example, supporting the power supply device main body 31.
Next, the operation of this embodiment will be described.
The electric fans 42 take in gas around the power supply device main body 31 through the intake holes 74 of the first shield portion 71 and blow the gas into the pair of air flow paths 61. The gas blown into the pair of air flow paths 61 is cooled by each cooling fin 44 and exhausted from the exhaust hole 76 of the second shield portion 72 to the power supply device main body 31 side. In this way, in the configuration in which the magnetic shield member 43 has the first shield portion 71 and the second shield portion 72, the gas around the power supply device main body 31 may be suitably cooled.
The effects of this embodiment will be described.
This embodiment may be implemented with the following modifications. This embodiment and the following modifications may be implemented in combination with each other in a technically consistent range.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2022-005870 | Jan 2022 | JP | national |
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/JP2023/000681 | 1/12/2023 | WO |
