This invention relates to the field of manufacturing, and more specifically, to a press system for nano-imprinting of recording media.
A disk drive system typically has one or more magnetic recording media (a.k.a., disks) and control mechanisms for storing data within approximately circular tracks on the disk. The magnetic recording media is composed of a substrate and one or more layers deposited on the substrate. A substrate may be produced from a blank sheet of, for example, metal-based material such as aluminum or aluminum magnesium. The sheet may be punched to generate a disk-shaped substrate having an inner diameter (ID) and an outer diameter (OD). The disk-shaped substrate may be further processed (e.g., polished, textured, layer deposition, etc.) to produce the magnetic recording disk.
Advancing the art of magnetic hard disk drives involves increasing the recording density of a disk drive system. Recording density is a measure of the amount of data that may be stored in a given area of disk. One method for increasing recording densities is to pattern the surface of the disk to form discrete tracks, referred to as discrete track recording (DTR). The recessed zones separate the raised zones to inhibit or prevent the unintended storage of data in the raised zones.
One method of producing DTR magnetic recording media includes using a press to imprint embossable films residing on one or both sides of the recording disk substrate. The press utilizes a die for each side of the media to be imprinted. The die may include an embossing foil, or stamper, that is pressed into the embossable film of the media to form the imprinted pattern in the film. The pattern is subsequently transferred to the substrate and/or one or more layers residing above the substrate.
A press for magnetic recording disks may utilize a mandrel, or shaft, having a diameter that is sized to engage the ID of the disk. The dies have a cylindrical opening sized to receive the mandrel. The embossing foil is disposed around the mandrel and, thus, has an annular, or disk, shape with an inner diameter (i.e., a hole, or cavity, at their centers). Alignment of the embossing foil to the recording media is very important to achieve proper function in the recording media and such alignment is very challenging, particularly for double-side recording media where alignment of a mandrel holding a disk to an embossing foil on a first (bottom) die may induce alignment error relative to another embossing foil on a second (top) die. A press which maintains proper centering of a disk to both the top and bottom die as the press is operated from an open to a closed position is therefore advantageous.
Throughput of presses for magnetic recording disks may also be limited by the need to accurately imprint sub-micron (e.g., nanometer) features with high precision. For example, it is difficult to drive a press rapidly from an open state, where the dies are displaced far enough from one another that a disk may be loaded or unloaded from the press, to closed state, where nanometer features are formed (all the while maintaining the centering of the disk). A press which improves the rate at which it transitions from the open to closed state is therefore also advantageous.
A single-sided press for magnetic recording disks may also have an embossing foil affixed to a die. It can be challenging to prevent a foil-to-die coupling mechanism present on a first die of a double-sided press from adversely impacting the coupling mechanism on an opposing die as the press is closed. Furthermore, both single and double-side press systems are susceptible to the embossing foil bowing uncontrollably from center to edge (e.g., under the foil's own weight) while the press is in an open state, or buckling while the press is in a closed state (e.g., from radial expansion of the foil), either of which may produce a waviness in the imprinted features. A foil-to-die coupling mechanism which can overcome these difficulties is advantageous.
The present invention is illustrated by way of example, and not limitation, in the figures of the accompanying drawings in which:
In the following description, numerous specific details are set forth, such as examples of specific, components, processes, etc., to provide a thorough understanding of various embodiments of the present invention. It will be apparent, however, to one skilled in the art that these specific details need not be employed to practice various embodiments of the present invention. In other instances, well known components or methods have not been described in detail to avoid unnecessarily obscuring various embodiments of the present invention.
The terms “over,” “under,” “between,” and “on” as used herein refer to a relative position of one member with respect to other members. As such, for example, one member disposed over or under another member may be directly in contact with the other member or may have one or more intervening members. Moreover, one member disposed between members may be directly in contact with the two members or may have one or more intervening members. In contrast, a first member “on” a second member is in contact with that second member. Additionally, the relative position of one member with respect to other members is provided assuming operations are performed relative to a substrate without consideration of the absolute orientation of the substrate. For example, the terms “top” and “bottom” are to be understood as merely convenient labels describing only a relative physical relationship, and as such, “top” and “bottom” components may generally swap position while still achieving the same technical effect.
It should be noted that the apparatus and methods discussed herein may be used with various types of disks. In the exemplary embodiment, for example, the apparatus and methods discusses herein are used with a magnetic recording disk. Alternatively, the apparatus and methods discussed herein may be used with other types of digital recording disks, for example, a compact disk (CD), a digital versatile disk (DVD), and a magneto-optical disk.
A lower portion of the press system 100 includes a gas actuator 160 disposed between the first press bottom base plate 107 and the second press bottom base plate 167. The first press bottom base plate 107 may be rigidly mounted relative to the press top base plate 106 (e.g., on opposing sides of a table) so that a linear displacement of the second press bottom base plate 167 relative to the base plates 106, 107 is translated, via the main rods 109, into a linear motion of the top die 102 relative to the bottom die 104. A bottom cross beam 122 is disposed below the second press bottom base plate 167. Springs 162, 163, 161, and 164, on spring rods 130, 131, 132, and 133, compress the gas actuator 160 between the first press bottom base plate 107 and the second press bottom base plate 167. In one embodiment, during operation of the press system 100, as the gas actuator 160 expands, the second press bottom base plate 167 moves downward and away from the first press bottom base plate 107. This expansion causes the top cross beam 120 to lower and displace the top holder mount base 242 and the bottom holder mount base 142 toward each other to be in one or more closed states.
The press system 100 may be configured for either single-sided imprinting or double-side imprinting by adapting the top die 102 and/or bottom die 104.
As shown in
The bottom holder mount base 142 further includes a bottom standoff 243 which is configured to contact the top standoff 244 when the top and bottom dies 102,104 are brought into contact when the press system is in a closed state, as further described elsewhere herein. A top rod 294 extends through a center portion of the top die 102 and is coupled to the top die 102 via a top mandrel spring 295.
In one embodiment, the top and bottom ball bushings 270 and 288 hold the top/bottom rods 294, 284 in precise alignment with the top/bottom outer sleeves 271, 290, respectively, to center embossing foils 150, 251 with a longitudinal axis of the respective top/bottom rod. This allows for a concentricity to be established and maintained between the embossing foils 150,251 and the rods 294, 284. At least one of the top or bottom dies includes an opening with a larger diameter than the outer diameter of the outer sleeve to allow radial movement of a mandrel relative to the die through which the mandrel passes as the top and bottom rods are aligned to a common longitudinal mandrel axis upon closing the press. When the top rod is aligned to the bottom rod, the concentricity of the sleeves to the rods and the concentricity of the foils to the sleeves ensure that the recording media disk substrate 255 engaged by a rod is concentric with both the top and bottom embossing foils.
As depicted in
Generally, in response to application of a continuous closing force, upon aligning the workpiece to one of the mandrel rods (e.g., the bottom rod 284), the nano-imprinting operation 300 maintains a positive pressure against the aligned workpiece throughout the duration of the pressing operation (e.g., throughout all closing states) to establish and preserve a centering of the workpiece relative to both the top and bottom dies 102, 104.
The nano-imprinting operation 300 begins at the open state 301 with first receiving a workpiece into a press system. As illustrated in
Similarly, when in an open state, the top rod spring 275 is in a relatively decompressed state. The top rod 294 is displaced beyond the top outer sleeve 271 and the top holder mount base 242, in preparation for receiving the bottom rod 284. The top outer sleeve 271 extends outward from the top holder mount base 242 in response to the compressive force of the top mandrel spring 295. The top outer sleeve 271 also includes a notch 231 which engages a cam (not depicted) to position the top outer sleeve 271 relative to the top holder mount base 242. This outward extension of the top outer sleeve 271 is set by the cam's position relative to the notch 231 to form a top doming 233 in the top embossing foil 150. In addition to defining the ready positions of the upper and lower rods and outer sleeves, the cams in the top and bottom dies 102, 104 may also set a controllable amount of spring pre-load in the mandrel springs 291, 295. Cam-notch arrangements may also be employed to set a controllable amount of spring pre-load into either or both of the top and bottom rod springs 275, 285. In one embodiment, when the press is in the open state, the four opposing springs (top and bottom rod springs 275, 285 and top and bottom mandrel springs 291, 295) are preloaded asymmetrically. As one example, the bottom rod spring 285 is preloaded to a force of 2.1 lbs, the bottom mandrel spring 291 is preloaded to 9.3 lbs, the top rod spring 275 is preloaded to 1.7 lbs, and the top mandrel spring 295 is preloaded to 12.5 lbs.
As further illustrated in
With the press system 100 loaded, a closing force is applied (e.g., via the gas actuator 160) which linearly displaces the top and bottom dies 102, 104 toward each other. The components of the press system 100 then undergo a sequence of configurations, referred to herein as “closing states” in response to the displacement of the top and bottom dies 102, 104. The physical characteristics of particular closing states are dependent upon the relative dimensions, positions and force relationships between the components of the top and bottom dies 102, 104.
Returning to
Following initial contact of the opposing mandrel rods, as the dies are displaced toward one another (e.g., in direction substantially parallel to the longitudinal mandrel axis 229), the conical shape of the bottom mating surface 286 displaces either or both of the bottom and top rods 284, 294 in a radial direction (orthogonal to the longitudinal mandrel axis) within the die clearance to align the top mandrel longitudinal axis 223 with the bottom mandrel longitudinal axis 224 and form the common longitudinal mandrel axis 229. In alternative embodiments, a male conical mating surface, such as that depicted in
As further shown in the expanded view of
In
For embodiments where the top or bottom shoulder ring 272, 292 forms part of a bottom sleeve assembly (e.g., as depicted in
Returning to
In the exemplary embodiment depicted in
The opposing force applied by the top outer sleeve 271 while in the closing state 310 is a function of the relative spring strengths of the top mandrel spring 295, the bottom mandrel spring 291, the top rod spring 275 and the bottom rod spring 285. While it is the relative relationship of spring strengths which enables the advantageous asymmetrical closing of the press system described herein, when the exemplary embodiment reaches the closing state 310, the top rod spring 275 provides a force of approximately 1.9 lbs, while the bottom rod spring 285 provides a force of approximately 2.1 lbs. As such, the bottom rod spring 285 remains in the preloaded state while the top rod spring 275 is in a retracted state when the magnetic recording media disk substrate 255 first contacts the top embossing foil 150.
Returning to
In the exemplary embodiment depicted in
Returning to
As the press continues to apply a closing force, the nano-imprinting operation 300 advances to the closed state 325 (
Depending on the configuration of the press system, imprinting may or may not occur upon advancing to the closed state 325 as a function of whether or not all of the doming in both embossing foils is eliminated upon reaching the closed state 325. For example, in one single step imprinting embodiment, imprinting of the workpiece occurs at the closing states 320 and 325 as the second embossing foil is flattened. For such embodiments, the force closing the press is the force that will imprint the workpiece and the nano-imprinting operation 300 advances along the dotted line in
The stopper can be set to prevent macroscopic displacement of the closing dies from imprinting the recording media disk substrate 255. The stopper defines a predetermined gap associated with the desired amount of doming to retain in the second embossing foil when the die press is closed. The stopper enables precise control in the reduction of the doming in the second embossing foil without over-compressing the workpiece (e.g., compressing the press pad 280). In such embodiments, the force imprinting the workpiece is distinct from the force closing the press. The stopper also permits the relatively large die displacement required between an open state suitable for loading and unloading a workpiece to be rapidly traversed in a first “closing” phase of the nano-imprinting operation 300. A second “closed” phase of the nano-imprinting operation 300 allows for sub-micron precision with a relatively slower traversal of a distance that is at least an order of magnitude smaller than for the closing phase. Notably, separating the nano-imprinting operation 300 into these two phases may be practiced even where the particular closing states 305-325 are not employed. For example, even for press systems which do not employ the exemplary asymmetrical arrangement of springs depicted in
Depending on the embodiment, the stopper may be one or more of a mechanical hard stop or a die displacement controller reactive to an optical sensor, electrical sensor, or a mechanical sensor. For a mechanical hardstop, many variations are possible. For example, opposing standoffs may be machined into the top and bottom dies 102, 104 to be in substantial alignment with each other and proximate to an outer edge of the magnetic recording disk when the die set in a closed position.
Returning to
In alternate embodiments, the distance, P, may vary as dependent on factors such as whether opposing pistons are employed and whether imprinting pads are employed. For example, in a particular double-side press system, an imprinting piston is disposed in both the top and bottom dies 102, 104 such that a first volume is pressurized on a side of a first piston opposite a first side of the workpiece and a second volume is pressurized on a side of a second piston opposite a second side of the workpiece to displace the first and second pistons in opposing directions toward respective embossing foils. Each of the pistons may travel a distance, P, which is at least equal to an amount of doming between the embossing foil and the workpiece which remains after the die set is closed (e.g., between approximately 0.1 mm and 0.3 mm).
After imprinting the workpiece, the nano-imprinting operation 300 advances from the closed state 330 back to the open state 301, as depicted in
As depicted in
As illustrated in
The exemplary bottom foil holder embodiment depicted in
As further illustrated in
As further shown in
The method 350 begins with an outer circumference of a first embossing foil clamped to a first die with a plurality of first tabs at operation 351. For example, the top embossing foil 150 may be clamped to the top die 102 with the holder tabs 1302. At operation 352, an outer circumference of a second embossing foil is clamped to a first die with a plurality of second tabs. For example, the bottom embossing foil 251 may be clamped to the bottom die 104 with the holder tabs 1325. Next, at operation 355, a magnetic recording disk is received into the press system at operation 355 (e.g., the magnetic recording media disk substrate 255 is received into the press system 100). At operation 360, the press is closed around the magnetic recording disk by interleaving the plurality of first tabs with the plurality of second tabs. For example, as the closing state 325 (
In particular embodiments, the embossing foil employed by a press system is coupled to a die in a manner which allows the embossing foil to expand radially during an imprinting process. Allowing such radial expansion can reduce buckling of the embossing foil and reduce waviness in the features imprinted into a recording media disk. In one embodiment, an embossing foil holder, such as any of those described in the context of assemblies 1200 and 1300, is coupled to a die which clamps a first portion of the embossing foil in a manner which still allows the clamped foil portion to move in a radial direction relative to the embossing foil holder.
In one embodiment, a spring clamping assembly is employed to allow the clamped foil portion to move in a radial direction. While a variety of spring clamping assemblies are possible, in the depicted embodiment the holder mount 1210 is affixed to the bottom die 104 with a coil spring 1481. The coil spring 1481 is compressed between the screw 1205 mounted to the bottom die 104 and the holder mount 1210 (or embossing foil holder 1201 since the holder is rigidly attached to the mount 1210). The screw 1205 may be adjusted to set tensioning of the foil holder 1201 to achieve a predetermined clamping force of the bottom embossing foil 251 against the bottom die 104 (e.g., the bottom press pad 280). With the foil holder 1201 a rigid extension of the holder mount 1210, the clamping force is substantially parallel to the longitudinal mandrel axis 229. The clamping force is dependent on a number of factors, such as the friction coefficients of the embossing foil 251, the foil holder mount 1210 and the bottom press pad 280. For exemplary embodiments, the clamping force ranges between approximately 5 N and 30 N.
Each of the screws 1205 depicted in
Double-side imprinting embodiments may also provide a clamping force which allows an outer circumference of an embossing foil to expand radially. For example, the assembly 1300, as depicted in
Whether employed in a double-sided configuration or a single-sided configuration, the spring tensioned foil holders described herein may be utilized to press a recording media disk. For example,
The above embodiments have been described with exemplary reference to a “magnetic recording disk” substrate only for consistency of discussion. It should be noted that other types and shapes of substrates may be used (e.g., wafer and panel oxide/substrates) having an embossable material disposed thereon. The apparatus and methods discussed herein may also be used in applications such as the production of semiconductor devices and liquid crystal display panels.
In an alternative embodiment, for example, the nano-imprinting press systems and imprinting methods discussed herein may be used to fabricate pixel arrays for flat panel displays. In such a fabrication, an embossable material may be disposed above a base structure of, for example, an indium tin oxide (ITO) layer on top of a substrate. As another example, the nano-imprinting apparatus and methods discussed herein may be used to fabricate lasers. In such a fabrication, embossable material areas patterned by the embossing foils are used as a mask to define laser cavities for light emitting materials. In still other embodiments, the apparatus and methods discussed herein may be used in other applications, for example, the production of multiple layer electronic packaging, the production of optical communication devices, and contact/transfer printing.
In the foregoing specification, embodiments of the invention have been described with reference to specific exemplary features thereof. It will, however, be evident that various modifications and changes may be made thereto without departing from the broader spirit and scope of the invention as set forth in the appended claims. The specification and figures are, accordingly, to be regarded in an illustrative rather than a restrictive sense.
This application is a divisional of U.S. patent application Ser. No. 12/614,343, filed Nov. 16, 2009, now U.S. Pat. No. 8,496,466, which is hereby incorporated by reference in its entirety.
Number | Name | Date | Kind |
---|---|---|---|
3946634 | Allen et al. | Mar 1976 | A |
4062600 | Wyse | Dec 1977 | A |
4343025 | Kronfeld et al. | Aug 1982 | A |
4571320 | Walker | Feb 1986 | A |
4583144 | Kato | Apr 1986 | A |
4694703 | Routson | Sep 1987 | A |
4770739 | Orvek et al. | Sep 1988 | A |
4778372 | Mutti et al. | Oct 1988 | A |
4786564 | Chen et al. | Nov 1988 | A |
4931351 | McColgin et al. | Jun 1990 | A |
5018037 | Krounbi et al. | May 1991 | A |
5045150 | Cleeves et al. | Sep 1991 | A |
5045165 | Yamashita | Sep 1991 | A |
5077888 | Tokisue et al. | Jan 1992 | A |
5080549 | Goodwin et al. | Jan 1992 | A |
5091047 | Cleeves et al. | Feb 1992 | A |
5219788 | Abernathey et al. | Jun 1993 | A |
5254000 | Friske | Oct 1993 | A |
5259926 | Kuwabara et al. | Nov 1993 | A |
5284435 | Nuij et al. | Feb 1994 | A |
5290397 | Ober et al. | Mar 1994 | A |
5293287 | Tzur et al. | Mar 1994 | A |
5295802 | Hersbt | Mar 1994 | A |
5318877 | Ober et al. | Jun 1994 | A |
5320934 | Misium et al. | Jun 1994 | A |
5322987 | Thomas et al. | Jun 1994 | A |
5413018 | Wada et al. | May 1995 | A |
5427599 | Greschner et al. | Jun 1995 | A |
5455145 | Tarumoto | Oct 1995 | A |
5493959 | Yagi et al. | Feb 1996 | A |
5512131 | Kumar et al. | Apr 1996 | A |
5537282 | Treves et al. | Jul 1996 | A |
5571473 | Fujii | Nov 1996 | A |
5681638 | Korenaga | Oct 1997 | A |
5738008 | Freund | Apr 1998 | A |
5772905 | Chou | Jun 1998 | A |
5820769 | Chou | Oct 1998 | A |
5888433 | Amo | Mar 1999 | A |
5894056 | Kakizaki et al. | Apr 1999 | A |
5915915 | Allen et al. | Jun 1999 | A |
5956216 | Chou | Sep 1999 | A |
5985524 | Allen et al. | Nov 1999 | A |
6013161 | Chen et al. | Jan 2000 | A |
6019930 | Baresich | Feb 2000 | A |
6063248 | Bourez et al. | May 2000 | A |
6068891 | O'Dell et al. | May 2000 | A |
6086730 | Liu et al. | Jul 2000 | A |
6099981 | Nishimori | Aug 2000 | A |
6103404 | Ross et al. | Aug 2000 | A |
6117499 | Wong et al. | Sep 2000 | A |
6136403 | Prabhakara et al. | Oct 2000 | A |
6143375 | Ross et al. | Nov 2000 | A |
6145849 | Bae et al. | Nov 2000 | A |
6146737 | Malhotra et al. | Nov 2000 | A |
6149696 | Jia | Nov 2000 | A |
6150015 | Bertero et al. | Nov 2000 | A |
6156404 | Ross et al. | Dec 2000 | A |
6159076 | Sun et al. | Dec 2000 | A |
6164118 | Suzuki et al. | Dec 2000 | A |
6165391 | Vedamuttu | Dec 2000 | A |
6200441 | Gornicki et al. | Mar 2001 | B1 |
6204995 | Hokkyo et al. | Mar 2001 | B1 |
6206765 | Sanders et al. | Mar 2001 | B1 |
6210819 | Lal et al. | Apr 2001 | B1 |
6210855 | Ueda et al. | Apr 2001 | B1 |
6216709 | Fung et al. | Apr 2001 | B1 |
6218056 | Pinarbasi et al. | Apr 2001 | B1 |
6221119 | Homola | Apr 2001 | B1 |
6242718 | Ferro et al. | Jun 2001 | B1 |
6248395 | Homola et al. | Jun 2001 | B1 |
6257866 | Fritz et al. | Jul 2001 | B1 |
6261681 | Suekane et al. | Jul 2001 | B1 |
6270885 | Hokkyo et al. | Aug 2001 | B1 |
6274063 | Li et al. | Aug 2001 | B1 |
6276656 | Baresich | Aug 2001 | B1 |
6281679 | King et al. | Aug 2001 | B1 |
6283838 | Blake et al. | Sep 2001 | B1 |
6287429 | Moroishi et al. | Sep 2001 | B1 |
6290573 | Suzuki | Sep 2001 | B1 |
6299947 | Suzuki et al. | Oct 2001 | B1 |
6303217 | Malhotra et al. | Oct 2001 | B1 |
6309580 | Chou | Oct 2001 | B1 |
6309765 | Suekane et al. | Oct 2001 | B1 |
RE37470 | Ohkura et al. | Dec 2001 | E |
6358636 | Yang et al. | Mar 2002 | B1 |
6362452 | Suzuki et al. | Mar 2002 | B1 |
6363599 | Bajorek | Apr 2002 | B1 |
6365012 | Sato et al. | Apr 2002 | B1 |
6381090 | Suzuki et al. | Apr 2002 | B1 |
6381092 | Suzuki | Apr 2002 | B1 |
6383944 | Furihata et al. | May 2002 | B1 |
6387483 | Hokkyo et al. | May 2002 | B1 |
6391213 | Homola | May 2002 | B1 |
6395349 | Salamon | May 2002 | B1 |
6403919 | Salamon | Jun 2002 | B1 |
6408677 | Suzuki | Jun 2002 | B1 |
6426157 | Hokkyo et al. | Jul 2002 | B1 |
6429984 | Alex | Aug 2002 | B1 |
6440646 | Ueda et al. | Aug 2002 | B2 |
6479122 | Sakamoto | Nov 2002 | B2 |
6482279 | Nakano et al. | Nov 2002 | B2 |
6482330 | Bajorek | Nov 2002 | B1 |
6482505 | Bertero et al. | Nov 2002 | B1 |
6482742 | Chou | Nov 2002 | B1 |
6500567 | Bertero et al. | Dec 2002 | B1 |
6518189 | Chou | Feb 2003 | B1 |
6520764 | Ito et al. | Feb 2003 | B1 |
6528124 | Nguyen | Mar 2003 | B1 |
6548821 | Treves et al. | Apr 2003 | B1 |
6552871 | Suzuki et al. | Apr 2003 | B2 |
6565719 | Lairson et al. | May 2003 | B1 |
6566674 | Treves et al. | May 2003 | B1 |
6571806 | Rosano et al. | Jun 2003 | B2 |
6628466 | Alex | Sep 2003 | B2 |
6664503 | Hsieh et al. | Dec 2003 | B1 |
6670055 | Tomiyasu et al. | Dec 2003 | B2 |
6682807 | Lairson et al. | Jan 2004 | B2 |
6683754 | Suzuki et al. | Jan 2004 | B2 |
6696220 | Bailey et al. | Feb 2004 | B2 |
6705853 | Nehring | Mar 2004 | B1 |
6730420 | Bertero et al. | May 2004 | B1 |
6743528 | Suekane et al. | Jun 2004 | B2 |
6757116 | Curtiss et al. | Jun 2004 | B1 |
6759138 | Tomiyasu et al. | Jul 2004 | B2 |
6778353 | Harper | Aug 2004 | B1 |
6793476 | Bryja et al. | Sep 2004 | B2 |
6795274 | Hsieh et al. | Sep 2004 | B1 |
6855232 | Jairson et al. | Feb 2005 | B2 |
6857937 | Bajorek | Feb 2005 | B2 |
6869557 | Wago et al. | Mar 2005 | B1 |
6893748 | Bertero et al. | May 2005 | B2 |
6899959 | Bertero et al. | May 2005 | B2 |
6916558 | Umezawa et al. | Jul 2005 | B2 |
6939120 | Harper | Sep 2005 | B1 |
6946191 | Morikawa et al. | Sep 2005 | B2 |
6951173 | Meissl et al. | Oct 2005 | B1 |
6967798 | Homola et al. | Nov 2005 | B2 |
6972135 | Homola | Dec 2005 | B2 |
6989114 | Korenaga et al. | Jan 2006 | B1 |
6994541 | Chung et al. | Feb 2006 | B2 |
7004827 | Suzuki et al. | Feb 2006 | B1 |
7006323 | Suzuki | Feb 2006 | B1 |
7016154 | Nishihira | Mar 2006 | B2 |
7019924 | McNeil et al. | Mar 2006 | B2 |
7044726 | Koyama et al. | May 2006 | B2 |
7045215 | Shimokawa | May 2006 | B2 |
7070870 | Bertero et al. | Jul 2006 | B2 |
7082876 | Olsson | Aug 2006 | B2 |
7090934 | Hokkyo et al. | Aug 2006 | B2 |
7099112 | Harper | Aug 2006 | B1 |
7105241 | Shimokawa et al. | Sep 2006 | B2 |
7119990 | Bajorek et al. | Oct 2006 | B2 |
7144539 | Olsson | Dec 2006 | B2 |
7147790 | Wachenschwanz et al. | Dec 2006 | B2 |
7161753 | Wachenschwanz et al. | Jan 2007 | B2 |
7162810 | Biggs et al. | Jan 2007 | B2 |
7166319 | Ishiyama | Jan 2007 | B2 |
7166374 | Suekane et al. | Jan 2007 | B2 |
7169487 | Kawai et al. | Jan 2007 | B2 |
7174775 | Ishiyama | Feb 2007 | B2 |
7179549 | Malhotra et al. | Feb 2007 | B2 |
7184139 | Treves et al. | Feb 2007 | B2 |
7186109 | Koyama et al. | Mar 2007 | B2 |
7196860 | Alex | Mar 2007 | B2 |
7199977 | Suzuki et al. | Apr 2007 | B2 |
7204686 | Chung et al. | Apr 2007 | B2 |
7208236 | Morikawa et al. | Apr 2007 | B2 |
7212483 | Kobari et al. | May 2007 | B2 |
7220500 | Tomiyasu et al. | May 2007 | B1 |
7229266 | Harper | Jun 2007 | B2 |
7239970 | Treves et al. | Jul 2007 | B2 |
7252492 | Olsson et al. | Aug 2007 | B2 |
7252897 | Shimokawa et al. | Aug 2007 | B2 |
7277254 | Shimokawa et al. | Oct 2007 | B2 |
7281920 | Homola et al. | Oct 2007 | B2 |
7292329 | Treves et al. | Nov 2007 | B2 |
7301726 | Suzuki | Nov 2007 | B1 |
7302148 | Treves et al. | Nov 2007 | B2 |
7305119 | Treves et al. | Dec 2007 | B2 |
7314404 | Singh et al. | Jan 2008 | B2 |
7320584 | Harper et al. | Jan 2008 | B1 |
7322287 | Tan et al. | Jan 2008 | B2 |
7329114 | Harper et al. | Feb 2008 | B2 |
7363854 | Sewell | Apr 2008 | B2 |
7375362 | Treves et al. | May 2008 | B2 |
7420886 | Tomiyasu et al. | Sep 2008 | B2 |
7425719 | Treves et al. | Sep 2008 | B2 |
7471484 | Wachenschwanz et al. | Dec 2008 | B2 |
7498062 | Calcaterra et al. | Mar 2009 | B2 |
7531485 | Hara et al. | May 2009 | B2 |
7537846 | Ishiyama et al. | May 2009 | B2 |
7549209 | Wachenschwanz et al. | Jun 2009 | B2 |
7569490 | Staud | Aug 2009 | B2 |
7597792 | Homola et al. | Oct 2009 | B2 |
7597973 | Ishiyama | Oct 2009 | B2 |
7608193 | Wachenschwanz et al. | Oct 2009 | B2 |
7632087 | Homola | Dec 2009 | B2 |
7656615 | Wachenschwanz et al. | Feb 2010 | B2 |
7682546 | Harper | Mar 2010 | B2 |
7684152 | Suzuki et al. | Mar 2010 | B2 |
7686606 | Harper et al. | Mar 2010 | B2 |
7686991 | Harper | Mar 2010 | B2 |
7695833 | Ishiyama | Apr 2010 | B2 |
7722968 | Ishiyama | May 2010 | B2 |
7733605 | Suzuki et al. | Jun 2010 | B2 |
7736768 | Ishiyama | Jun 2010 | B2 |
7755861 | Li et al. | Jul 2010 | B1 |
7758732 | Calcaterra et al. | Jul 2010 | B1 |
7833639 | Sonobe et al. | Nov 2010 | B2 |
7833641 | Tomiyasu et al. | Nov 2010 | B2 |
7910159 | Jung | Mar 2011 | B2 |
7911736 | Bajorek | Mar 2011 | B2 |
7924519 | Lambert | Apr 2011 | B2 |
7944165 | O'Dell | May 2011 | B1 |
7944643 | Jiang et al. | May 2011 | B1 |
7955723 | Umezawa et al. | Jun 2011 | B2 |
7983003 | Sonobe et al. | Jul 2011 | B2 |
7993497 | Moroishi et al. | Aug 2011 | B2 |
7993765 | Kim et al. | Aug 2011 | B2 |
7998912 | Chen et al. | Aug 2011 | B2 |
8002901 | Chen et al. | Aug 2011 | B1 |
8003237 | Sonobe et al. | Aug 2011 | B2 |
8012920 | Shimokawa | Sep 2011 | B2 |
8038863 | Homola | Oct 2011 | B2 |
8057926 | Ayama et al. | Nov 2011 | B2 |
8062778 | Suzuki et al. | Nov 2011 | B2 |
8064156 | Suzuki et al. | Nov 2011 | B1 |
8076013 | Sonobe et al. | Dec 2011 | B2 |
8092931 | Ishiyama et al. | Jan 2012 | B2 |
8100685 | Harper et al. | Jan 2012 | B1 |
8101054 | Chen et al. | Jan 2012 | B2 |
8125723 | Nichols et al. | Feb 2012 | B1 |
8125724 | Nichols et al. | Feb 2012 | B1 |
8137517 | Bourez | Mar 2012 | B1 |
8142916 | Umezawa et al. | Mar 2012 | B2 |
8163093 | Chen et al. | Apr 2012 | B1 |
8171949 | Lund et al. | May 2012 | B1 |
8173282 | Sun et al. | May 2012 | B1 |
8178480 | Hamakubo et al. | May 2012 | B2 |
8206789 | Suzuki | Jun 2012 | B2 |
8218260 | Iamratanakul et al. | Jul 2012 | B2 |
8247095 | Champion et al. | Aug 2012 | B2 |
8257783 | Suzuki et al. | Sep 2012 | B2 |
8298609 | Liew et al. | Oct 2012 | B1 |
8298689 | Sonobe et al. | Oct 2012 | B2 |
8309239 | Umezawa et al. | Nov 2012 | B2 |
8316668 | Chan et al. | Nov 2012 | B1 |
8331056 | O'Dell | Dec 2012 | B2 |
8354618 | Chen et al. | Jan 2013 | B1 |
8367228 | Sonobe et al. | Feb 2013 | B2 |
8383209 | Ayama | Feb 2013 | B2 |
8394243 | Jung et al. | Mar 2013 | B1 |
8397751 | Chan et al. | Mar 2013 | B1 |
8399809 | Bourez | Mar 2013 | B1 |
8402638 | Treves et al. | Mar 2013 | B1 |
8404056 | Chen et al. | Mar 2013 | B1 |
8404369 | Ruffini et al. | Mar 2013 | B2 |
8404370 | Sato et al. | Mar 2013 | B2 |
8406918 | Tan et al. | Mar 2013 | B2 |
8414966 | Yasumori et al. | Apr 2013 | B2 |
8425975 | Ishiyama | Apr 2013 | B2 |
8431257 | Kim et al. | Apr 2013 | B2 |
8431258 | Onoue et al. | Apr 2013 | B2 |
8453315 | Kajiwara et al. | Jun 2013 | B2 |
8488276 | Jung et al. | Jul 2013 | B1 |
8491800 | Dorsey | Jul 2013 | B1 |
8492009 | Homola et al. | Jul 2013 | B1 |
8492011 | Itoh et al. | Jul 2013 | B2 |
8496466 | Treves et al. | Jul 2013 | B1 |
8517364 | Crumley et al. | Aug 2013 | B1 |
8517657 | Chen et al. | Aug 2013 | B2 |
8524052 | Tan et al. | Sep 2013 | B1 |
8530065 | Chernyshov et al. | Sep 2013 | B1 |
8546000 | Umezawa | Oct 2013 | B2 |
8551253 | Na'im et al. | Oct 2013 | B2 |
8551627 | Shimada et al. | Oct 2013 | B2 |
8556566 | Suzuki et al. | Oct 2013 | B1 |
8559131 | Masuda et al. | Oct 2013 | B2 |
8562748 | Chen et al. | Oct 2013 | B1 |
8565050 | Bertero et al. | Oct 2013 | B1 |
8570844 | Yuan et al. | Oct 2013 | B1 |
8580410 | Onoue | Nov 2013 | B2 |
8584687 | Chen et al. | Nov 2013 | B1 |
8591709 | Lim et al. | Nov 2013 | B1 |
8592061 | Onoue et al. | Nov 2013 | B2 |
8596287 | Chen et al. | Dec 2013 | B1 |
8597723 | Jung et al. | Dec 2013 | B1 |
8603649 | Onoue | Dec 2013 | B2 |
8603650 | Sonobe et al. | Dec 2013 | B2 |
8605388 | Yasumori et al. | Dec 2013 | B2 |
8605555 | Chernyshov et al. | Dec 2013 | B1 |
8608147 | Yap et al. | Dec 2013 | B1 |
8609263 | Chernyshov et al. | Dec 2013 | B1 |
8619381 | Moser et al. | Dec 2013 | B2 |
8623528 | Umezawa et al. | Jan 2014 | B2 |
8623529 | Suzuki | Jan 2014 | B2 |
8634155 | Yasumori et al. | Jan 2014 | B2 |
8658003 | Bourez | Feb 2014 | B1 |
8658292 | Mallary et al. | Feb 2014 | B1 |
8665541 | Saito | Mar 2014 | B2 |
8668953 | Buechel-Rimmel | Mar 2014 | B1 |
8674327 | Poon et al. | Mar 2014 | B1 |
8685214 | Moh et al. | Apr 2014 | B1 |
8696404 | Sun et al. | Apr 2014 | B2 |
8711499 | Desai et al. | Apr 2014 | B1 |
8743666 | Bertero et al. | Jun 2014 | B1 |
8758912 | Srinivasan et al. | Jun 2014 | B2 |
8787124 | Chernyshov et al. | Jul 2014 | B1 |
8787130 | Yuan et al. | Jul 2014 | B1 |
8791391 | Bourez | Jul 2014 | B2 |
8795765 | Koike et al. | Aug 2014 | B2 |
8795790 | Sonobe et al. | Aug 2014 | B2 |
8795857 | Ayama et al. | Aug 2014 | B2 |
8800322 | Chan et al. | Aug 2014 | B1 |
8811129 | Yuan et al. | Aug 2014 | B1 |
8817410 | Moser et al. | Aug 2014 | B1 |
20020025408 | Davis | Feb 2002 | A1 |
20020042027 | Chou et al. | Apr 2002 | A1 |
20020060883 | Suzuki | May 2002 | A1 |
20020071214 | Belser | Jun 2002 | A1 |
20020098426 | Sreenivasan et al. | Jul 2002 | A1 |
20020132482 | Chou | Sep 2002 | A1 |
20020135939 | Wada | Sep 2002 | A1 |
20020136927 | Hieda et al. | Sep 2002 | A1 |
20020167117 | Chou | Nov 2002 | A1 |
20020177319 | Chou | Nov 2002 | A1 |
20030022024 | Wachenschwanz | Jan 2003 | A1 |
20030030188 | Spengler | Feb 2003 | A1 |
20030034329 | Chou | Feb 2003 | A1 |
20030071016 | Shih et al. | Apr 2003 | A1 |
20030080471 | Chou | May 2003 | A1 |
20030080472 | Chou | May 2003 | A1 |
20030170995 | Chou | Sep 2003 | A1 |
20030170996 | Chou | Sep 2003 | A1 |
20040022387 | Weikle | Feb 2004 | A1 |
20040053146 | Sreenivasan et al. | Mar 2004 | A1 |
20040132301 | Harper et al. | Jul 2004 | A1 |
20040202793 | Harper et al. | Oct 2004 | A1 |
20040202865 | Homola et al. | Oct 2004 | A1 |
20040209123 | Bajorek et al. | Oct 2004 | A1 |
20040209470 | Bajorek | Oct 2004 | A1 |
20040238972 | Ho et al. | Dec 2004 | A1 |
20050036223 | Wachenschwanz et al. | Feb 2005 | A1 |
20050142990 | Homola | Jun 2005 | A1 |
20050146078 | Chou et al. | Jul 2005 | A1 |
20050150862 | Harper et al. | Jul 2005 | A1 |
20050151282 | Harper et al. | Jul 2005 | A1 |
20050151283 | Bajorek et al. | Jul 2005 | A1 |
20050151300 | Harper et al. | Jul 2005 | A1 |
20050155554 | Saito | Jul 2005 | A1 |
20050156342 | Harper et al. | Jul 2005 | A1 |
20050158163 | Harper et al. | Jul 2005 | A1 |
20050167867 | Bajorek et al. | Aug 2005 | A1 |
20050172848 | Olsson | Aug 2005 | A1 |
20050236738 | Harper | Oct 2005 | A1 |
20050263401 | Olsen et al. | Dec 2005 | A1 |
20060127522 | Chou | Jun 2006 | A1 |
20060147758 | Jung et al. | Jul 2006 | A1 |
20060181697 | Treves et al. | Aug 2006 | A1 |
20060207890 | Staud | Sep 2006 | A1 |
20070062396 | Takai et al. | Mar 2007 | A1 |
20070070549 | Suzuki et al. | Mar 2007 | A1 |
20070134362 | Heidari | Jun 2007 | A1 |
20070166651 | Fujita et al. | Jul 2007 | A1 |
20070211592 | Sakurai et al. | Sep 2007 | A1 |
20070245909 | Homola | Oct 2007 | A1 |
20080075845 | Sonobe et al. | Mar 2008 | A1 |
20080093760 | Harper et al. | Apr 2008 | A1 |
20080223237 | Ando et al. | Sep 2008 | A1 |
20080241307 | Kishi et al. | Oct 2008 | A1 |
20090117408 | Umezawa et al. | May 2009 | A1 |
20090136784 | Suzuki et al. | May 2009 | A1 |
20090169922 | Ishiyama | Jul 2009 | A1 |
20090191331 | Umezawa et al. | Jul 2009 | A1 |
20090202866 | Kim et al. | Aug 2009 | A1 |
20090311557 | Onoue et al. | Dec 2009 | A1 |
20100143752 | Ishibashi et al. | Jun 2010 | A1 |
20100190035 | Sonobe et al. | Jul 2010 | A1 |
20100196619 | Ishiyama | Aug 2010 | A1 |
20100196740 | Ayama et al. | Aug 2010 | A1 |
20100209601 | Shimokawa et al. | Aug 2010 | A1 |
20100215992 | Horikawa et al. | Aug 2010 | A1 |
20100232065 | Suzuki et al. | Sep 2010 | A1 |
20100247965 | Onoue | Sep 2010 | A1 |
20100261039 | Itoh et al. | Oct 2010 | A1 |
20100279151 | Sakamoto et al. | Nov 2010 | A1 |
20100300884 | Homola et al. | Dec 2010 | A1 |
20100304186 | Shimokawa | Dec 2010 | A1 |
20110097603 | Onoue | Apr 2011 | A1 |
20110097604 | Onoue | Apr 2011 | A1 |
20110171495 | Tachibana et al. | Jul 2011 | A1 |
20110206947 | Tachibana et al. | Aug 2011 | A1 |
20110212346 | Onoue et al. | Sep 2011 | A1 |
20110223446 | Onoue et al. | Sep 2011 | A1 |
20110244119 | Umezawa et al. | Oct 2011 | A1 |
20110299194 | Aniya et al. | Dec 2011 | A1 |
20110311841 | Saito et al. | Dec 2011 | A1 |
20120069466 | Okamoto et al. | Mar 2012 | A1 |
20120070692 | Sato et al. | Mar 2012 | A1 |
20120077060 | Ozawa | Mar 2012 | A1 |
20120127599 | Shimokawa et al. | May 2012 | A1 |
20120127601 | Suzuki et al. | May 2012 | A1 |
20120129009 | Sato et al. | May 2012 | A1 |
20120140359 | Tachibana | Jun 2012 | A1 |
20120141833 | Umezawa et al. | Jun 2012 | A1 |
20120141835 | Sakamoto | Jun 2012 | A1 |
20120148875 | Hamakubo et al. | Jun 2012 | A1 |
20120156523 | Seki et al. | Jun 2012 | A1 |
20120164488 | Shin et al. | Jun 2012 | A1 |
20120170152 | Sonobe et al. | Jul 2012 | A1 |
20120171369 | Koike et al. | Jul 2012 | A1 |
20120175243 | Fukuura et al. | Jul 2012 | A1 |
20120189872 | Umezawa et al. | Jul 2012 | A1 |
20120196049 | Azuma et al. | Aug 2012 | A1 |
20120207919 | Sakamoto et al. | Aug 2012 | A1 |
20120225217 | Itoh et al. | Sep 2012 | A1 |
20120251842 | Yuan et al. | Oct 2012 | A1 |
20120251846 | Desai et al. | Oct 2012 | A1 |
20120276417 | Shimokawa et al. | Nov 2012 | A1 |
20120308722 | Suzuki et al. | Dec 2012 | A1 |
20130040167 | Alagarsamy et al. | Feb 2013 | A1 |
20130071694 | Srinivasan et al. | Mar 2013 | A1 |
20130165029 | Sun et al. | Jun 2013 | A1 |
20130175252 | Bourez | Jul 2013 | A1 |
20130216865 | Yasumori et al. | Aug 2013 | A1 |
20130230647 | Onoue et al. | Sep 2013 | A1 |
20130314815 | Yuan et al. | Nov 2013 | A1 |
20140011054 | Suzuki | Jan 2014 | A1 |
20140044992 | Onoue | Feb 2014 | A1 |
20140050843 | Yi et al. | Feb 2014 | A1 |
20140151360 | Landdell et al. | Jun 2014 | A1 |
20140234666 | Knigge et al. | Aug 2014 | A1 |
Number | Date | Country |
---|---|---|
2444627 | Nov 2008 | GB |
04209376 | Jul 1992 | JP |
H07186194 | Jul 1995 | JP |
H08124223 | May 1996 | JP |
2003-291178 | Oct 2003 | JP |
9801890 | Jan 1998 | WO |
0048172 | Aug 2000 | WO |
0050321 | Aug 2000 | WO |
0142858 | Dec 2000 | WO |
Entry |
---|
Office Action dated Dec. 18, 2013 from U.S. Appl. No. 12/614,355, 6 pages. |
Office Action dated Dec. 8, 2014 from U.S. Appl. No. 13/791,282, 32 pgs. |
Office Action dated Dec. 9, 2014 from U.S. Appl. No. 13/791,296, 32 pges. |
Notice of Allowance, dated Oct. 7, 2014, U.S. Appl. No. 12/614,355, 5 pgs. |
Final Office Action dated Jun. 9, 2014, U.S. Appl. No. 12/614,355, 6 pgs. |
David Treves, et al., U.S. Appl. No. 13/791,296, filed Mar. 8, 2013, 55 pgs. |
David Treves, et al., U.S. Appl. No. 13/791,282, filed Mar. 8, 2013, 54 pgs. |
Final Office Action dated Apr. 17, 2015 from U.S. Appl. No. 13/791,282, 11 pgs. |
Notice of Allowance dated Apr. 29, 2015, from U.S. Appl. No. 13/791,296 , 12 pgs. |
Notice of Allowance dated Jun. 22, 2015, from U.S. Appl. No. 13/791,282 , 8 pgs. |
Brian Faircloth et al., “Bilayer, Nanoimprint Lithography”, J. Vac. Sci. Technol.B 18(4), Jul./Aug. 2000, 2000 American Vacuum Society, pp. 1-8. |
Matsui, S. et al., “Room Temperature Replication in Spin on Glass by Nanoimprint Technology”, J. Vac. Sci. Technol. B, vol. 19, No. 6, Nov./Dec. 2001, pp. 2801-2805. |
Wu et al., “Large Area High Density Quantized Magnetic Disks Fabricated Using Nanoimprint Lithography”, J. Vac. Sci. Technol. B vol. 16, No. 6, Nov./Dec. 1998, pp. 3825-3829. |
U.S. Appl. No. 12/614,367, filed Nov. 6, 2009, 59 pages. |
U.S. Appl. No. 12/614,355, filed Nov. 6, 2009, 57 pages. |
U.S. Appl. No. 12/614,343, filed Nov. 6, 2009, 57 pages. |
U.S. Appl. No. 12/614,334, filed Nov. 6, 2009, 57 pages. |
Office Action dated Apr. 11, 2012, from U.S. Appl. No. 12/614,367 38 pages. |
Office Action dated Mar. 20, 2012, from U.S. Appl. No. 12/614,334 8 pages. |
Final Office Action dated Jul. 26, 2012 from U.S. Appl. No. 12/614,367, 16 pages. |
Office Action dated Sep. 18, 2012 from U.S. Appl. No. 12/614,434, 10 pages. |
Office Action dated Mar. 26, 2013, from U.S. Appl. No. 12/614,355 6 pages. |
Notice of Allowance dated Mar. 28, 2013, from U.S. Appl. No. 12/614,343 43 pages. |
Office Action dated Sep. 19, 2013 from U.S. Appl. No. 12/614,355 37 pages. |
Notice of Allowance dated Nov. 21, 2012, from U.S. Appl. No. 12/614,334 5 pages. |
Number | Date | Country | |
---|---|---|---|
Parent | 12614343 | Nov 2009 | US |
Child | 13929390 | US |