Number | Date | Country | Kind |
---|---|---|---|
44 41 903.1 | Nov 1994 | DEX |
Filing Document | Filing Date | Country | Kind | 102e Date | 371c Date |
---|---|---|---|---|---|
PCT/DE95/01587 | 11/15/1995 | 5/22/1997 | 5/22/1997 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO96/16319 | 5/30/1996 |
Number | Name | Date | Kind |
---|---|---|---|
4332000 | Petersen | May 1982 | |
4665610 | Barth | May 1987 | |
4831492 | Kuisma | May 1989 | |
5095401 | Zavracky et al. | Mar 1992 |
Number | Date | Country |
---|---|---|
1 229 323 | Nov 1966 | DEX |
34 45 774 A1 | Jul 1985 | DEX |
36 23 561 A1 | Jan 1988 | DEX |
44 10 631 A1 | Oct 1994 | DEX |
Entry |
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Industriellen-Messtechnik, IBM Composer pp. 11-12 Dec. 1983--Professor Dr. P. Profos. |
Application of Electrostatic Feedback To Critical Damping of an Integrated Silicon Capacitive Accelerometer--Sensors and Actuators A, 43 (1994) 100-106--R.P. van Kampen et al. |