| Number | Date | Country | Kind |
|---|---|---|---|
| 197 28 029 | Jul 1997 | DE |
| Number | Name | Date | Kind |
|---|---|---|---|
| 1812294 | Hohn | Jun 1931 | |
| 2177967 | Watkins | Oct 1939 | |
| 4533291 | Nishida | Aug 1985 | |
| 4981074 | Machita et al. | Jan 1991 | |
| 5232505 | Novak et al. | Aug 1993 | |
| 5374158 | Tessier et al. | Dec 1994 |
| Number | Date | Country |
|---|---|---|
| 2406979 | Feb 1974 | DE |
| 2410266 | Sep 1975 | DE |
| 3540032A1 | Nov 1985 | DE |
| 0398799 | Nov 1990 | EP |
| 0097972 | Aug 1979 | JP |
| 5-277427 | Oct 1993 | JP |
| Entry |
|---|
| Abraham and Fegley, “Automatic Wafer Transfer and Turnover Tool”, Western Electric Technical Digest, Jan. 1978. |