| Number | Date | Country | Kind |
|---|---|---|---|
| 67857 A/81 | Jun 1981 | ITX |
| Number | Name | Date | Kind |
|---|---|---|---|
| 3791714 | Maurer | Feb 1974 | |
| 3826560 | Schultz | Jul 1974 | |
| 3865647 | Reuschel | Feb 1975 |
| Number | Date | Country |
|---|---|---|
| 54-48256 | Apr 1979 | JPX |
| Entry |
|---|
| Kato et al, "Isotopic Chemical Vapor Deposition . . . ", Applied Optics, vol. 16, No. 6, Jun. 1977, pp. 1453-1454. |