Claims
- 1. A process, comprising the sequential steps of:passing first gaseous products comprising organic compounds into a gas-fluid contactor through an entrance tube, directing a solution comprising water or water and acid into the gas-fluid contactor to treat the products, and passing the solution and treated products through the contactor into a reservoir; halting the flow of the solution into the contactor; performing a first flush of the gas-fluid contactor with water; drying the gas-fluid contactor with a first gas; passing second gaseous products comprising at least one chlorine-containing gas into the gas-fluid contactor through the entrance tube, and passing at least a portion of the second gaseous products from the contactor into a caustic scrubber while maintaining a flow of second gas into the contactor, the second gas being the same as or different from the first gas; and performing a second flush of the gas-fluid contactor with water.
- 2. The process of claim 1, wherein the entrance tube is heated to at least 325° C. while the first and the second gaseous products are passed through the entrance tube.
- 3. The process of claim 1, wherein the first and second gases are dry nitrogen.
- 4. The process of claim 1, wherein the acid has a pKa equal to or less than the pKa of acetic acid.
- 5. The process of claim 1, wherein the solution is directed into the contactor by a spray nozzle.
- 6. The process of claim 1, further comprising a step of directing at least a portion of the solution comprising treated products into a thermal oxidizer.
- 7. The process of claim 1, further comprising a step of directing vapor from the reservoir into a thermal oxidizer.
- 8. The process of claim 1, wherein the material resulting from the second flushing step is flushed into a holding tank.
- 9. An apparatus for treating by-products of a fabricating process, comprising:a gas-fluid contactor comprising an entrance tube, the tube capable of being heated to at least 150° C.; a reservoir comprising a solution that comprises water, or water and acid; a first connection that directs material from the contactor into the reservoir and a second connection that directs solution from the reservoir to the contactor; a source of gas connected to the contactor; a source of water connected to the contactor; a caustic scrubber connected to the contactor by a third connection.
- 10. The apparatus of claim 9, wherein the gas is dry nitrogen.
- 11. The apparatus of claim 10, wherein the dry nitrogen gas and the water source are connected to the second connection.
- 12. The apparatus of claim 9, wherein the gas-fluid contactor comprises a spray nozzle.
- 13. The apparatus of claim 12, wherein the contactor further comprises packing.
- 14. The apparatus of claim 13, wherein the packing comprises Raschig rings.
- 15. The apparatus of claim 9, wherein the contactor is formed from a material selected from quartz and high-nickel corrosion-resistant alloys.
- 16. The apparatus of claim 9, wherein the second connection comprises at least one pump to direct the solution to the contactor.
- 17. The apparatus of claim 9, wherein the entrance tube is heated by a surrounding furnace or by wrapping of resistive heating wire or tape.
- 18. The apparatus of claim 9, wherein a connection between the entrance tube and a dehydroxylation reactor comprises two quartz ball and socket joints attached to opposing ends of a length of tubing.
CROSS-REFERENCE TO RELATED APPLICATION
This application claims priority of Provisional Application Ser. No. 60/157,279 which was filed Oct. 1, 1999.
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Provisional Applications (1)
|
Number |
Date |
Country |
|
60/157279 |
Oct 1999 |
US |