Claims
- 1. In a process for marking semiconductor surfaces with a bar code (Sk) having narrow bars (sSt) and wide bars (bSt) separated one from the other by a narrow gap (sL) or a wide gap (bL), said process comprising producing by laser bombardment with a softmark technique a plurality of parallel bar elements (Se), forming each bar element by a series of overlapping softmark melting points (SSp), applying the melting points (SSp) of the bar elements (Se) at a depth of less than 2 micrometers, and controlling the laser bombardment with respect to time so that, when producing one of the softmark melting points (SSp), the previously produced softmark melting point is at least partially hardened so as to maintain a contour of the previously produced softmark melting point.
- 2. The process of claim 1, wherein the bar elements (Se) of the wide bars (bSt) are applied at a distance (a) of less than 15 .mu.m relative to one another.
- 3. The process of claim 1, wherein the bar elements (Se) are applied with a width (b) of less than 15 .mu.m.
- 4. The process of claim 1, wherein the softmark melting points (SSp) are produced with a pulsed Nd-YAG laser.
- 5. The process of claim 4, wherein an output-stabilized, frequency doubled Nd-YAG laser is used.
- 6. The process of claim 1, wherein each of said narrow bars (sSt) is formed by a number n of said bar elements (Se) of equal width (b) and each of said wide bars (bSt) is formed by a number m of said bar elements (Se) of equal width (b), said bar elements (Se) of said wide bars being spaced a distance (a) from each other, wherein m and n are whole numbers and m>n.
- 7. The process of claim 6, wherein each of said wide bars (bSt) is formed by two parallel ones of said bar elements (Se) and each of said small bars is formed by one of said bar elements (Se).
Priority Claims (1)
Number |
Date |
Country |
Kind |
3719983 |
Jun 1987 |
DEX |
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Parent Case Info
This application is a continuation of application Ser. No. 327,962, filed Feb. 15, 1989 now abandoned.
PCT Information
Filing Document |
Filing Date |
Country |
Kind |
102e Date |
371c Date |
PCT/DE88/00357 |
6/15/1987 |
|
|
2/15/1989 |
2/15/1989 |
Publishing Document |
Publishing Date |
Country |
Kind |
WO88/10475 |
12/29/1988 |
|
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US Referenced Citations (3)
Continuations (1)
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Number |
Date |
Country |
Parent |
327962 |
Feb 1989 |
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