Claims
- 1. A magnetic thin film head comprising:
a) a substrate; b) at least one magnetic pole disposed on a surface of the substrate; and c) an encapsulation/planarizing layer disposed on the surface of the substrate, wherein the encapsulation/planarizing layer is formed by:
i) applying an encapsulation/planarizing material over a patterned structure on the surface of the substrate; ii) curing the encapsulation/planarizing material with energetic particles; and iii) Polishing the encapsulation/planarizing material.
- 2. The magnetic thin film head of claim 1, wherein the magnetic pole is disposed on top of other poles.
- 3. The magnetic thin film head of claim 1, wherein the patterned structure includes one or more poles, coils, heads or sensors.
- 4. The magnetic thin film head of claim 1, wherein the encapsulation/planarizing material comprises an insulating material chosen from the group consisting of silicon oxide, aluminum oxide, titanium oxide, tantalum oxide, and zirconium oxide.
- 5. The magnetic thin film head of claim 1, wherein the encapsulation/planarizing material comprises an insulating material selected from the group consisting of inorganic and inorganic/organic polymers which crosslink upon exposure to the energetic particles.
- 6. The magnetic thin film head of claim 5, wherein the polymers are made from sol-gel processes of hydrolysis of orthosilicate esters.
- 7. The magnetic thin film head of claim 5, wherein the polymers are made from sol-gel processes of co-hydrolysis of orthosilicates with aryl or alkyl substituted silyl precursors, and organosubstituted silicates containing one or two organic substituents selected from the group consisting of hydrido, linear alkyl, branched alkyl, fluoroalkyl, aryl, arylalkyl, and heteroaromatic.
- 8. The magnetic thin film head of claim 7, wherein leaving groups in the hydrolysis are substituents selected from the group consisting of hydroxy, alkoxy, halo, acetoxy, sulfonate, and fluorosulfonate.
- 9. The magnetic thin film head of claim 7, wherein the polymers include multifunctional hydrolytically labile precursors derived from Al, Ti, Zr or Ta.
- 10. The magnetic thin film head of claim 1, wherein the encapsulation/planarizing material comprises high temperature crosslinking organic polymers selected from the group consisting of poly(arylene ethers), polyarylenes, polybenzocyclobutenes, functionalized poly(norbonenes), vinyl addition polymers, and soluble polyimides.
- 11. The magnetic thin film head of claim 10, wherein the soluble polyimides are low molecular weight oligomers functionalized at the chain ends with crosslinkable functional groups.
- 12. The magnetic thin film head of claim 11, wherein the crosslinkable functional groups are selected from the group consisting of ethynyl, arylethynyl, benzocyclobutenyl, and trialkoxy.
- 13. The magnetic thin film head of claim 10, wherein crosslinking organic polymers comprises fully cyclized soluble condensation polymers selected from the group consisting of polybenzoimidazoles, polybenzoxazoles, polybenzothiazoles, polyquinolines, and polyquinoxalines.
- 14. The magnetic thin film head of claim 13, wherein the polymers are substituted in the main chain or at the chain ends with crosslinking functionality.
- 15. A disk drive system comprises:
a) a magnetic recording disk; b) a magnetic thin film head; and c) an actuator for moving the magnetic head across the magnetic recording disk wherein the magnetic head comprising:
i) a substrate; ii) at least one magnetic pole disposed on a surface of the substrate; and iii) an encapsulation/planarizing layer disposed on the surface of the substrate, wherein the encapsulation/planarizing layer is formed by: iv) applying an encapsulation/planarizing material over a patterned structure on a surface of the substrate; v) curing the encapsulation/planarizing material with energetic particles; and vi) polishing the encapsulation/planarizing material.
- 16. The disk drive system of claim 15, wherein the magnetic pole is disposed on top of other poles.
Parent Case Info
[0001] This application is a divisional of U.S. patent application Ser. No. 09/614,062 filed on Jul. 11, 2000.
Divisions (1)
|
Number |
Date |
Country |
Parent |
09614062 |
Jul 2000 |
US |
Child |
10684035 |
Oct 2003 |
US |