Number | Date | Country | Kind |
---|---|---|---|
2-132247 | May 1990 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3946076 | Paasen et al. | Mar 1976 | |
4308366 | Millet | Dec 1981 | |
4356293 | Deubzer et al. | Oct 1982 | |
4526954 | Williams | Jul 1985 | |
4625011 | Kosal et al. | Nov 1986 | |
4831265 | Watanabe et al. | May 1989 |
Entry |
---|
Noll, Walter, "Chemistry and Technology of Silicons" 1968, pp. 211-217, and 226-227. |