| Number | Date | Country | Kind |
|---|---|---|---|
| 28250 A/79 | Dec 1979 | ITX |
| Number | Name | Date | Kind |
|---|---|---|---|
| 4005004 | Seko et al. | Jan 1977 | |
| 4112140 | Heikel et al. | Sep 1978 | |
| 4122240 | Banas et al. | Oct 1978 | |
| 4212900 | Serlin | Jul 1980 |
| Number | Date | Country |
|---|---|---|
| 573556 | Apr 1959 | CAX |
| 52-129942 | Feb 1977 | JPX |
| Entry |
|---|
| Vossen et al., Thin Film Processes, Academic Press, NY, 1978, pp. 282-297. |
| Chang, IBM Tech. Dis. Bul., vol. 20, No. 6, Nov. 1977. |