Claims
- 1. A process for producing a minute-patterned substrate comprising the steps of
- forming a coating film of a solution containing a metal-organic compound and a thickener on a substrate,
- pressing a mold against the coating film on the substrate in an atmosphere of a pressure of 0.0133 Pa or below,
- initiating heating of the coating film subsequent to initiation of pressing of the mold against the coating film on the substrate,
- heating the coating film to a temperature of from 40.degree. to 250.degree. C. to set up the coating film, the heating carried out while still pressing the mold. against the coating film in an atmosphere of a pressure of 0.0133 Pa or below.
- separating the mold from the coating film thus set up, and
- baking the set coating film on the substrate at a temperature of 300.degree. C. or above.
- 2. The process as set forth in claim 1, wherein the pressing of the mold against the coating film on the substrate is started from an arbitrary end and proceeds toward other portions.
- 3. The process as set forth in claim 1, wherein the substrate and the mold are of disklike shape, and the pressing of the mold against the coating film on the substrate is started from a central portion of the disklike shapes of the mold and the substrate and proceeds radially outwards in an axisymmetrical manner.
- 4. The process as set forth in claim 1, wherein the amount of the thickener in the solution is from 0.25 to 1.8 times the weight of an oxide to be formed by the baking of the solution.
- 5. The process as set forth in claim 1, wherein the thickener is a chain polyether.
- 6. The process as set forth in claim 1, wherein the pressing is carried out with a pressure of 9.8 N/cm.sup.2 or above.
Priority Claims (1)
Number |
Date |
Country |
Kind |
2-156482 |
Jun 1990 |
JPX |
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Parent Case Info
This is a continuation of application Ser. No. 713,799, filed Jun. 12, 1991, now abandoned.
US Referenced Citations (5)
Foreign Referenced Citations (2)
Number |
Date |
Country |
62-102445 |
May 1987 |
JPX |
1-119545 |
May 1989 |
JPX |
Continuations (1)
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Number |
Date |
Country |
Parent |
713799 |
Jun 1991 |
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