Number | Name | Date | Kind |
---|---|---|---|
4783826 | Koso | Nov 1988 | |
4805123 | Specht et al. | Feb 1989 | |
4893346 | Bishop | Jan 1990 | |
4926489 | Danielson et al. | May 1990 | |
4962541 | Doi et al. | Oct 1990 | |
5125040 | Matsui et al. | Jun 1992 |
Number | Date | Country |
---|---|---|
0163264 | Dec 1985 | EPX |
0354031 | Feb 1990 | EPX |
Entry |
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S. Takeuchi et al., "Advanced 5x Reticle Inspection Technologies for ULSI Devices", pp. 195-204, 1990, Integrated Circuit Metrology, Inspection, and Process Control IV, SPIE vol. 1261. |