Number | Date | Country | Kind |
---|---|---|---|
196 49 367 | Nov 1996 | DEX |
Filing Document | Filing Date | Country | Kind | 102e Date | 371c Date |
---|---|---|---|---|---|
PCT/DE97/02751 | 11/24/1997 | 5/27/1999 | 5/27/1999 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO98/23935 | 6/4/1998 |
Number | Name | Date | Kind |
---|---|---|---|
5095401 | Zavracky et al. | Mar 1992 | |
5596219 | Hierold | Jan 1997 | |
5760455 | Hierold et al. | Jun 1998 |
Number | Date | Country |
---|---|---|
0 714 017 A1 | May 1996 | EPX |
0 732 594 A1 | Sep 1996 | EPX |
42 23 455 A1 | Oct 1993 | DEX |
44 18 207 C1 | Jun 1995 | DEX |
Entry |
---|
Howe, "Surface micromachining for microsensors and microactuators", J. Vac. Sci. Technol., 1988 American Vacuum Society, pp. 1809-1813. |
Japanese abstracts, Publication No. 01013773, Publication Date Jan. 18, 1989. |