Claims
- 1. A plant for the implementation of a process for the preparation of an ultrapure hydrogen peroxide solution, comprising a source of a hydrogen peroxide solution to be purified, at least two beds of cation-exchange adsorbents (CEA) and at least two beds of anion-exchange adsorbents (AEA), said beds being connected to allow the hydrogen peroxide solution to be purified to be successively passed therethrough according to the sequence:AEA→CEA→AEA→CEA, wherein said beds of anion-exchange adsorbents (AEA) are connected to be fed with the hydrogen peroxide solution in an upward mode and said beds of cation-exchange adsorbents (CEA) are connected to be fed with the hydrogen peroxide solution in a downward mode, and a distillation/concentration apparatus and a low-temperature crystallization purification apparatus for pretreatment of the hydrogen peroxide to be purified prior to said sequence, wherein said plant is connected to a point of use of the ultrapure hydrogen peroxide solution.
- 2. The plant according to claim 1, wherein the point of use of the ultrapure hydrogen peroxide solution is for the manufacture of electronic components.
Priority Claims (1)
Number |
Date |
Country |
Kind |
97 06470 |
May 1997 |
FR |
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CROSS-REFERENCE TO RELATED APPLICATION
This application is a continuation application of patent application Ser. No. 08/867,961, filed Jun. 3, 1997, U.S. Pat. No. 5,961,947.
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Continuations (1)
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Number |
Date |
Country |
Parent |
08/867961 |
Jun 1997 |
US |
Child |
09/273755 |
|
US |