Claims
- 1. A plant for preparation of an ultrapure hydrogen peroxide solution, comprising a source of a hydrogen peroxide solution to be purified, at least one bed of anion-exchange adsorbents and at least one bed of cation-exchange adsorbents, said beds being connected to allow at least one sequence which includes passing the hydrogen peroxide solution to be purified successively through at least one bed of anion-exchange adsorbents followed by at least one bed of cation-exchange adsorbents, and to allow a non-zero proportion of the solution exiting from said at least one sequence to be recycled to a point upstream of the first bed of said at least one sequence, said plant being connected to a point of use of the ultrapure hydrogen peroxide solution.
- 2. The plant according to claim 1, wherein the at least one bed of anion-exchange adsorbents is connected to be fed by the solution to be purified in an upward mode and the at least one bed of cation-exchange adsorbents is connected to be fed by the solution to be purified in a downward mode.
- 3. The plant according to claim 1, wherein the plant is situated on the site of use of the ultrapure hydrogen peroxide solution.
- 4. The plant according to claim 3, wherein the site of use is a site for the manufacture of electronic components.
- 5. The plant according to claim 1, further comprising a distillation/concentration apparatus and a low temperature crystallization purification apparatus connected between said source of hydrogen peroxide to be purified and said at least one sequence.
Priority Claims (1)
Number |
Date |
Country |
Kind |
97 06471 |
May 1997 |
FR |
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Parent Case Info
This application is a continuation, of Application Ser. No. 08/867,960, filed Jun. 3, 1997.
US Referenced Citations (5)
Number |
Name |
Date |
Kind |
3074782 |
Meeker et al. |
Jan 1963 |
|
4999179 |
Sugihara et al. |
Mar 1991 |
|
5397475 |
Millar et al. |
Mar 1995 |
|
5733521 |
Minamikawa et al. |
Mar 1998 |
|
5928621 |
Ledon et al. |
Jul 1999 |
|
Foreign Referenced Citations (3)
Number |
Date |
Country |
774 442 |
Oct 1996 |
EP |
2 056 314 |
Aug 1980 |
GB |
WO9639237 |
Dec 1996 |
WO |
Continuations (1)
|
Number |
Date |
Country |
Parent |
08/867960 |
Jun 1997 |
US |
Child |
09/275819 |
|
US |