Process shield for a substrate processing chamber

Abstract

Description

FIG. 1 is a top isometric view of a process shield for a substrate processing chamber, showing our new design;

FIG. 2 is a bottom isometric view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a front elevation view thereof;

FIG. 6 is a back elevation view thereof;

FIG. 7 is a left side elevation view thereof;

FIG. 8 is a right side elevation view thereof; and,

FIG. 9 is an enlarged cross sectional view taken along line 9-9 in FIG. 3.

The dashed lines in FIGS. 1-9 represent unclaimed environment forming no part of the claimed design.

Claims

The ornamental design for a process shield for a substrate processing chamber, as shown and described.