| Number | Date | Country | Kind |
|---|---|---|---|
| 9421940 | Nov 1994 | GBX |
| Number | Name | Date | Kind |
|---|---|---|---|
| 3630213 | Bruno et al. | Dec 1971 | |
| 4733260 | Kubo et al. | Mar 1988 | |
| 4827309 | Kato | May 1989 | |
| 5329331 | Hatori et al. | Jul 1994 |
| Number | Date | Country |
|---|---|---|
| 620495 | Oct 1994 | EPX |
| 1078872 | Mar 1960 | DEX |
| 1178707 | Sep 1964 | DEX |
| 2 102 700 | Feb 1983 | GBX |
| Entry |
|---|
| The Equipment for LCD, Developing, Etching, Stripping Devices by Yoichi Fuse, Semiconductor World 1995, pp. 142-146. |