TREA

Processing machine for electron beam lithography system

Follow

Information

  • Patent Grant
  • D352910
  • Patent Number
    D352,910
  • Date Filed
    Monday, February 8, 1993
    31 years ago
  • Date Issued
    Tuesday, November 29, 1994
    29 years ago
  • US Classifications
    Field of Search
    • US
    • 219 12125
    • 219 12127
    • 250 4922
    • 250 49222
    • 250 49223
    • 250 4923
    • 250 306
    • 250 307
    • 250 310
    • 250 396 R
    • D15 199
    • D10 46
    • D10 75
    • D14 100
    • D14 102
    • D14 106
    • D18 50
    • Term of Grant
      14Years
Information
Abstract
Description
Claims
  • The ornamental design for a processing machine for electron beam lithography system, as shown.
Priority Claims (1)
Number Date Country Kind
34701/1992 Nov 1992 JPX
US Referenced Citations (4)
Number Name Date Kind
D179493 Saekler Jan 1957
D185069 Crowle May 1959
D210284 Kerwin Feb 1968
D237209 Faraco, Jr. Oct 1975