Processing machine for electron beam lithography system

Information

  • Patent Grant
  • D352911
  • Patent Number
    D352,911
  • Date Filed
    Monday, February 8, 1993
    31 years ago
  • Date Issued
    Tuesday, November 29, 1994
    29 years ago
Abstract
Description
Claims
  • The ornamental design for a processing machine for electron beam lithography system, as shown and described.
Priority Claims (1)
Number Date Country Kind
34703/1992 Nov 1992 JPX
US Referenced Citations (2)
Number Name Date Kind
D342909 Marchais Jan 1994
D344719 Wang et al. Mar 1994