Number | Date | Country | Kind |
---|---|---|---|
6-291310 | Nov 1994 | JP |
This application is a division of application Ser. No. 08/561,868 filed Nov. 22, 1995, now U.S. Pat. No. 5,996,488.
Number | Name | Date | Kind |
---|---|---|---|
4209551 | Masaki et al. | Jun 1980 | A |
4479432 | Masaki et al. | Oct 1984 | A |
4904895 | Tsukamoto et al. | Feb 1990 | A |
4956578 | Shimizu et al. | Sep 1990 | A |
5066883 | Yoshioka et al. | Nov 1991 | A |
5127330 | Okazaki et al. | Jul 1992 | A |
5201268 | Yamamoto et al. | Apr 1993 | A |
5272980 | Takeuchi et al. | Dec 1993 | A |
5312643 | Yamamoto et al. | May 1994 | A |
5362513 | Shimada et al. | Nov 1994 | A |
5366760 | Fujii et al. | Nov 1994 | A |
5650795 | Banno et al. | Jul 1997 | A |
5654607 | Yamaguchi et al. | Aug 1997 | A |
5838097 | Kasanuki et al. | Nov 1998 | A |
5996488 | Yanagisawa et al. | Dec 1999 | A |
6017259 | Motoi et al. | Jan 2000 | A |
Number | Date | Country |
---|---|---|
0620581 | Oct 1994 | EP |
2066159 | Jul 1981 | GB |
183283 | Oct 1983 | JP |
191188 | Nov 1983 | JP |
280495 | Oct 1992 | JP |
04-290295 | Oct 1992 | JP |
241172 | Sep 1993 | JP |
Entry |
---|
M.I. Elinson et al., Radio Engineering and Electronic Physics, v. 10, pp. 1290-1296, Jul. 1965. |
G. Dittmer, Thin Solid Films, v. 9, pp. 317-328, 1972. |
M. Hartell et al., International Electron Devices Meeting, Washington D.C., 1975, IEDM Technical Digest, pp. 519-521. |
H. Araki et al., Journal of the Vacuum Society of Japan, v. 26, No. 1, pp. 22-29, 1983. |