Production line of liquid crystal display device having shield of UV blocking material

Information

  • Patent Grant
  • 6741322
  • Patent Number
    6,741,322
  • Date Filed
    Monday, October 7, 2002
    22 years ago
  • Date Issued
    Tuesday, May 25, 2004
    20 years ago
Abstract
A production line for manufacture of a LCD device having a plurality of processing devices includes a production line shield being formed of a UV blocking material and positioned along a sealant forming device and an attaching device and between the sealant forming device and the attaching a device; and at least one work lamp that irradiates light in a band other than an ultraviolet band. A UV blocking lamp may be provided above the production line shield. Thus, a sealant is not prematurely hardened, so that the lower substrate is effectively bonded to the upper substrate, and a desired cell gap is maintained between the lower and upper substrates.
Description




BACKGROUND OF THE INVENTION




1. Field of the Invention




The present invention relates to a production line for manufacturing a liquid crystal display (LCD) device, and more particularly, to a production line of an LCD device based on a liquid crystal dispensing method.




2. Discussion of the Related Art




Generally, ultra thin sized flat panel displays having a display screen with a thickness of several centimeters or less, and in particular, flat panel LCD devices, are widely used in monitors for notebook computers, spacecraft, and aircraft because such LCD devices have low power consumption because of a low driving voltage and are easy to carry.




Such LCD devices include a lower substrate, an upper substrate and a liquid crystal layer. A thin film transistor (TFT) and a pixel electrode are formed on the lower substrate. A light-shielding layer, a color filter layer and a common electrode are formed on the upper substrate, which is opposite to the lower substrate. Then, the liquid crystal layer is formed between the lower and upper substrates. In operation, an electric field is generated between the lower and upper substrates by the pixel and common electrodes, so that the alignment of molecules in the liquid crystal layer is driven by the electric field. Transmissivity of light through the liquid crystal layer is controlled with driving the liquid crystal layer, thereby displaying an image.




In manufacturing this LCD device, a vacuum injection method based on capillary phenomenon and pressure difference has been conventionally used to form the liquid crystal layer between lower and upper substrates. However, such a vacuum injection method has a problem in that it takes a long time to inject the liquid crystal due to the large sized display area, thereby reducing the productivity.




A liquid crystal dispensing method has been proposed to solve such a problem. A prior art method for manufacturing an LCD device based on the liquid crystal dispensing method will be explained with reference to

FIG. 1A

to FIG.


1


D.




As illustrated in

FIG. 1A

, a lower substrate


1


and an upper substrate


3


are prepared. Although not shown in drawings, a plurality of gate and data lines are formed on the lower substrate


1


. The gate lines cross the data lines to define pixel regions. A thin film transistor (TFT) is formed at each crossing point between the gate and data lines. A pixel electrode connected with the thin film transistor is formed in the pixel region.




A light-shielding layer is formed on the upper substrate


3


to prevent light from leaking out from the gate and data lines and the thin film transistor. Color filter layers of red(R), green(G), and blue(B) are formed on the light-shielding layer, and a common electrode is formed on the color filter layers. An alignment layer is formed on at least one of the lower substrate


1


and the upper substrate


3


to initially align molecules in a liquid crystal to be interposed between the upper and lower substrates


1


and


3


.




As shown in

FIG. 1B

, a sealant


7


is formed on the lower substrate


1


and a liquid crystal


5


is dropped thereon, so that a liquid crystal layer is formed. A spacer (not shown) is spread onto the upper substrate


3


to maintain a cell gap between the upper and lower substrates


1


and


3


.




In manufacturing an LCD device according to the vacuum injection method, the liquid crystal is injected between the substrates after bonding the substrates to each other. However, in manufacturing an LCD device according to the liquid crystal dispensing method, the lower and upper substrates


1


,


3


are bonded to each other after dispensing the liquid crystal


5


onto the substrates. Therefore, if a heat-hardening sealant is used as the sealant


7


in the LCD device according to the liquid crystal dispensing method, the sealant


7


may flow out of the substrate when it is heated. For this reason, a problem arises in that the liquid crystal


5


is contaminated. Accordingly, in the method of manufacturing the LCD based on the liquid crystal dispensing method, a UV-hardening sealant is used as the sealant


7


instead of a heat-hardening sealant.




Referring to

FIG. 1C

, the lower substrate


1


is attached to the upper substrate


3


.




Referring to

FIG. 1D

, UV light is irradiated from a UV irradiating device


9


so that the sealant


7


is hardened, thereby bonding the lower substrate


1


and the upper substrate


3


to each other.




In manufacturing the LCD device based on the liquid crystal dispensing method, after attaching the lower substrate to the upper substrate, the sealant


7


formed on the lower substrate


1


is hardened in a UV irradiating process and the lower substrate


1


is bonded to the upper substrate


3


. Accordingly, if the sealant formed on the lower substrate


1


is hardened before attaching the lower and upper substrates to each other, the lower substrate


1


is not bonded to the upper substrate


3


perfectly.




A production line of the LCD device based on the prior art liquid crystal dispensing method will be explained as follows.




First, the lower substrate having the TFT and the pixel electrode is loaded to a first loading device and then is moved to a sealant forming device and a liquid crystal dispensing device. Then the sealant and the liquid crystal layer are formed on the lower substrate. The upper substrate having the light-shielding layer, the color filter layer and the common electrode is loaded to a second loading device and is moved to a spacer scattering device, thereby forming a spacer on the upper substrate. The lower and upper substrates are moved to an attaching device and are attached to each other. After that, the attached substrates are moved to the UV irradiating device to harden the sealant, thereby bonding the lower and upper substrates to each other.




At this time, a cover is provided to an upper space of each device and a line between the devices. The cover is made of a transparent material for being watched by an operator. The top of the cover is opened so that dust generated during manufacturing the LCD device are discharged through the top of the cover. Also, a lamp is provided above the devices for manufacturing the LCD. If UV light is irradiated on the substrates through the cover and the upper space where the cover is not formed, the sealant may be hardened before arriving in the attaching device, so that the lower and upper substrates are not bonded perfectly.




SUMMARY OF THE INVENTION




Accordingly, the present invention is directed to a production line for manufacturing an LCD device that substantially obviates one or more problems due to limitations and disadvantages of the related art.




An advantage of the present invention is to provide a production line for the manufacture of an LCD device, in which a sealant is not hardened until arriving in an attaching device.




Additional advantages and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention. These and other advantages of the invention may be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.




To achieve these and other advantages and in accordance with the purpose of the invention, as embodied and broadly described herein, a production line of an LCD device according to the preferred embodiments of the present invention includes a production line shield being formed of a UV blocking material and positioned along a sealant forming device and an attaching device and between the sealant forming device and the attaching device; and at least one work lamp that irradiates light in a band other than an ultraviolet band.




If the work lamp is provided in the entire production line, the aforementioned problem is not generated. However, it has a problem in that an operator cannot watch process steps of a production line since the brightness of the work lamp is low.




Accordingly, in the production line according to the present invention, the work lamp is provided in an upper space from the sealant forming device to the attaching device, so that the UV light is not irradiated to a production line cover having an opened top.




In order to improve the brightness of the production line, an ordinary lamp is provided in the production line except for the UV blocking work lamp. Also, a production line cover of a UV blocking material is provided from the sealant forming device to the attaching device so as to prevent the UV light of the ordinary lamp from being irradiated to the sealant of the substrate.




It is to be understood that both the foregoing general description and the following detailed description of the present invention are exemplary and explanatory and are intended to provide further explanation of the invention as claimed.











BRIEF DESCRIPTION OF THE DRAWINGS




The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principle of the invention.




In the drawings:





FIG. 1

illustrates a perspective view for showing manufacturing process steps of an LCD device according to a prior art liquid crystal dispensing method;





FIG. 2

illustrates a layout for showing a production line of an LCD device according to the first embodiment of the present invention;





FIG. 3

illustrates a layout for showing a production line of an LCD device the second embodiment of the present invention;





FIG. 4

illustrates a layout for showing a production line of an LCD device according to the third embodiment of the present invention;





FIG. 5

illustrates a layout for showing a production line of an LCD device according to the fourth embodiment of the present invention; and





FIG. 6

illustrates an exemplary work lamp according to the present invention.











DETAILED DESCRIPTION OF THE ILLUSTRATED EMBODIMENTS




Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings.





FIG. 2

illustrates a layout of a production line of an LCD device according to the first embodiment of the present invention.




As shown in

FIG. 2

, a lower substrate having a thin film transistor (TFT) and a pixel electrode is loaded to a first loading device


100


, and a liquid crystal layer is formed on the lower substrate in a liquid crystal dispensing device


140


. Then, the lower substrate is loaded to a first buffer


150


.




An upper substrate having a light-shielding layer, a color filter layer and a common electrode is loaded to a second loading device


200


, and a sealant is formed on the upper substrate in a sealant forming device


220


. Then, the upper substrate is loaded to a second buffer


250


.




The lower and upper substrates are moved to an attaching device


300


and are attached to each other. After that, the substrates are moved to a UV irradiating device


400


so as to bond the substrates to each other by hardening the sealant.




In the sealant forming device


220


, monomers or oligomers each having both ends coupled to acrylic group mixed with an initiator are used as the sealant; or, monomers or oligomers each having one end coupled to acrylic group and the other end coupled to epoxy group mixed with an initiator are used as the sealant. The epoxy group is not reactive with UV light irradiation. That is, heat must also be applied to the sealant to harden the sealant completely after irradiating the UV light onto the sealant. Accordingly, a heat-hardening device is additionally provided after the UV irradiating device


400


.




Although not shown, a cell-cutting device and a testing device are additionally provided after the UV irradiating device


400


or the heat-hardening device. In the aforementioned production line, the substrates are moved by robot operating system


600


.




At this time, the devices between the sealant forming device


220


and the attaching device


300


are covered with a production line cover (as indicated by slanted lines) of UV blocking material. Preferably, the production line cover is made of UV blocking acryl. Also, work lamp


700


that does not radiate UV light is provided above the devices in a region from the sealant forming device


220


to the attaching device


300


.




Although not shown, a spacer forming device may be additionally provided between the sealant forming device


220


and the attaching device


250


for forming a ball spacer.




If particles exist in the sealant, it is difficult to bond the lower and upper substrates perfectly to each other. Accordingly, although not shown, a cleaning device should be additionally provided between the sealant forming device


220


and the attaching device


250


.




The liquid crystal may be dispensed on the lower or the upper substrate. If the liquid crystal is dispensed on the upper substrate, the liquid crystal dispensing device


140


may be provided after or before the sealant forming device


220


. Also, if the liquid crystal dispensing device


140


is provided after the sealant forming device


220


, the corresponding production line cover is made of UV blocking material.




For reference, a method forming the sealant is divided into a screen printing method and a dispensing method. In the screen printing method, since a screen contacts the substrate, the alignment layer formed on the substrate may be damaged. Also, with a trend toward the large-sized LCD device, the sealant is used in great quantities, so that it is useful to form the sealant by the dispensing method. Accordingly, the aforementioned sealant deposition device


220


may be a screen printing or dispensing device. However, examples given herein refer to a dispensing device.





FIG. 3

illustrates a layout for showing a production line of an LCD device according to the second embodiment of the present invention. The production line according to the second embodiment of the present invention is same as that according to the first embodiment of the present invention except that the production line cover of the UV blocking material is further provided above the devices between the attaching device and the UV irradiating device, as well as above the devices from the sealant forming device to the attaching device. Wherever possible, the same reference numbers will be used throughout the drawings to refer to the same or like parts.




When the lower substrate having the liquid crystal layer is attached to the upper substrate having the sealant, the liquid crystal is contaminated if the liquid crystal comes into contact with the sealant. Accordingly, relatively more liquid crystal is dispensed in the center of the lower substrate, and then is gradually spread onto the entire substrate. After the liquid crystal is spread onto the entire substrate at a constant level, a constant cell gap is maintained. In this state, the UV light has to be irradiated onto the substrate. If the sealant is hardened before irradiating the UV onto the substrate, it is impossible to form a desired cell gap.




Referring to

FIG. 3

, the production line cover for covering the devices from the attaching device


300


to the UV irradiating device


400


is made of UV blocking material such as UV blocking acryl. Also, a work lamp


700


provided above the aforementioned devices does not radiate UV light.





FIG. 4

illustrates the production line according to the third embodiment of the present invention. As shown in

FIG. 4

, a lower substrate having a thin film transistor and a pixel electrode is loaded to a first loading device


100


. A sealant is formed on the lower substrate in a sealant forming device


200


, and a liquid crystal layer is formed on the sealant of the lower substrate in a liquid crystal dispensing device


140


. After that, the lower substrate having the sealant and the liquid crystal layer is loaded to a first buffer


150


.




An upper substrate having a light-shielding layer, a color filter layer and a common electrode is loaded to a second loading device


200


, and then is loaded to a second buffer


250


. At this time, a spacer forming device may be additionally provided between the second loading device


200


and the second buffer


250


.




The lower and upper substrates are attached to each other in the attaching device


300


, and then are hardened by hardening the sealant with the UV irradiating device


400


.




At this time, devices from a sealant forming device


220


to the attaching device


300


are covered with a production line cover (slanted lines). The cover is made of UV blocking material such as UV blocking acryl.




A work lamp


700


that does not radiate UV light is provided in an upper space from the sealant forming device


220


to the attaching device


300


.




Although not shown, a spacer forming device may be additionally provided between the sealant forming device


220


and the attaching device


300


. (In this case, the spacer forming device is not provided between the aforementioned second loading device


200


and the second buffer


250


.) Also, silver (Ag) forming device may be additionally provided between the sealant forming device


220


and the attaching device


300


for applying a voltage to a common electrode of the upper substrate. Preferably, the silver (Ag) is deposited in a dispensing method, and the Ag forming device is a dispensing device.





FIG. 5

illustrates a layout for showing a production line of an LCD device according to the fourth embodiment of the present invention.




An LCD device according to the fourth embodiment of the present invention is same as the third embodiment except that production line cover of UV blocking material is further provided from an attaching device


300


to a UV irradiating device


400


, and a work lamp


700


that does not radiate UV light is further provided above the production line cover.





FIG. 6

illustrates an exemplary work lamp


700


that does not radiate UV light. As shown in

FIG. 6

, one embodiment of a work lamp


700


that does not radiate UV light includes a light source


702


. The light source


702


may actually irradiate light in a spectrum including ultraviolet light. To prevent the ultraviolet light from being radiated onto the production, an ultraviolet light shield


701


is provided to surround the light source


702


to block UV light from being irradiated. The UV light shield


701


may be made of UV blocking as UV blocking acryl.




As mentioned above, the production line according to the preferred embodiments of the present invention has the following advantages.




The production line cover for covering the devices from the sealant forming device to be attaching device is made of UV blocking material, and the work lamp that does not radiate UV light is provided in the upper space from the sealant forming device


220


to the attaching device


300


. Accordingly, the sealant is not hardened before attaching the substrates, so that the lower substrate is perfectly bonded to the upper substrate. Also, the sealant is not hardened until arriving the UV irradiating device, so that the desired cell gap is maintained.




It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention. Thus, it is intended that the present invention covers the, modifications and variations of this invention provided they come within the scope of the appended claims and their equivalents.



Claims
  • 1. A production line of an LCD device, the production line having a plurality of processing devices, comprising:a production line shield being formed of a UV blocking material and positioned along a sealant forming device and an attaching device and between the sealant forming device and the attaching device; and at least one work lamp that does not radiate ultraviolet light.
  • 2. The production line as claimed in claim 1, wherein the at least one work lamp is located in a region from the sealant forming device to the attaching device.
  • 3. The production line as claimed in claim 1, wherein the at least one work lamp includes a light source and an ultraviolet light shield.
  • 4. The production line as claimed in claim 3, wherein the ultraviolet light shield includes an acryl.
  • 5. The production line as claimed in claim 1, wherein the at least one work lamp includes a light source and a light shield, wherein the light shield blocks light having a wavelength less than about 600 nm.
  • 6. The production line as claimed in claim 1, wherein the UV blocking material includes an acryl.
  • 7. The production line as claimed in claim 1, further comprising a spacer forming device between the sealant forming device and the attaching device.
  • 8. The production line as claimed in claim 1, further comprising a liquid crystal dispensing device between the sealant forming device and the attaching device.
  • 9. The production line as claimed in claim 8, wherein the production line shield is along the liquid crystal dispensing device.
  • 10. The production line as claimed in claim 8, wherein the production line shield is over the liquid crystal dispensing device.
  • 11. The production line as claimed in claim 1, wherein the production line includes a first processing line and a second processing, wherein the first processing line includes the sealant forming device and the second processing includes a liquid crystal dispensing device.
  • 12. The production line as claimed in claim 1, further comprising a silver (Ag) forming device between the sealant forming device and the attaching device.
  • 13. The production line as claimed in claim 1, further comprising a cleaning device between the sealant forming device and the attaching device.
  • 14. The production line as claimed in claim 1, further comprising a heat-hardening device after the UV irradiating device.
  • 15. The production line as claimed in claim 1, wherein the production line shield is over the sealant forming device and the attaching device and between the sealant forming device and the attaching device.
  • 16. The production line as claimed in claim 15, wherein the at least one work lamp is located in a region from the sealant forming device to the attaching device.
  • 17. The production line as claimed in claim 15, wherein the at least one work lamp includes a light source and an ultraviolet light shield.
  • 18. The production line as claimed in claim 17, wherein the ultraviolet light shield includes an acryl.
  • 19. The production line as claimed in claim 15, wherein the at least one work lamp includes a light source and a light shield, wherein the light shield blocks light having a wavelength less than about 600 nm.
  • 20. The production line as claimed in claim 15, wherein the UV blocking material includes an acryl.
  • 21. The production line as claimed in claim 15, further comprising a spacer forming device between the sealant forming device and the attaching device.
  • 22. The production line as claimed in claim 15, further comprising a liquid crystal dispensing device between the sealant forming device and the attaching device.
  • 23. The production line as claimed in claim 22, wherein the production line shield is along the liquid crystal dispensing device.
  • 24. The production line as claimed in claim 22, wherein the production line shield is over the liquid crystal dispensing device.
  • 25. The production line as claimed in claim 15, wherein the production line includes a first processing line and a second processing, wherein the first processing line includes the sealant forming device and the second processing includes a liquid crystal dispensing device.
  • 26. The production line as claimed in claim 15, further comprising a silver (Ag) forming device between the sealant forming device and the attaching device.
  • 27. The production line as claimed in claim 15, further comprising a cleaning device between the sealant forming device and the attaching device.
  • 28. The production line as claimed in claim 15, further comprising a heat-hardening device after the UV irradiating device.
  • 29. A production line of an LCD device, the production line having a plurality of processing devices, comprising:a production line shield, the production line shield being formed of a UV blocking material and positioned along a sealant forming device and an UV irradiating device and between the sealant forming device and the UV irradiating device; and at least one work lamp that does not radiate ultraviolet light.
  • 30. The production line as claimed in claim 29, wherein the at least one work lamp is located in a region from the sealant forming device to the UV irradiating device.
  • 31. The production line as claimed in claim 29, wherein the at least one work lamp includes a light source and an ultraviolet light shield.
  • 32. The production line as claimed in claim 31, wherein the ultraviolet light shield includes an acryl.
  • 33. The production line as claimed in claim 29, wherein the at least one work lamp includes a light source and a light shield, wherein the light shield blocks light having a wavelength less than about 600 nm.
  • 34. The production line as claimed in claim 29, wherein the UV blocking material includes an acryl.
  • 35. The production line as claimed in claim 29, further comprising a spacer forming device between the sealant forming device and the UV irradiating device.
  • 36. The production line as claimed in claim 29, further comprising a liquid crystal dispensing device between the sealant forming device and the UV irradiating device.
  • 37. The production line as claimed in claim 36, wherein the production line shield is along the liquid crystal dispensing device.
  • 38. The production line as claimed in claim 36, wherein the production line shield is over the liquid crystal dispensing device.
  • 39. The production line as claimed in claim 29, wherein the production line includes a first processing line and a second processing, wherein the first processing line includes the sealant forming device and the second processing includes a liquid crystal dispensing device.
  • 40. The production line as claimed in claim 29, further comprising a silver (Ag) forming device between the sealant forming device and the UV irradiating device.
  • 41. The production line as claimed in claim 29, further comprising a cleaning device between the sealant forming device and the UV irradiating device.
  • 42. The production line as claimed in claim 29, further comprising a heat-hardening device after the UV irradiating device.
  • 43. The production line as claimed in claim 29, wherein the production line shield is over the sealant forming device and the UV irradiating device and between the sealant forming device and the UV irradiating device.
  • 44. The production line as claimed in claim 43, wherein the at least one work lamp is located in a region from the sealant forming device to the UV irradiating device.
  • 45. The production line as claimed in claim 43, wherein the at least one work lamp includes a light source and an ultraviolet light shield.
  • 46. The production line as claimed in claim 45, wherein the ultraviolet light shield includes an acryl.
  • 47. The production line as claimed in claim 43, wherein the at least one work lamp includes a light source and a light shield, wherein the light shield blocks light having a wavelength less than about 600 nm.
  • 48. The production line as claimed in claim 43, wherein the UV blocking material includes an acryl.
  • 49. The production line as claimed in claim 43, further comprising a spacer forming device between the sealant forming device and the UV irradiating device.
  • 50. The production line as claimed in claim 43, further comprising a liquid crystal dispensing device between the sealant forming device and the UV irradiating device.
  • 51. The production line as claimed in claim 43, further comprising a silver (Ag) forming device between the sealant forming device and the UV irradiating device.
  • 52. The production line as claimed in claim 43, further comprising a cleaning device between the sealant forming device and the UV irradiating device.
  • 53. The production line as claimed in claim 43, further comprising a heat-hardening device after the UV device.
Priority Claims (1)
Number Date Country Kind
2002-011922 Mar 2002 KR
Parent Case Info

This application claims the benefit of the Korean Application No. P2002-11922 filed on Mar. 6, 2002, which is hereby incorporated by reference for all purposes as if fully set forth herein. This application incorporates by reference two co-pending applications, Ser. No. 10/184,096, filed on Jun. 28, 2002, entitled “SYSTEM AND METHOD FOR MANUFACTURING LIQUID CRYSTAL DISPLAY DEVICES” and Ser. No. 10/184,088, filed on Jun. 28, 2002, entitled “SYSTEM FOR FABRICATING LIQUID CRYSTAL DISPLAY AND METHOD OF FABRICATING LIQUID CRYSTAL DISPLAY USING THE SAME” as if fully set forth herein

US Referenced Citations (45)
Number Name Date Kind
3978580 Leupp et al. Sep 1976 A
4094058 Yasutake et al. Jun 1978 A
4333715 Brooks Jun 1982 A
4653864 Baron et al. Mar 1987 A
4691995 Yamazaki et al. Sep 1987 A
4775225 Tsuboyama et al. Oct 1988 A
4952925 Haastert Aug 1990 A
5103336 Sieloff Apr 1992 A
5247377 Omeis et al. Sep 1993 A
5263888 Ishihara et al. Nov 1993 A
5379139 Sato et al. Jan 1995 A
5406989 Abe Apr 1995 A
5479277 Fergason Dec 1995 A
5499128 Hasegawa et al. Mar 1996 A
5507323 Abe Apr 1996 A
5511591 Abe Apr 1996 A
5539545 Shimizu et al. Jul 1996 A
5539552 Desai et al. Jul 1996 A
5548429 Tsujita Aug 1996 A
5642214 Ishii et al. Jun 1997 A
5680189 Shimizu et al. Oct 1997 A
5742370 Kim et al. Apr 1998 A
5757451 Miyazaki et al. May 1998 A
5852484 Inoue et al. Dec 1998 A
5854664 Inoue et al. Dec 1998 A
5861932 Inata et al. Jan 1999 A
5875922 Chastine et al. Mar 1999 A
5952678 Ashida Sep 1999 A
5956112 Fujimori et al. Sep 1999 A
6001203 Yamada et al. Dec 1999 A
6011609 Kato et al. Jan 2000 A
6016178 Kataoka et al. Jan 2000 A
6016181 Shimada Jan 2000 A
6055035 von Gutfeld et al. Apr 2000 A
6128056 Kubota et al. Oct 2000 A
6163357 Nakamura Dec 2000 A
6219126 Von Gutfeld Apr 2001 B1
6226067 Nishiguchi et al. May 2001 B1
6236445 Foschaar et al. May 2001 B1
6304306 Shiomi et al. Oct 2001 B1
6304311 Egami et al. Oct 2001 B1
6313894 Sekine et al. Nov 2001 B1
6337730 Ozaki et al. Jan 2002 B1
6414733 Ishikawa et al. Jul 2002 B1
20010021000 Egami Sep 2001 A1
Foreign Referenced Citations (129)
Number Date Country
1003066 May 2000 EP
51-065656 Jun 1976 JP
57038414 Mar 1982 JP
57088428 Jun 1982 JP
58027126 Feb 1983 JP
59-057221 Apr 1984 JP
59-195222 Nov 1984 JP
60-111221 Jun 1985 JP
60164723 Aug 1985 JP
60217343 Oct 1985 JP
61007822 Jan 1986 JP
61055625 Mar 1986 JP
62089025 Apr 1987 JP
62090622 Apr 1987 JP
62205319 Sep 1987 JP
63109413 May 1988 JP
63110425 May 1988 JP
63128315 May 1988 JP
63311233 Dec 1988 JP
05127179 May 1993 JP
05-154923 Jun 1993 JP
05265011 Oct 1993 JP
05281557 Oct 1993 JP
05281562 Oct 1993 JP
06051256 Feb 1994 JP
06148657 May 1994 JP
6160871 Jun 1994 JP
06-235925 Aug 1994 JP
06265915 Sep 1994 JP
06-313870 Nov 1994 JP
07-084268 Mar 1995 JP
07128674 May 1995 JP
07181507 Jul 1995 JP
08095066 Apr 1996 JP
08-101395 Apr 1996 JP
08106101 Apr 1996 JP
08171094 Jul 1996 JP
08190099 Jul 1996 JP
08240807 Sep 1996 JP
09005762 Jan 1997 JP
09026578 Jan 1997 JP
09-061829 Mar 1997 JP
09073075 Mar 1997 JP
09073096 Mar 1997 JP
09127528 May 1997 JP
09230357 Sep 1997 JP
09281511 Oct 1997 JP
09311340 Dec 1997 JP
10123537 May 1998 JP
10123538 May 1998 JP
10142616 May 1998 JP
10-177178 Jun 1998 JP
10221700 Aug 1998 JP
10282512 Oct 1998 JP
10-333157 Dec 1998 JP
10-333159 Dec 1998 JP
11014953 Jan 1999 JP
11038424 Feb 1999 JP
11064811 Mar 1999 JP
11109388 Apr 1999 JP
11-133438 May 1999 JP
11-142864 May 1999 JP
11174477 Jul 1999 JP
11212045 Aug 1999 JP
11-248930 Sep 1999 JP
11-326922 Nov 1999 JP
11344714 Dec 1999 JP
2000-002879 Jan 2000 JP
2000029035 Jan 2000 JP
2000-056311 Feb 2000 JP
2000-066165 Mar 2000 JP
2000-137235 May 2000 JP
2000-147528 May 2000 JP
2000-193988 Jul 2000 JP
2000-241824 Sep 2000 JP
2000-284295 Oct 2000 JP
2000-292799 Oct 2000 JP
2000-310759 Nov 2000 JP
2000-310784 Nov 2000 JP
2000-338501 Dec 2000 JP
2001-005401 Jan 2001 JP
2001-005405 Jan 2001 JP
2001-013506 Jan 2001 JP
2001-033793 Feb 2001 JP
2001-042341 Feb 2001 JP
2001-051284 Feb 2001 JP
2001-066615 Mar 2001 JP
2001-091727 Apr 2001 JP
2001117105 Apr 2001 JP
2001-117109 Apr 2001 JP
2001-133745 May 2001 JP
2001133794 May 2001 JP
2001-133799 May 2001 JP
2001142074 May 2001 JP
2001147437 May 2001 JP
2001154211 Jun 2001 JP
2001-166272 Jun 2001 JP
2001-166310 Jun 2001 JP
2001-183683 Jul 2001 JP
2001-209052 Aug 2001 JP
2001-222017 Aug 2001 JP
2001-235758 Aug 2001 JP
2001-215459 Sep 2001 JP
2001255542 Sep 2001 JP
2001264782 Sep 2001 JP
2001-201750 Oct 2001 JP
2001-272640 Oct 2001 JP
2001-281675 Oct 2001 JP
2001-281678 Oct 2001 JP
2001-282126 Oct 2001 JP
2001-305563 Oct 2001 JP
2001-330837 Nov 2001 JP
2001330840 Nov 2001 JP
2001-356353 Dec 2001 JP
2001356354 Dec 2001 JP
2002014360 Jan 2002 JP
2002023176 Jan 2002 JP
2002049045 Feb 2002 JP
2002082340 Mar 2002 JP
2002090759 Mar 2002 JP
2002090760 Mar 2002 JP
2002107740 Apr 2002 JP
2002122872 Apr 2002 JP
2002122873 Apr 2002 JP
2002080321 Jun 2002 JP
202214626 Jul 2002 JP
2002202512 Jul 2002 JP
2002202514 Jul 2002 JP
2000-0035302 Jun 2000 KR